ASV AK Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.
slpm 10 to 20 slpm 21 to 50 slpm 51 to 100 slpm 101 to 200 slpm 201 to 350 slpm Tolerance of metered flow 25 slpm N/A 1) Tested with Helium gas inlet pressure 125 psig (0.9 MPa) 2) At 80 psig (0.55 MPa) N2 110 Diaphragm Valve for Ultra High Purity Air operated type (Two Step) Series AP3571 & 4571 AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary
Connection thread size (R, NPT, G) Proper tightening torque [Nm] 1/16, 1/8 3 to 5 1/4 8 to 12 3/8 15 to 20 1/2 20 to 25 Body size Maximum allowable torque [Nm] M5 0.05 1/8 0.07 1/4 0.16 3/8 0.2 1/2 0.4 2. Insufficient tightening may cause seal failure, or loosen the threads. 3.
ASV AK VCHC ASR ASQ Note) Use AS-FG series with -X214 for the throttle valve. 707
the same as those on pages 17, 18, 19 and 20.
Flat with rib Male Thread/Weight List 1 0 12 21 29l 46 20 25 72 3 1 . 7 1 3 1 5 21 29.! 46 20 25 72 1 . 8 1 6 1 8 12.121.5130r 46.4 20 67t 25 72: 26 29 3 l 29 29 30 ZPR16 31 57 61 68 Applicable Tube 64 64 65 68 69 67 70 '5h2" tube may be substituted for4mm.
Flat with rib Male Thread/Weight List 1 0 12 21 29l 46 20 25 72 3 1 . 7 1 3 1 5 21 29.! 46 20 25 72 1 . 8 1 6 1 8 12.121.5130r 46.4 20 67t 25 72: 26 29 3 l 29 29 30 ZPR16 31 57 61 68 Applicable Tube 64 64 65 68 69 67 70 '5h2" tube may be substituted for4mm.
Note 3) This is the default setting of the HRS150.
The operating settings can be changed by the user. The default setting for alarm code “AL09” is continued operation for the HRS012 to 060.
the grill of the front panel allowing mounting and removal of the HRS filter to be done easily and without tools.Compact type thermal-chiller , Single phase, 100/115VAC, Cooling method: air-cooled or water-cooled , Self diagnosis and check display for easy maintenance , Functions: timer operation, low tank level detecting, power failure auto-restart, anti-freezing, Compressor Set for HRS150
Cooling Capacity: 150, Thread Type: N [NPT (w/Rc-NPT Conversion Fitting)], Power Supply: 46 [3-phase 380 to 415 VAC (50/60 Hz); 3-phase 460 to 480 VAC (60 Hz)], Option 1: AK (A + K)
Cooling Capacity: 150 (15 kW), Cooling Method: A (Air-cooled), Pipe Thread: Rc, Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: AK (w/Caster Adjuster-foot and Fluid Fill Port)
Cooling Capacity: 150 (15 kW), Cooling Method: W (Water-cooled), Pipe Thread: N (NPT, w/Rc-NPT Conversion Fitting), Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: AK (w/Caster Adjuster-foot and Fluid Fill Port)
Cooling Capacity: 150 (15 kW), Cooling Method: A (Air-cooled), Pipe Thread: N (NPT, w/Rc-NPT Conversion Fitting), Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: AK (w/Caster Adjuster-foot and Fluid Fill Port)
Cooling Capacity: 150, Thread Type: N [NPT (w/Rc-NPT Conversion Fitting)], Power Supply: 46 [3-phase 380 to 415 VAC (50/60 Hz); 3-phase 460 to 480 VAC (60 Hz)], Option 1: A + K, UL Certification: -, Option 2: -
Cooling Capacity: 15 kW, Cooling Method: Air-cooled, Pipe Thread: Rc, Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: w/Caster Adjuster-foot and Fluid Fill Port
Cooling Capacity: 15 kW, Cooling Method: Water-cooled, Pipe Thread: NPT, w/Rc-NPT Conversion Fitting, Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: w/Caster Adjuster-foot and Fluid Fill Port
Cooling Capacity: 15 kW, Cooling Method: Air-cooled, Pipe Thread: NPT, w/Rc-NPT Conversion Fitting, Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: w/Caster Adjuster-foot and Fluid Fill Port
Cooling Capacity: 15 kW, Cooling Method: Water-cooled, Pipe Thread: NPT, w/Rc-NPT Conversion Fitting, Power Supply: 46 [3-phase 380 to 415 VAC (50/60 Hz); 3-phase 460-480 VAC (60 Hz)], Option: w/Caster Adjuster-foot and Fluid Fill Port
Cooling Capacity: 150, Thread Type: Rc, Power Supply: 46 [3-phase 380 to 415 VAC (50/60 Hz); 3-phase 460 to 480 VAC (60 Hz)], Option 1: AK (A + K)
. 9-11 9.4.1 HRR012-A/W-10/20. 9-11 HRR Series HRX-OM-W002 Contents 9.4.2 HRR018-A/W-10/20. 9-11 9.4.3 HRR024-A/W-20. 9-12 9.4.4 HRR030-A/W-20. 9-12 9.5 Heating capacity . 9-13 9.5.1 HRR012-A/W-10-,HRR018-A/W-10-. 9-13 9.5.2 HRR012-A/W-20,HRR018-A/W-20 . 9-13 9.5.3 HRR024-A/W-20,HRR030-A/W-20 . 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR012/018/024/030-A/W. 9-14 9.6.2 HRR012/018-A/W-10-T/MT .