Guide Cylinder Series MGG

(mm) Bore size (mm) Stroke range (mm) O N M L K J I B AP AO AN AM AH AG AB AA AL AK AJ AI A 20 25 32 40 50 75, 100, 125, 150, 200 M6 x 1 depth 9 45 25 80 60 55 30 108 25 M6 115 65 125 112 11 12 9 6.6 95 82 99 M6 x 1 depth 13 54 35 100 70 65 35 130 30 M8 135 75 150 134 13 16 9 9 108 92 109 75, 100 125, 150 200, 250 300 M6 x 1 depth 13 60 35 106 80 73 40 135 35 M8 140 85 150 134 16 16 9 9

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Actuation is 90 degrees open to closed with a cutout window, on both sides of raised rectangular section, providing visual status of open or closed state. 260g 55 mm Direction of a raised rectangular section indicate open/close status Open Close Series AK CAT.NAS100-106A Series AK Diaphragm Valve Air Operated Type Manually Operated Type Series AK3542/AK4542 Series AK3652/AK4652 Body material

1

Local Area: (800) 258-9200-www.stevenengineering.com AL Width across flats 12 Element Width across flats XA Unlocking cam AP V I 4-AK hole Q PL PG J AI AJ R AB X A AG AA Y + Stroke Z + Stroke For 4-AO AN AI AM Cutout window Mounting dimensions Standard Stroke Bore size (mm) Stroke range (mm) A AA B I J K L M N GC GK GL GQ GR AB AG AH AI AJ AK AL AM AN AO AP 20 75, 100, 125, 150, 200 129 12

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Retainer prevents an accidental loss of needle.

Safety Speed Control Valve (SSC Valve) Series ASS

This product cannot be used to hold a stop position for an extended period of time. Pilot check valves and actuators are not guaranteed for zero air leakage. Therefore, it is sometimes not possible to hold a stop position for an extended period of time. In the event that holding for an extended time is necessary, a mechanical means for holding should be devised. 3.

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

34.5 17 50 (51) AS32l1FSl-U03-06 6 1/4 19 16.6 AK 10.4 21.8 32.1 28.7 13.3 24.5 28.5 9.3 19.2 36 (37) AS32l1FSl-U03-08 8 13.2 22.7 33 28 14.2 AS32l1FSl-U03-10 10 15.9 26.7 37 15.6 39 (40) AS32l1FSl-U03-12 12 18.5 29.7 40 26.8 17 41 (42) AS42l1FSl-U04-10 10 1/2 24 (23.8) VCHC 3/8 19 16.6 55.4 54 50.2 48.8 ASR ASQ 15.9 18.8 27.4 40.3 (40.2) 36.2 64.1 62.5 57 55.4 15.6 26 29 10 19 60 (59) AS42l1FSl-U04

AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel 304 M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel plated

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Inch size Metric size Flat head screwdriver 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 6, 10, 16, 20 M5 x 0.8 AS221F-01 AS231F-01 20, 25, 32 R 1/8 AS221F-02 AS231F-02 20, 25, 32, 40 R 1/4 AS321F-02 AS331F-02 40, 50, 63 R 1/4 AS321F-03 AS331F-03 40, 50, 63 R 3/8 AS421F-04 AS431F-04 63, 80,

Cooling Capacity: 100 (10 kW), Cooling Method: A (Air-cooled), Pipe Thread: Rc, Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: AK (w/Caster Adjuster-foot and Fluid Fill Port)

Cooling Capacity: 100 (10 kW), Cooling Method: W (Water-cooled), Pipe Thread: Rc, Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: AK (w/Caster Adjuster-foot and Fluid Fill Port)

Cooling Capacity: 10 kW, Cooling Method: Air-cooled, Pipe Thread: Rc, Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: w/Caster Adjuster-foot and Fluid Fill Port

Process Gas Diaphragm Valve

It is illustrated with an arrow pointing towards the valve body or an "empty" triangle on the schematic. Outlet (Downstream) is defined as a port connected to the region above the seat and below the diaphragm. It is illustrated with an arrow pointing away from the valve body or a "filled" triangle on the schematic.

Vacuum System Peripherals:

40 e Valve Model Fill in the blanks below with symbols of necessary specifications.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Model Metric size Inch size ASP 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS1001F 6, 10, 16, 20 ASN AS2001F 20, 25, 32 AS2051F 20, 25, 32, 40 AQ AS3001F 40, 50, 63 ASV AS4001F 63, 80, 100 AK Flow Rate and Effective Area ASS AS1001F AS2001F AS3001F AS2051F AS4001F Model JIS Symbol Metric size 6 6 8 10 6 8 3.2, 4, 6 4 10, 12 12 ASR Tubing O.D.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

ASV AK Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

This product cannot be used to hold a stop position for an extended period of time. Pilot check valves and actuators are not guaranteed for zero air leakage. Therefore, it is sometimes not possible to hold a stop position for an extended period of time. In the event that holding for an extended time is necessary, a mechanical means for holding should be devised. 3.

MGC

Data View A-A Mounting dimensions Bore size (mm) Stroke range (mm) N M L K J I B AP AO AN AM AL AK AJ AI AH AG AB AA A 20 25 32 40 50 75, 100, 125, 150, 200 25 38 80 60 44 25 106 22 M6 110 55 9 6.6 90 75 120 105 13 11 84 32 46 95 70 52 30 120 27 M8 125 65 9 9 100 84 136 120 13 15 89 75, 100 125, 150 200, 250 300 32 50 105 80 60 35 135 32 M8 140 75 9 9 108 92 150 134 13 15 94 38 60 125 95

Check Valve Series AK 1

AK ASS ASR Straight type Easily installed in pipe lines.

MLGC

D-G5NBL 5 35 5 40 5.5 40 Since this is a guideline including hysteresis, not meant to be guaranteed.

MLGC

D-G5NBL 5 35 5 40 5.5 40 Since this is a guideline including hysteresis, not meant to be guaranteed.