Proposals for Energy Saving

with M5 thread Flow direction: Right to left With element service indicator Size 1/8 1/4 3/8 1/2 3/4 1 1 1/2 2 01 02 03 04 06 10 14 20 2B, 150 4B, 250 8B, 350 11B, 450 22B, 550 37B, 650 75B, 850 Rc NPT G 1/8 1/4 3/8 1/2 3/4 1 1 1/2 Nil J M R T Nil B C D Option Accessory Size Bore size RT T R JR JRT MR J MRT JT MT M 03 06 04 01 02 20 14 Size 10 2B, 150 4B, 250 8B, 350 11B, 450 22B, 550 37B

Vacuum System Peripherals:

Series ZM 13-14-20 4.

Large Flow Air Filter AF800/900 Series

Symbol Air filter Air filter with auto drain AW -A -B How to Order 2 1 2 1 AW 12 AF 00 8 AG L L Option Air filter E Nil None Flow Rate Characteristics (Representative Values) Body size D 5 Drain cock with barb fitting Drain guide 1 2 1 2 8 9 AV AF800 J 6 R Flow direction: Right to left AF AF Pressure drop (MPa) Pressure drop (MPa) Auto-drain specifications Option 00 10 11 None Float type

Large Flow Air Filter AF800/900 Series

Symbol Air filter Air filter with auto drain How to Order AW -A -B 2 1 2 1 AW 12 AF 00 8 AG L L Option Air filter Flow Rate Characteristics (Representative Values) Nil E None Body size D 5 Drain cock with barb fitting Drain guide 8 9 1 2 1 2 AV AF800 J 6 R Flow direction: Right to left AF AF Pressure drop (MPa) Pressure drop (MPa) Auto-drain specifications Option 00 10 11 None Float type

AIR COMBINATION

J 26 77.9 59.3 AC10-A 26 AC20-A 58.5 59.5 37.5 37.5 104.9 87.4 93.9 91.4 AC25-A 58.5 59.5 37.5 37.5 156.8 117.6 122.1 137.6 142.1 123.6 121.9 AC30-A 65 66 37.5 37.5 156.8 117.6 122.1 137.6 142.1 123.6 121.9 AC40-A 72 72 42.5 42.5 186.9 149.6 154.1 169.6 174.1 155.6 153.9 AC40-06-A 72 72 42.5 42.5 188.9 151.6 156.1 171.6 176.1 157.6 155.9 20 Standard specifications C E F G J Bracket

Cooling Capacity: 050 (Cooling Capacity: 4700/5100W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: F (G w/PT-G Conversion Fitting Set), Option: B (Earth Leakage Breaker)

Cooling Capacity: 050 (Cooling Capacity: 4700/5100W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: F (G w/PT-G Conversion Fitting Set), Option: M [Applicable to DI Water (Deionized Water) Piping]

Cooling Capacity: 050 (Cooling Capacity: 4700/5100W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: F (G w/PT-G Conversion Fitting Set), Option: BJ (B + J)

Type: Thermo-Chiller, Cooling Method: Air-Cooling, Cooling Capacity: 4,700/5,100 W (50/60 Hz), Piping thread type: G (PT-G conversion fitting set included), Optional specifications: With earth leakage circuit breaker

Type: -, Cooling Method: -, Cooling Capacity: 4,700/5,100 W (50/60 Hz), Piping thread type: G (PT-G conversion fitting set included), Optional specifications: Compatible with deionized water (pure water) piping

Cooling Capacity: Cooling Capacity: 4700/5100W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: G w/PT-G Conversion Fitting Set, Option: B + J

E-ITV-STD-RF-A

O ver range of i nput si gnal Pl ease execut e "i ni t i al i ze ( ref er t o P16) " w hen I TV do not operat e norm al l y af t er rest art i ng t he pow er suppl y. Readi ng or w ri t i ng errors occurred i n EEPRO M . Pl ease cont act us, w hen I TV do not operat e norm al l y af t er i ni t i al i ze.

13

22 6 17 24 13.7 6 26 24.5 8 20 28 13.7 6 26 24.5 8 20 28 15.3 10 28 27 10 22 30 15.3 10 28 27 10 22 30 Applicable tubing diameter J 7.8 7.8 7.8 9.6 9.6 10.7 10.7 ZH ZU ZL 15.8 12 31.5 32.8 12 27 35 12 ZY 15.8 12 31.5 32.8 12 27 35 12 One-touch and screw-in connection Model A 58.5 41.5 29.5 6 12.8 3.2 12 58.5 41.5 29.5 6 12.8 3.2 12 61 41.5 29.5 6 12.8 3.2 12 61 41.5 29.5 6 12.8 3.2 12 66

AIR FILTER

AF-OMQ0004-C PRODUCT NAME AIR FILTER MODEL / Series / Product Number AF10-M5(C)(-2,6,R,Z)-A AF20-(F,N)01(F,N)02(B,C)(-2,6,C,J,R,Z)-A AF30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,R,W,Z)-A AF40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,R,W,Z)-A AF40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-A AF50-(F,N)06(F,N)10(B)(-2,6,8,J,R,W,Z)-A AF60-(F,N)10(B)(-2,6,8,J,R,W,Z)-A Contents Page 1. SAFETY INSTRUCTIONS 1-5 2.

MIST SEPARATOR

AF-OMR0020-C PRODUCT NAME MIST SEPARATOR MODEL / Series / Product Number AFM20-(F,N)01(F,N)02(B,C)(-2,6,C,J,R,Z)-A AFM30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,R,W,Z)-A AFM40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,R,W,Z)-A AFM40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-A Contents Page 1. SAFETY INSTRUCTIONS 1-5 2. APPLICATION 6 3. SPECIFICATIONS 6 4. HOW TO ORDER 7 5. OPTIONAL BRACKET ASSEMBLY 8 6.

Air Filter

AF-OMX0052-C PRODUCT NAME Air Filter MODEL / Series / Product Number AF20-(F,N)01(F,N)02(B,C)(-2,6,C,J,L,R,Z)-D AF30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,L,R,W,Z)-D AF40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,L,R,W,Z)-D AF40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-D AF50-(F,N)06(F,N)10(B,C,D)(-2,6,8,J,L,R,W,Z)-D AF60-(F,N)10(B,C,D)(-2,6,8,J,L,R,W,Z)-D Contents Page 1. Safety Instructions 2-7 2.

Mist Separator

AF-OMX0053-B PRODUCT NAME Mist Separator MODEL / Series / Product Number AFM20-(F,N)01(F,N)02(B,C)(-2,6,C,J,L,R,Z)-D AFM30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,L,R,W,Z)-D AFM40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,L,R,W,Z)-D AFM40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-D Contents Page 1. Safety Instructions 2-7 2. Application 8 3. Standard Specifications 8 4. How to Order 9 5.

Cooling Capacity: 050 (Cooling Capacity: 4700/5100W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: N (NPT w/PT-NPT Conversion Fitting Set), Option: J (Automatic Water Supply Function)

Cooling Capacity: 050 (Cooling Capacity: 4700/5100W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: Rc, Option: J (Automatic Water Supply Function)

Cooling Capacity: 050 (Cooling Capacity: 4700/5100W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: N (NPT w/PT-NPT Conversion Fitting Set), Option: J (Automatic Water Supply Function)