XL XL -50 XL -63 XL -80 (a) 1 1 1 1 2 (a) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.
Applicable bore size (mm) B1 C D d H1 Applicable bore size (mm) Part No.
Dd9 t m L d Part no. l Trunnion Nut CD-S02 CD-S03 0.040 0.076 8 0.9 1.6 19.5 24.5 7.6 Type C 8 for axis Material: Carbon steel 0.040 0.076 10 1.15 1.35 29 34 9.6 Type C 10 for axis Applicable bore size (mm) 20 25, 32 40 D C B d H Part no.
C H B H B B C D d H B C D d H Part no.
2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B 6 1/8,1/4 500 1.5 0 1,000 2,000 3,000 6 1/4, 3/8 10 1/4, 3/8 Maximum speed Vmax [mm/s] 1000 3 25 20 1500 4.5 Composite effective area So [mm] Composite effective area So [mm] Composite effective area So [mm] 10 1/4,3
2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 1/8, 1/4 500 1.5 0 1,000 2,000 3,000 6
[F 1] OUT1 33 No.LFE*-OMY0008 H_1(H_2) H_1(H_2) H_1(H_2) H_1(H_2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) 0 0 0 0 ON ON ON ON 0 0 0 0 0 0 0 0 ON ON ON ON 49 34 No.LFE*-OMY0008 H_1(H_2) H_1(H_2) H_1(H_2) H_1(H_2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) 0 0 0 0 ON ON ON ON 0 0 0 0 0 0 0 0 ON ON ON ON 35 No.LFE*-OMY0008 [F 2] OUT2
Applicable bore size (mm) D B1 C d H1 (mm) Part no.
Applicable bore size (mm) D B1 C d H1 (mm) Part no.
: A22 Symbol: A26 Symbol: A23 T W1 L L L L CP95 RD 30 DA 30 30 DA H1 H1 DA E NCM H1 Symbol: A5 Symbol: A6 Symbol: A7 Symbol: A8 30 DB DB NCA B C1 H B C T B RD T X LA H C1 DW X L H C1 X L X L K L LB -X W E L 30 30 30 L DC 30 Symbol: A30 Symbol: A29 Symbol: A28 Symbol: A27 20L L H1 Data 30 30 30 30 H1 W H1 DA E DA W Symbol: A9 Symbol: A10 Symbol: A11 Symbol: A12 X C0.5 R sphere T T C1
Applicable bore size (mm) D B1 C d H1 Part no.
Part no. l Applicable snap ring t m 16.2 20.2 36.2 1.5 1.55 1.55 0.9 1.15 1.15 Type C 8 for axis Type C 10 for axis Type C 10 for axis IY-G02 IY-G03 IY-G04 CD-G02 CD-G25 CD-G03 CD-G04 Type C 8 for axis Type C 10 for axis Type C 12 for axis Type C 14 for axis 38.6 42.6 54 65 1.5 1.55 1.55 2.05 0.9 1.15 1.15 1.15 9-2-34 33 Lock-up Cylinder Double Acting, Single Rod Series CL1 40, 50, 63, 80
Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-
D C D C Mounting bolt part no.
Please delete the unnecessary part. 1.4-13 Standard: Double Acting Single Rod Series CM2 Single Clevis (C) CM2C Bore size Stroke CJ1 CJP CJ2 CM2 C85 CG1 MB C95 CA1 CS1 (mm) B1 MM P 1/8 1/8 1/8 1/4 Bore Stroke range L N NA NN RR U E A CI I K S Z AL CD ZZ CX D F G H H1 0 0.033 0 0.033 0 0.033 0 0.039 1 to 300 15.5 13 5 M8 X 1.25 M20 X 1.5 133 142 30 15 24 9 14 18 24 28 5 62 9 10 8 13 20 8 41
D RS Q G C 22 30 35 37 0.5 Graph (2) Applicable Max.
Cushion valve G 2 x Rc P W V Port G E Width across flats KA TX D E B C H1 AL MM MB MA N 2 x 4 x J N TY B C Width across flats B1 A H K F TT ZZ + Stroke S + Stroke With rod boot d e 10.2 10.2 f h l [mm] Bore size [mm] A AL B B1 C D E F G H H1 J K KA MA MB MM N P S TT TX TY V W ZZ 32 22 19.5 46 17 32.5 12 30 13 13 47 6 M6 x 1 6 10 16 4 M10 x 1.25 27 1/8 84 17 48 49 4 6.5 135 40 30 27 52 22