Process Gas Diaphragm Valve

Construction Diaphragm Seat Body 1110 B Diaphragm Valve for Ultra High Purity Air operated type Series AZ3542 & 4542 Dimensions inch (mm) AZ3542 & 4542 Ports: 2PW (Welded) Ports: 2P (Machined) M5 x 0.8 Actuation port Actuation port M5 x 0.8 1.57 (40) 1.57 (40) FORGED BODY BAR STOCK BODY Note) 2.24 (57) 2.24 (57) 0.44 (11.2) 0.44 (11.2) A A B A A Connections: MV, FV Connections: MV B A A A

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

As a guide, tighten it by hand, then turn it two or three turns with a wrench. Check the dimensions of each product for the hexagon width across flats.

Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Model Metric size Inch size ASP 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS1001F 6, 10, 16, 20 ASN AS2001F 20, 25, 32 AS2051F 20, 25, 32, 40 AQ AS3001F 40, 50, 63 ASV AS4001F 63, 80, 100 AK Flow Rate and Effective Area ASS AS1001F AS2001F AS3001F AS2051F AS4001F Model JIS Symbol Metric size 6 6 8 10 6 8 3.2, 4, 6 4 10, 12 12 ASR Tubing O.D.

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

2) A(2) AQ Weight (g) (g) Model Min.

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

tubing O.D. d A (2) L5 (3) A (2) Model T D1 D2 D3 L1 L2 L3 L4 M1 L5 (3) Weight Weight (g) (g) T D1 H (1) H (1) D2 D3 L1 L2 L3 L4 M1 Min.

Cooling Capacity: 150 (15 kW), Cooling Method: A (Air-cooled), Pipe Thread: Rc, Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: K (w/Fluid Fill Port, Manual)

Cooling Capacity: 150 (15 kW), Cooling Method: W (Water-cooled), Pipe Thread: N (NPT, w/Rc-NPT Conversion Fitting), Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: A (w/Caster Adjuster-foot)

Cooling Capacity: 150 (15 kW), Cooling Method: A (Air-cooled), Pipe Thread: N (NPT, w/Rc-NPT Conversion Fitting), Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: A (w/Caster Adjuster-foot)

Cooling Capacity: 150 (15 kW), Cooling Method: A (Air-cooled), Pipe Thread: F (G, w/Rc-G Conversion Fitting), Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: A (w/Caster Adjuster-foot)

Cooling Capacity: 15 kW, Cooling Method: Air-cooled, Pipe Thread: Rc, Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: w/Fluid Fill Port, Manual

Cooling Capacity: 15 kW, Cooling Method: Water-cooled, Pipe Thread: NPT, w/Rc-NPT Conversion Fitting, Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: w/Caster Adjuster-foot

Cooling Capacity: 15 kW, Cooling Method: Air-cooled, Pipe Thread: NPT, w/Rc-NPT Conversion Fitting, Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: w/Caster Adjuster-foot

Cooling Capacity: 15 kW, Cooling Method: Air-cooled, Pipe Thread: G, w/Rc-G Conversion Fitting, Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: w/Caster Adjuster-foot

A large digital display provides a clear view of the current and set values. 

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

AS-FM AS-D AS-T ASP ASN AQ Dimensions ASV Universal type AK Applicable tubing O.D. d VCHC Applicable tubing O.D. d Weight (g) T H1 H2 D1 D2 D3 L1 L2 L3 L4 L5 (1) A (2) M1 Max. Min. Max. Min.

AS-FPQ/AS-FPG

5 AS-FM Meter-in type M5 type AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ Component Parts No.

AS-FPQ/AS-FPG

5 AS-FM Meter-in type M5 type AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ Component Parts No.

MGC

Data View A-A Mounting dimensions Bore size (mm) Stroke range (mm) N M L K J I B AP AO AN AM AL AK AJ AI AH AG AB AA A 20 25 32 40 50 75, 100, 125, 150, 200 25 38 80 60 44 25 106 22 M6 110 55 9 6.6 90 75 120 105 13 11 84 32 46 95 70 52 30 120 27 M8 125 65 9 9 100 84 136 120 13 15 89 75, 100 125, 150 200, 250 300 32 50 105 80 60 35 135 32 M8 140 75 9 9 108 92 150 134 13 15 94 38 60 125 95

MLGC

1 Fine Lock Cylinder with Guide Series MLGC 20, 25, 32, 40 A linear transfer cylinder unit with a built-in locking mechanism and a guide rod integrated in a compact design.