Check Valve Series AK 1

5/32, 1/4 5/16 x NPT 1/8 8, 10, 12 5/16, 3/8, 1/2 Free flow Female thread Male thread t r t r Free flow One-touch fitting Male thread u r y e w e y q y u r y e w u i t q i t q i t q r y e w AS e w q w ASP o Free flow Female thread Male thread ASN Free flow One-touch fitting Male thread AQ ASV AK Component Parts ASS Description Material Note No.

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

1 AS-FP w Meter-out type Meter-in type AS-FM AS-D Universal type AS-T Seal method: Gasket seal For Uni thread ASP !1 !1 r r ASN q q !2 !2 AQ y y ASV !3 w t t AK w i i VCHC o ASR ASQ o !0 e !0 e u u !4 !4 Meter-in type Meter-out type Component Parts Meter-in type Meter-out type No.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

ASN AQ Construction: Universal Type ASV Meter-out type Meter-in type AK JIS Symbol JIS Symbol ASS Component Parts ASR Description Material PBT PBT PBT Brass Brass Note White White Black (1) No. w !0 Body A Elbow body Handle Body B Needle q w e r t ASF r u w !1 !6 Electroless nickel plated Electroless nickel plated Electroless nickel plated, M5 type only t e Needle guide Brass y !

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type

0 w !2 ASR ASF Component Parts Component Parts No. Model No.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

e r t q w e r t i i o o !

1

NCA Stroke Range DSeries Bore size (mm) Standard stroke (mm) Long stroke (mm) MY1B 10, 16, 20, 25, 32, 40, 50, 63, 80, 100 100 to 2000 2001 to 5000 (Up to 3000 for 10, 16) -X MY1M(W) 16, 20, 25, 32, 40, 50, 63 100 to 2000 2001 to 5000 (Up to 3000 for 16) MY1C(W) 16, 20, 25, 32, 40, 50, 63 100 to 2000 2001 to 5000 (Up to 3000 for 16) 20MY1H 16, 20, 25, 32, 40 50 to 600 601 to 1500 (Up to 1000

Process Gas Diaphragm Valve

OUTLET INLET Mounting hole Top view (Mounting hole on bottom) Porting Symbols OUTLET (Downstream) INLET (Upstream) 2PW 2PWA 2PWC q q q w 2 PORTS w w 3PWD 3PWE 3PWG 3 PORTS q q q e e e w w w 4PWM q e r 4 PORTS w 1114 A

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 12 10 8 6 4 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M50.8 6, 10, 16, 20 AS231FG-01 AS221FG-01 20, 25, 32 R 1/8 AS231FG-02 AS221FG-02 20, 25, 32, 40 R 1/4 AS331FG-02 AS321FG-02 40, 50, 63 R 1/4 AS331FG-03 AS321FG-03 40, 50, 63 R 3/8 AS431FG-04 AS421FG-04 63, 80, 100 R 1/2

Vacuum System Peripherals:

q Nil None With vacuum switch t r e w q Number of ejector/valve stations E Alignment (for special specifications) U side D side 13-14-40 40 e Valve Model Fill in the blanks below with symbols of necessary specifications.

Cooling Capacity: 100 (11.5kW), Thread: Rc, Option: AK (A + K)

Cooling Capacity: 11.5kW, Thread: Rc, Option: A + K

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !

AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel 304 M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel plated

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

Description Material Body A Elbow body Handle Body B Needle Needle guide Seat ring Lock nut U seal Cassette Seal O-ring O-ring O-ring O-ring O-ring Spacer Gasket Note PBT PBT PBT Brass(1) PBT PBT Brass(1) q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 q w e r t y u i o !0 !1 !2 !3 !4 !

MGC

x 1.25 depth 14 32 40 75 22 16 18 107 8.6 140 50 34.5 160 14 depth 10 M10 x 1.5 depth 18 37 M8 x 1.25 depth 16 45 110 22 19 23 142 10.5 170 80 37 194 17 depth 12 M12 x 1.75 depth 21 42 M10 x 1.5 depth 20 Bore size (mm) W Z Y X WH W V U T S R Q O N M L K J I P 20 25 32 40 50 30 140 80 30 23 36 40 86 12 26 12 21 M6 x 1 25 38 80 60 44 25 M5 x 0.8 30 153 80 37 25 44 47 98 13 31 12 21 M6 x 1

MLGC

W A' BP Lock port for pressure lock (Plug with breathing hole for spring lock) AP AB V Y + Stroke Z + Stroke 4-AK hole For 4-AO WH (Max.)

MLGC

70 4 104 40 7 7 32 38 Rc 1/8 Rc 1/8 62 60 13 125 M8 x 1.25 M12 x 1.75 depth 21 115 11 82.5 4 115 45 8 8 38 47 67 75 14 150 M8 x 1.25 WH W X Y U W T V Z Bore size (mm) 20 25 32 40 30 23 30 50 112 146 182 16 53 30 25 37 60 132 167 199 20 63 25 28.5 37 60 132 167 202 20 63 20 33 44 70 25 162 73 210 227 Without Rear Plate Stroke range (mm) Long Stroke Bore size (mm) 20 25 32 40 Bore size (mm

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

Description Material Note q w e r t y u i o !0 !1 !2 !3 !4 !

AS-FPQ/AS-FPG

0 w w u TMH u r r ASD t e AS e !4 AS-FE !4 !3 KE !3 q q AS-FG i i y AS-FP AS-FP !5 AS-FM Meter-in type M5 type AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ Component Parts No.

AS-FPQ/AS-FPG

0 w w u TMH u r r ASD t e AS e !4 AS-FE !4 !3 KE !3 q q AS-FG i i y AS-FP AS-FP !5 AS-FM Meter-in type M5 type AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ Component Parts No.