Cooling Capacity: Cooling Capacity: 1500/1700W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: B + M

MGG

Dimensions 20 to 50 Front mounting flange BM R MH Y + Stroke ZZ + Stroke Front mounting flange 63 BM R MH Y + Stroke ZZ + Stroke (mm) Adjustment 0 to 25mm Adjustment 0 to 50mm Bore size (mm) Y BM R MH ZZ MH ZZ 20 25 32 40 50 63 48 164 73 189 12 86 M6 x 1 48 171 73 196 12 86 M6 x 1 50 175 75 200 12 88 M8 x 1.25 65 208 90 233 13 99 M12 x 1.75 58 227 83 252 14 M12 x 1.75 114 65 236 90 261 14

Vacuum Pad with Ejector

Response Time *2) [ms] ZHP[]BM[]-07[] ZHP[]BM[]-10[] ZHP[]BM[]-12[] ZHP[]BM[]-15[] 63 295 143 120 86 80 455 221 190 140 2) Response time means a period of time that the vacuum pressure reaches 57 kPa after the externally installed valve has been turned ON when the bellows type pad is used and the supply pressure is 0.35 MPa.

Ionizer

Balance adjustment trimmer 4 x M4 x 0.7 depth 5 14 19 20 (For mounting, opposite side: Same) 13 17 7 Connection cable IZS31-CF-X210 14.9 16 20 20 52 (Cable length: Refer to the above table.) 65 8P modular jack (Plug for sensor cable) Maintenance detection level selection switch 15 100 4 x M4 x 0.7 depth 5 20 900 Connection cable length L (For mounting, opposite side: Same) 7 16 26 58 80x2

Flat Type Pad/Bellows Type Pad with Groove

Form/Diameter Model Flat type with groove (UM) Bellows type with groove (BM) 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EA-P1 V V V V ZP3EA-P2 V V ZP3EA-P3 V V V ZP3EA-P4 V V ZP3EA-P5 V V ZP3EA-P6 V Pad diameter 32 to 50 Pad form Flat type with groove Dimensions: Pad Unit ZP3E-32UMlZP3E-40UMlZP3E-50UMl36 31 27 27 23 20 27 23 20 10.3 (Plate) 10.3 (Plate) 10.3 (Plate) 13.5 13 13

smcmaintenancepartslist

Bore size 16 20 25 32 40 50 63 16 20 25 32 40 50 53 Recommended length Part No.

MGP

m (kg) Load weight m (kg) 20 20 20 20 20 20 16 16 16 16 16 16 1 1 12 12 12 12 12 12 0.5 10 20 30 31 50 100 101 300 200 0.5 10 20 30 31 50 100 101 300 200 Stroke (mm) Stroke (mm) MGPL32 to 63 MGPL32 to 63 50 50 Load weight m (kg) Load weight m (kg) 63 63 50, 63 50 50 50, 63 50, 63 10 10 40 40 40 50, 63 40 40 40 32 32 32 32 32 32 5 10 20 30 50 40 51 100 101 300 200 5 10 20 30 50 40 51 100

5-Port Solenoid Valve

SY5000222-1A [for 10 valves (20 pcs.)] SY7000221-1A [for 10 valves (30 pcs.)] SY3000222-1A [for 10 valves (20 pcs.)] SY5000221-1A [for 10 valves (20 pcs.)] SY300023-24A [for 10 valves (20 pcs.)]

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.05 to 3 L/min 0.15 to 3.15 L/min 5 V 20 mA 30% 70% PF2M705 92% 8% 0.1 to 10 L/min 0.5 to 10.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.1 to 6 L/min 0.3 to 6.3 L/min 5 V 20 mA 30% 70% PF2M710 92% 8% 0.3 to 25 L/min 1.3 to 26.3 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.3 to 15 L/min 0.8 to 15.8 L/min 5 V 20 mA

Thermo-chiller HRS offers convenient functions, self diagnosis and check display for easy maintenance.  An angled supply port facilitates the supply of circulating fluid, even when units are stacked.  A large digital display provides a clear view of the current and set values.  The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS filter

Thermo-chiller HRS offers convenient functions, self diagnosis and check display for easy maintenance.  An angled supply port facilitates the supply of circulating fluid, even when units are stacked.  A large digital display provides a clear view of the current and set values.  The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS filter

Thermo-chiller HRS offers convenient functions, self diagnosis and check display for easy maintenance.  An angled supply port facilitates the supply of circulating fluid, even when units are stacked.  A large digital display provides a clear view of the current and set values.  The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS filter

Vacuum Pad with Ejector ZHP Series ø 63, ø 80

Vacuum Pad with Ejector ZHP Series 63, 80 RoHS ZK2 How to Order ZQ ZHP 80 BM N B 00 Without ejector ZR ZB ZHP 80 BM N B 10 C6 S With ejector ZA Exhaust release Pad diameter ZX 63 63 80 80 S Silencer exhaust ZM Supply (P) port Pad form Symbol Type Port size C4 Metric 4 One-touch tting C6 6 One-touch tting N3 Inch 5/32" One-touch tting N7 1/4" One-touch tting BM Bellows type with groove UM

Thermo-chiller Series HRS Compact Type (Except HRS050)

Thermo-chiller Series HRS Compact Type (Except HRS050) RoHS How to Order HRS 018 A 10 Single-phase 100/115 VAC Option Symbol Nil B J M Cooling capacity 012 018 Cooling capacity 1100/1300 W (50/60 Hz) Cooling capacity 1500/1700 W (50/60 Hz) Option CE/UL None With earth leakage breaker With automatic water supply function Applicable to DI water (deionized water) piping Note) UL standards: Applicable

is integrated with the grill of the front panel allowing mounting and removal of the HRS filter to be done easily and without tools.Compact type thermal-chiller , Single phase, 100/115VAC, Cooling method: air-cooled or water-cooled , Self diagnosis and check display for easy maintenance , Functions: timer operation, low tank level detecting, power failure auto-restart, anti-freezing, HRS050

grill of the front panel allowing mounting and removal of the HRS filter to be done easily and without tools.Compact type thermal-chiller , Single phase, 100/115VAC, Cooling method: air-cooled or water-cooled , Self diagnosis and check display for easy maintenance , Functions: timer operation, low tank level detecting, power failure auto-restart, anti-freezing, Outlet Manifold Assy for HRS050

with the grill of the front panel allowing mounting and removal of the HRS filter to be done easily and without tools.Compact type thermal-chiller , Single phase, 100/115VAC, Cooling method: air-cooled or water-cooled , Self diagnosis and check display for easy maintenance , Functions: timer operation, low tank level detecting, power failure auto-restart, anti-freezing, Relay (Comprsr) HRS050

of the front panel allowing mounting and removal of the HRS filter to be done easily and without tools.Compact type thermal-chiller , Single phase, 100/115VAC, Cooling method: air-cooled or water-cooled , Self diagnosis and check display for easy maintenance , Functions: timer operation, low tank level detecting, power failure auto-restart, anti-freezing, Heat exchanger(For option M), HRS050

grill of the front panel allowing mounting and removal of the HRS filter to be done easily and without tools.Compact type thermal-chiller , Single phase, 100/115VAC, Cooling method: air-cooled or water-cooled , Self diagnosis and check display for easy maintenance , Functions: timer operation, low tank level detecting, power failure auto-restart, anti-freezing, CONNECTING BRACKET FOR HRS050

integrated with the grill of the front panel allowing mounting and removal of the HRS filter to be done easily and without tools.Compact type thermal-chiller , Single phase, 100/115VAC, Cooling method: air-cooled or water-cooled , Self diagnosis and check display for easy maintenance , Functions: timer operation, low tank level detecting, power failure auto-restart, anti-freezing, Base for HRS050