Guide Cylinder/Compact Type Series MGC

AE W View A-A' Standard Stroke (mm) A AA AB AC AD AE AF AP B BP Note 3) BZ C D E F G GC Bore size (mm) 20 25 32 40 Stroke range (mm) 75, 100, 125, 150, 200 94 12 13 16.5 70 35 M6 x 1 depth 12 32 135 1/8 73.5 26.5 50 118 6.8 11 depth 8 28 104 16 16 19 75 40 37 160 1/8 86.5 31.5 50 140 8.6 14 depth 10 29 M8 x 1.25 depth 16 75, 100, 125 150, 200, 250 300 104 16 16 19 75 40 37 160 1/8 86.5 31.5

Guide Cylinder Series MGG

(mm) Bore size (mm) Stroke range (mm) O N M L K J I B AP AO AN AM AH AG AB AA AL AK AJ AI A 20 25 32 40 50 75, 100, 125, 150, 200 M6 x 1 depth 9 45 25 80 60 55 30 108 25 M6 115 65 125 112 11 12 9 6.6 95 82 99 M6 x 1 depth 13 54 35 100 70 65 35 130 30 M8 135 75 150 134 13 16 9 9 108 92 109 75, 100 125, 150 200, 250 300 M6 x 1 depth 13 60 35 106 80 73 40 135 35 M8 140 85 150 134 16 16 9 9

Vacuum

-Pad ;;rol2 25 40 Flat type I a o o o a o a o o a o o Flat with rblo o a o o a a o eep tvpe lo a o a Bellows | a a a a a a o a a a 132 ZCDUKC Male Cap porting zPf (v&uum pad !

Vacuum

-Pad ;;rol2 25 40 Flat type I a o o o a o a o o a o o Flat with rblo o a o o a a o eep tvpe lo a o a Bellows | a a a a a a o a a a 132 I ZCDUKC Male Cap porting zPf (v&uum pad !

Check Valve Series AK 1

AK ASS ASR Straight type Easily installed in pipe lines.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type

AS ASP ASN AQ ASV Dimensions AK Universal type Weight (g) T H1 H2 D1 D2 D3 L1 L2 L3 L4 L5 A M1 Max. Min. Max. Min.

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Dimensions inch (mm) AK3542 & 4542 M5 x 0.8 Actuation port 1.57 (40) 2.24 (57) 2 x Compression 2 x R, NPT male 2 x Rc, NPT female 0.44 (11.2) B B A A A Connections: N, BRN Connections: 4T, 6T Connections: 4, 6, BR 4 6 4 6 4 6 Ports A B Connections inch (mm) inch (mm) 4T 2.56 (65.0) 1.12 sq. (28.4) 1/4 inch compression 4BR 1.70 (43.2) Rc 1/4 4BRN 2.32 (58.9) 1.12 sq. (28.4) R 1/4 4 1.70

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Size ASF Model d T Weight (g) H D1 D2 L1 L2 L3 L4 A Model d T Weight (g) H D1 D2 L1 L2 L3 L4 A Max.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

VCHC ASS Metric Size Inch Size ASR ASQ Model d T Weight (g) H D1 D2 L1 L2 L3 L5 (1) A (2) Model d T Weight (g) H D1 D2 L1 L2 L3 L5 (1) A (2) D3 L4 Max.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Note 2) 3/16", 3/8", 1/2" are made of brass (Electroless nickel plated). 15-9-78 5 Speed Controller Adjustable by Flat Head Screwdriver With One-touch Fitting, Elbow Type/Universal Type Dimensions Elbow type L5 D3 H (Hexagon width across flats) Applicable tubing O.D. d AS A L4 ASP D1 ASN L3 AQ ASV AK M1 ASS D2 T L1 ASR L2 ASF Metric Size Inch Size d T H D2 D3 L1 L2 L3 L4 L5 A M1 d T H D1

Cooling Capacity: 250 (25kW), Thread: Rc

Cooling Capacity: 25kW, Thread: Rc, Option: -

AS-FPQ/AS-FPG

Block off the heat with a cover, etc. 5. Do not use in locations where static electric charges will be a problem. Please consult with SMC regarding use in this kind of environment. 6. Do not use in locations where spatter occurs. There is a danger of spatter causing a fire. Please consult with SMC regarding use in this kind of environment. 15-17-8

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

L4 L4 L5 A L5 D3 D3 T T D2 L1 D2 L1 L2 L2 AS ASP Metric Size ASN A M1 L5 Max.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

VCHC ASS Metric Size Inch Size ASR ASQ Model d T Weight (g) H D1 D2 L1 L2 L3 L5 (1) A (2) Model d T Weight (g) H D1 D2 L1 L2 L3 L5 (1) A (2) D3 L4 Max.

1

32 272 178 36 Stroke B Stroke A S + Stroke (A + B) ZZ + Stroke (A + B) 40 280 178 38 50 314 198 41 63 314 198 43 80 386 242 52 ZZ S Q L GC Bore size (mm) 100 386 242 52 40 282 180 66 12 42 GC 50 310 194 74 14 48 Stroke B Stroke A Series MB1 63 326 210 76 14 48 S + Stroke (A + B) 80 390 248 90 16 58 ZZ + Stroke (A + B) 100 414 270 98 18 60 Stroke B Stroke A ZZ + Stroke (A + B) S + Stroke

Process Gas Diaphragm Valve

Construction Diaphragm Seat Body 1110 B Diaphragm Valve for Ultra High Purity Air operated type Series AZ3542 & 4542 Dimensions inch (mm) AZ3542 & 4542 Ports: 2PW (Welded) Ports: 2P (Machined) M5 x 0.8 Actuation port Actuation port M5 x 0.8 1.57 (40) 1.57 (40) FORGED BODY BAR STOCK BODY Note) 2.24 (57) 2.24 (57) 0.44 (11.2) 0.44 (11.2) A A B A A Connections: MV, FV Connections: MV B A A A

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

As a guide, tighten it by hand, then turn it two or three turns with a wrench. Check the dimensions of each product for the hexagon width across flats.

Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Model Metric size Inch size ASP 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS1001F 6, 10, 16, 20 ASN AS2001F 20, 25, 32 AS2051F 20, 25, 32, 40 AQ AS3001F 40, 50, 63 ASV AS4001F 63, 80, 100 AK Flow Rate and Effective Area ASS AS1001F AS2001F AS3001F AS2051F AS4001F Model JIS Symbol Metric size 6 6 8 10 6 8 3.2, 4, 6 4 10, 12 12 ASR Tubing O.D.