Smooth Cylinder/Low Speed Cylinder

-X 1191 Series CM2Y Basic Style (B) CM2YB Bore size Stroke H1 H2 G G 2 x NN 2 x P (Rc, NPT, G) Width across flats B2 Width across flats B1 I 2 x Eh8 NA D Effective thread length 2 x FL Width across flats KA MM AL A F N N K NA 1.5 1.5 S + Stroke F H ZZ + Stroke Boss-cut ZZ + Stroke (mm) B1 FL K KA N NA NN P S B2 D H2 I MM ZZ E A F AL G H H1 Bore size (mm) 0 0.033 0 0.033 0 0.033 0 0.039 20

Table of Contents

Dimensions (RS-232C without optional unit) Driver 5 100 40 1-5 hole 5 5 5 120 130 5 5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Driver input/output signal list (CN-1/F connector) Driver dimensions Pin no. Pin no.

Dedicated Controller

Dimensions (RS-232C without optional unit) Driver 5 100 40 1-5 hole 5 5 5 120 130 5 5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Driver input/output signal list (CN-1/F connector) Driver dimensions Pin no. Pin no.

Electric Actuator with Integrated Guide

Dimensions (RS-232C without optional unit) Driver 5 100 40 1-5 hole 5 5 5 120 130 5 5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Driver input/output signal list (CN-1/F connector) Driver dimensions Pin no. Pin no.

ZR

ZR1--CN . 1 pc.

IDX-OM-V022

Series 7.3 Dimensions 7-3 IDX-OM-V022 Chapter 7 Documents 7.4 Electric circuit IDF60/70 200/200,220VAC 1PH 50/60Hz SYMBOL DESCRIPTION CM Refrigerating compressor OLR Overload relay FM Fan motor MC Magnetic contactor PRS High pressure switch PRS2 Pressure switch ILS Switch with lamp THR Thermal relay C01 Capacitor for refrigerating compressor C11 Capacitor for fan motor TB Terminal block CN

IDX-OM-W093

GFCI EDV PE TDR BK WH GR SY BU IDF80/90-20-T BR B A A B YE AC 200/200,220V 50/60Hz OR G/Y / IDF60/70/80/90 Series 12-4 IDX-OM-W093 T IDF60/70-30-T SIGNAL CM OLR FM MC MC2 PRS PRS2 ILS THR C11 TB CN GFCI EDV PE TDR APR IDF80/90-30-T SIGNAL CM FM MC MC2 PRS PRS2 ILS THR C11 TB CN GFCI EDV PE TDR APR IDF60/70/80/90 Series 12-5 IDX-OM-W093

Made to Order

H1 H2 CS1 CS2 CS1, CS2 common Symbol H A L1 H1 H2 Series Applicable knuckle joint part no.

Table of Contents

(Hexagon width across flats) (Hexagon width across flats) H2 H2 (Hexagon width across flats) (He (Hexagon width across flats) xagon width across flats) (Hexagon width across flats) D3 L5 A1 D1 A2 T1 Metric Size L4 Weight (g) AS A2 A1 M L3 L2 L1 d T1 D1 D2 H2 H1 Max.

Electric Rotary Table

230 (Motor cable entry: Entry on the left side) Dimensions [mm] 5H8 ( ) depth 5.5 20 H1 H2 H3 Model LER50 LERH50 16 5.5 15.5 26 15.5 25.5 +0.018 0 2 x M10 x 1.5 x 20 2 30 10 Series LER Electric Rotary Table/ Specific Product Precautions 1 Be sure to read before handling.

KF

Straight Union: KFH H2 (width across flats) H1 (width across flats) Applicable tubing (mm) I.D.

SI Unit for Vacuum Manifold

Hysteresis H2 Sub Size Acc ess Default (dec) Content Description index [byte] 1 2 R/W 0x0064 Energy saving operation hysteresis (H2) of CH0 Set energy saving operation hysteresis (H2) for each CH. Refer to Section 5.

Miniature Fittings M3, R(PT) 1/8, M5 Series M

H2 (Hex.) Weight (g) L1 L2 L3 M d Part No. O.D.

S Couplers Series KK/KKH/KK13

Effective area mm2 L1 H1 Width across flats Min. bore size M H2 Width across flats 14 Body size Mass g Model L2 Applicable hose KK3P-50N 5/8 14 21.4 4.5 12.7 36.1 13.7 1/8 -60N 6/9 5.4 18.3 38.8 18.4 17 39.9 16.5 H1 H2 -65N 6.5/10 21.9 35.9 5.9 KK4P-50N 14 43.9 13.7 17 5/8 34.7 12.7 4.5 -60N 6/9 48.4 5.4 18.3 17 46.7 16.5 1/4 -65N 6.5/10 5.9 21.9 45.1 25.2 -80N 8/12 34.4 53.2 7.4 47.6 L2

CM2

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Width across flats B3 e 9 l 9 f h ZZ + Stroke Boss-cut style Built-in One-touch fittings One-touch fitting port size P ZZ + Stroke H1 H G F E MM P ZZ B2 D H2 I A AL B1 K N NA NN S Bore size (mm) 0 0.033 0 0.033 0 0.033 0 0.039 20 41 8 13 20 116 8 18 5

Manually Operated Integral Fitting Type/Threaded Type Series LVH

(H1) (H2) 2 x P B C SMC A B E L J B 2 x P 2 x F K Body material: PFA N G A D L K 4 x M Non-locking type Locking type 60 (H1) (H2) C A B SMC E J B 2 x P (mm) Dimensions D G E C M P N L K J H2 F H1 B A Model Body material LVH20 LVH30 LVH40 LVH20 LVH30 LVH40 LVH20 LVH30 LVH40 M5 x 0.8 10 10 54.5 Rc 1/8, 1/4, NPT 1/8, 1/4 27 22 22 76.5 75 33 30 (SUS) Stainless steel 19 13 81 Rc 1/4, 3/8,

Prevents Micro-Bubbles

Non-locking type Locking type C (H1) (H2) 60 A B E C (H1) (H2) 2-P B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SMC A B E L J B 2-P 2-F K Body material: PFA N G A D L K 4-M Non-locking type Locking type 60 C (H1) (H2) A B SMC E J B 2-P (mm) Dimensions A B C D

H/DL/L/LL

P. 64 15-2-61 Series H/DL/L/LL Male Connector: H H1 (width across flats) H2 (width across flats) Applicable tubing O.D.

Series H, DL, L, LL Self-align Fittings

H2 (Hex.)

High Purity Chemical Valve

E (H1) (H2) 2 x P B C SMC A B E L J B 2 x P 2 x F K Body material: PFA N G A D L K 4 x M Non-locking type Locking type 60 (H1) (H2) C A B SMC E J B 2 x P (mm) Dimensions A B C D E F H1 G H2 J K L M N P Model Body material LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m M5 x 0.8 30 33 54.5 10 10 75 76.5 22 22 27 Rc 1/8, 1/4, NPT 1/8, 1/4 (SUS) Stainless steel 36 47 81 13