COQ2BP

L, ' N X NZ NX NZ L, P i A A 0ND. o oNDI1'o A, U, NX bJ AppI bore size A ., E, 11 MM 'R, U. -. . No. CQ2 Single Rod Clevis (mm) C02 Double Rod Clevis (mm) ;1 AppI bon ... A A, E, b MM -110 U, HDHa HX 50,63 56 ,. 028 0) Ml8x1.5 I. 20 ' 4 i 010 22 ~3 ~., Pan No. NX HZ L Y.Q05 50,63 56 20 028 40 , M 1 8xlS " 20 14 ~070 22.03 ~.S 44 SO.8 IV -60s eo 71 2. 038 !

Vacuum Unit Ejector / Vacuum Pump System

Example) BJ Note 18) Use One-touch fitting (M-3AU-4) or barb fitting for piping. (O.D.: within 5.8) Note 19) Use One-touch fitting (M-3AU-4) or barb fitting for piping. (O.D.: within 6.2) Note 20) Select when a PV pressure of 0.3 MPa or lower is required. Note 21) Select body for manifold. Select L for (5) Options for manifold model.

Vacuum Unit Ejector / Vacuum Pump System

Example) BJ Note 18) Use One-touch fitting (M-3AU-4) or barb fitting for piping. (O.D.: within 5.8) Note 19) Use One-touch fitting (M-3AU-4) or barb fitting for piping. (O.D.: within 6.2) Note 20) Select when a PV pressure of 0.3 MPa or lower is required. Note 21) Select body for manifold. Select L for (5) Options for manifold model.

I

Model Exhaust Piping/Port location Port size Applicable P R 1 A,B P It A,B Valve NWsF5-20Common Side /Base Side/Base fop/ Valve %NPrF I %flPlf LNPIF %NPIF NVFSO20 DXT 156-20-1TA EXH relocation spacer NVV5F5-20 156-19-14 NW5F5-20 " Spacer is used when it is nscessary to exhaust from certain valves individually.

3M/SMseries

Model Exhaust Piping/Port location Port size Applicable P R 1 A,B P It A,B Valve NWsF5-20Common Side /Base Side/Base fop/ Valve %NPrF I %flPlf LNPIF %NPIF NVFSO20 DXT 156-20-1TA EXH relocation spacer NVV5F5-20 156-19-14 NW5F5-20 " Spacer is used when it is nscessary to exhaust from certain valves individually.

With Factory Installed

AI Inlel pressure 0.7MPa /71 kgf/cm21 , outlel pressure 0.2MPa 1 2.0kgflcm21. flow rale 20 / min (ANR) AR2001-02 AR2001-02 0.25 -r-=:: lf~1 ~ "'" ~ :'.. ::;; 0.2 ~r. " 5 OJ> ~ o . 3k-1-j.-:=.

Vacuum Unit Series ZK2

Example) -BJ Note 20) For an ejector, PE is common with EXH, so it is not necessary to specify the option. Thread size is M3. Note 21) Only M3 is available for PD port size. Use one-touch fitting (KJS series) or barb fitting (M series) for piping. Note 22) Select body for manifold. Select L for manifold type. When the common supply and individual supply are mixed, please contact SMC.

Cooling Method: A (Air-cooled Refrigeration), Pipe Thread: Rc, Power Supply: 20 [3-phase 200 VAC (50 Hz); 3-phase 200 to 230 VAC (50/60 Hz], Option: BJ (B + J)

Cooling Method: A (Air-cooled Refrigeration), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting)], Power Supply: 20 [3-phase 200 VAC (50 Hz); 3-phase 200 to 230 VAC (50/60 Hz], Option: BJ (B + J)

Cooling Method: W (Water-cooled Refrigeration), Pipe Thread: Rc, Power Supply: 20 [3-phase 200 VAC (50 Hz); 3-phase 200 to 230 VAC (50/60 Hz], Option: BJ (B + J)

Body Size: 20, Backflow: K (w/Backflow Function), Thread: N (NPT), IN Port Size: 02 (1/4), OUT Port Size: 02 (1/4), Options: BJ (w/Bracket, Right Angle Square Type Pressure Gauge w/Limit Indicator), Set Pressure: 1 (0.02 to 0.2 MPa Setting, Exhaust Mechanism: Relieving Type, Knob: Y (Upward), Pressure Unit: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Body Size: 20, Backflow: w/o Backflow Function, Thread: F (G), Port Size: 02 (1/4), Options: BJ (B+J), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: R (Right to Left), Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Body Size: 20, Backflow: K (w/Backflow Function), Thread: Rc, Port Size: 02 (1/4), Options: BJ (B+J), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Body Size: 20, Backflow: K (w/Backflow Function), Thread: F (G), Port Size: 01 (1/8), Options: BJ (B+J), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Cooling Method: A (Air-cooled Refrigeration), Pipe Thread: Rc, Power Supply: 20 (3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz), Option: BJ (w/ Earth Leakage Breaker + w/ Automatic Fluid Fill Function)

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

voltage Electrical entry Oil-free option JSXD81 B N 40 1 G None F 2 GS D E 3 DN 4 CS 5 WN 6 7 8 B J JSXD81 Series/ Valve type Body material Seal material Port size Thread type Rated voltage Electrical entry Oil-free option JSXD91 B N 20 R 1 G None F N 2 GS D E F 3 DN 4 WN 5 6 7 8 B J JSXD91 Glossary of Terms Series/ Valve type Body material Seal material Port size Rated voltage Electrical

Thermo-chiller Series HRS Compact Type (Except HRS050)

Thermo-chiller Series HRS Compact Type (Except HRS050) RoHS How to Order HRS 018 A 10 Single-phase 100/115 VAC Option Symbol Nil B J M Cooling capacity 012 018 Cooling capacity 1100/1300 W (50/60 Hz) Cooling capacity 1500/1700 W (50/60 Hz) Option CE/UL None With earth leakage breaker With automatic water supply function Applicable to DI water (deionized water) piping Note) UL standards: Applicable

is integrated with the grill of the front panel allowing mounting and removal of the HRS filter to be done easily and without tools.Compact type thermal-chiller , Single phase, 100/115VAC, Cooling method: air-cooled or water-cooled , Self diagnosis and check display for easy maintenance , Functions: timer operation, low tank level detecting, power failure auto-restart, anti-freezing, HRS050

grill of the front panel allowing mounting and removal of the HRS filter to be done easily and without tools.Compact type thermal-chiller , Single phase, 100/115VAC, Cooling method: air-cooled or water-cooled , Self diagnosis and check display for easy maintenance , Functions: timer operation, low tank level detecting, power failure auto-restart, anti-freezing, Outlet Manifold Assy for HRS050

with the grill of the front panel allowing mounting and removal of the HRS filter to be done easily and without tools.Compact type thermal-chiller , Single phase, 100/115VAC, Cooling method: air-cooled or water-cooled , Self diagnosis and check display for easy maintenance , Functions: timer operation, low tank level detecting, power failure auto-restart, anti-freezing, Relay (Comprsr) HRS050