HRX-OM-W002

0.4(at 14L/min) 0.13at 7L/min/0.18(at 7L/min) For option MT : 0.32(at 10L/min)/0.32(at 14L/min) For option -T/MT0.36at 7L/min/0.42(at 10L/min) For option T1 : 0.28(at 10L/min)/0.28(at 10L/min) 7 / 7 Rated flow rate (50/60Hz) 7 L/min 7 / 7 For option T ,-MT : 10/14 For option T ,-MT : 7/10 For option-T1 : 10 /10 Flowdisplay range L/min 2 to 16 Circulating fluid system Electric conductivity

Soft Start-up Valve AV2000/3000/4000/5000 1

M6 x 1 Depth 7.5 39 50 0 77 74 59 155 143 128 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 14-3-9 10 Series AV2000/3000/4000/5000 Connecting Spacer for Modular Style F.R.L.

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.O (r) aol O Gl ,9 .rO ";p:* Stroke Variations Long strokes up to 400mm standardized. a.l)compact guide cytinder QlBore size @pon typ. l t t t l t t t l l 7 5 _ _ t t t t t t t t t l l t t t l t t t l l t t r t t t t t t l r t t t t t t t t l 1't5 l t t t t r r r r l r t t t r r t t l l z a n * For bore s zes 12 & 16 onyM5x0SisavailaHe Befer to lable al eft for delats Ocylinder stroke (mm

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-diameier r-t, L, | , u, E 3/16" 1t4" 07 09 1 1 3/8" 1/2" 6mm 8mm 10mm 12mm 06 08 1 0 H , T , U , X , N '10-32 UNF Thread 1/16" NPT 1/8" NPT 1/; NPT H, L, W, T, Y, U, E Double branch \" Male run tee Double branch universal elbow Branch unNersal elbow Branch universal female elbow Triple branch universal elbow M5 x 0.8 M6 x 1.0 PT1/8 PT1/4 PT3/8 Pr1/2 M6 0 t 02 03 o4 a a a a a a a a a a a

E-P HYREG

4 5 0 1 2 3 4 5 0 1 2 3 4 5 V V V VY130-6 VY140-6 VY150-6 1 1 1 0 2.5 5 7.5 10 0 2.5 5 7.5 10 0 2.5 5 7.5 10 V V V VY130-7 VY140-7 VY150-7 mA mA mA 4 0 8 12 16 20 4 0 8 12 16 20 4 0 8 12 16 20 2 2 2 VY130-8 0 5 10 15 20 VY140-8 0 5 10 15 20 VY150-8 0 5 10 15 20 3 3 3 mA mA mA Command signal Command signal Command signal VY1700/1701 VY1900/1901 Command signal voltage (current) for starting

ARJ1020F

6 t Zinc chromated w Electroless nickel plated Accessory Black zinc chromated Accessory IN 14-4-12 10 Miniature Regulator Series ARJ310 Dimensions ARJ310-01 ARJ310F-01 F.R.L. 31 AV 56 56 AU 35 AF 32 22 M12 x 1 Panel cutout dimensions 12.5/Panel thickness: 4 or less AR 19 2 27 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-

Series 10-, 21- AF-A Air Filter

Option Applicable model 10-/21-AF20-A 10-/21-AF30-A 10-/21-AF40-A 10-/21-AF40-06-A 10-/21-AF50-A 10-/21-AF60-A Bracket assembly Note 2) AF52P-050AS AF22P-050AS AF32P-050AS AF42P-050AS AF42P-070AS Note 2) Assembly includes a bracket and 2 mounting screws. 1069-1 A Air Filter 1021-AF-A Dimensions AF20-A AF30-A to 40-06-A 10211021T N S J M U D J M U D S N T Air Preparation Equipment Pressure

Cooling Capacity: Cooling Capacity: 1500/1700W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: High-pressure Pump

Cooling Capacity: Cooling Capacity: 1500/1700W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: High-pressure Pump

Cooling Capacity: Cooling Capacity: 1500/1700W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: Rc, Option: High-pressure Pump

Cooling Capacity: Cooling Capacity: 1500/1700W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: Rc, Option: High-pressure Pump

Cooling Capacity: 018 (Cooling Capacity: 1500/1700W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: N (NPT w/PT-NPT Conversion Fitting Set), Option: T (High-pressure Pump)

Cooling Capacity: 018 (Cooling Capacity: 1500/1700W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: N (NPT w/PT-NPT Conversion Fitting Set), Option: T (High-pressure Pump)

Cooling Capacity: 018 (Cooling Capacity: 1500/1700W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: Rc, Option: T (High-pressure Pump)

Cooling Capacity: 018 (Cooling Capacity: 1500/1700W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: Rc, Option: T (High-pressure Pump)

Proposals for Energy Saving

G46-10-01 2 pcs. G46-10-01 2 pcs. G27-10-R1-X209 2 pcs. G27-10-R1-X209 2 pcs.

Table of Contents

, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 For nozzle size 18, 20 e r t For nozzle size 10, 13, 15 [For ZSE4 spec.]

Vacuum System Peripherals:

8, R 10, R 10, R 10, R 6 8 10 4 6 KM11 6, 10 One-touch fitting One-touch fitting 1 4 3 8 KM12 6, 10 One-touch fitting Rc KM13 3 One-touch fitting One-touch fitting KM11 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 4 One-touch fitting R male thread KM12 KM14 3 One-touch fitting KM15 KM15 3 One-touch fitting One-touch fitting rod KM16 KM14 KM16 One-touch fitting 3 One-touch fitting KM13 Miniature fittings

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Free Free E Free Pitch dimensions (without magnet) (mm) Bore Size E 4 6 8 10 10 13 13 13.5 Free Easy seal replacement With front boss (h9) Seals can be replaced easily by removing rod cover. Centering can be done easily. Rod cover Tolerance h9 Clean room series Series 10-, 11-CUJ Two auto switches can be installed even for 4mm strokes.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

VCHR 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVX c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.