Cooling Capacity: Cooling Capacity: 1100/1300W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: G w/PT-G Conversion Fitting Set, Option: High-pressure Pump

Cooling Capacity: Cooling Capacity: 1100/1300W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: G w/PT-G Conversion Fitting Set, Option: M [Applicable to DI Water (Deionized Water) Piping]

Cooling Capacity: Cooling Capacity: 1100/1300W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: G w/PT-G Conversion Fitting Set, Option: Earth Leakage Breaker

Cooling Capacity: Cooling Capacity: 1100/1300W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: G w/PT-G Conversion Fitting Set, Option: BJMW

Cooling Capacity: 012 (Cooling Capacity: 1100/1300W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: F (G w/PT-G Conversion Fitting Set), Option: T (High-pressure Pump)

Cooling Capacity: 012 (Cooling Capacity: 1100/1300W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: F (G w/PT-G Conversion Fitting Set), Option: M [Applicable to DI Water (Deionized Water) Piping]

Cooling Capacity: 012 (Cooling Capacity: 1100/1300W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: F (G w/PT-G Conversion Fitting Set), Option: B (Earth Leakage Breaker)

Cooling Capacity: 012 (Cooling Capacity: 1100/1300W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: F (G w/PT-G Conversion Fitting Set), Option: BJMW

TABLE OF CONTENTS

) Manual Overide version (DC 586-3WMP J-1.6MM only) (Multi-Purpose) 19 10-32 Ports (Metal body only) plastic S-Extended PSI rates for 21 10-32 Ports metal S.S.(430F) bodies/housing only 22 10-32 Ports Brass 23 10-32 Ports S.S(303F) 24 10-32 spud mount S.S.(430F) 25 10-32 spud mount brass 26 10-32 spud mount S.S(303) 27 M5 ports S.S. (430F) 28 M5 ports brass 29 M5 ports S.S.(303) EXAMPLE G

Vacuum Unit

Description Note 5 Valve assembly 6 Connector assembly Connector for solenoid valve 3 wire (For valve type K/R), 2 wire (For valve type J) 7 One-touch fitting assembly Metric size: 6, Inch size: 1/4" 8 Sound absorbing material 10 pcs. per set 9 Vacuum port adapter assembly With One-touch fitting and filter element 10 Filter element Nominal filtration rating: 30 m, 10 pcs. per set 11 Body

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M 9 _ 6, 10, 16,20 Note 3) aOlvlark ng s electroless niDkel pated, provided 6, 10, 16,20 20,25,32 a a a a a a a a a a a a a a a a a a a o a a a a a a a a a a a a o a i a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a Hexaona ock nut {Wdth across flat) Electroless nicke lr ated ^r""".af T I I ^"" l\4e1r c icable tube O.

smcmaintenancepartslist

Note) For wear ring A of 10, please consult with SMC. Seal kit includes a grease pack (10: 5 g and 10 g, 15: 10 g). Order with the following part number when only the grease pack is needed.

%silltr

A tree stop of a rotating mass without cushioning or overloading risks breaking the pinion or vane, The allowable energy published by the manutacturer musl be caretully respected. a J=m.r 6 J = m . V c J = m . r l 2 + 1 2 2 T I v I + I I ri J' r 2 4 d = m . ,#,*, a J = m . I a 'ilE' d !-::-!. mb= n, t r a+b l l ta2+c2 i a ' Ti+l 2 . ^ 2 12 ho'oo#" ' 1 J = n y r = m " . * * ' o .

SMC Basic Pneumatics

A tree stop of a rotating mass without cushioning or overloading risks breaking the pinion or vane, The allowable energy published by the manutacturer musl be caretully respected. a J=m.r 6 J = m . V c J = m . r l 2 + 1 2 2 T I v I + I I ri J' r 2 4 d = m . ,#,*, a J = m . I a 'ilE' d !-::-!. mb= n, t r a+b l l ta2+c2 i a ' Ti+l 2 . ^ 2 12 ho'oo#" ' 1 J = n y r = m " . * * ' o .

Modular Type Filter Regulator Series AW

Applicable model AW40-06 AW40 AW30 AW20 AW10 Accessory Bracket assembly Note 1) AR30P-270AS AR30P-260S G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD38NNote 6) AR40P-270AS AR40P-260S G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48NNote 6) AR40P-270AS AR40P-260S G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48NNote 6) AR10P-270AS AR10P-260S G27-10-R1 G27-10-R1 Note 3) AW20P-270AS AR20P-260S G36-10

LEC-OM02704CN

10 .2 10.1 .2 10.2 .3 10.3 CC-Link .3 10.4 .4 10.4.1 .4 10.4.2 .5 10.4.3 .14 10.5 .16 10 1 10 10 10.1 MR Configurator 1 LED LED CN6CN2CN3 1. 2.

Vacuum

{check leakage). 98 lloninntal Type Uacuum Entny: Witlrout BullcD lrllilh 0ne-Iouch Tube litting Specif ications 2, 4,6, 8, 10, 13, 16, 10,13,16,20 10, 16,25, 4D 6,8, 10, 13, 16,20 NBR (black), Silicone (white), Urethane (brown), Ftuorine (black with mark), Conductive NBR (black with mark), Conductive Silicone {black with NBR (50 J Silicone rubber (40"J. Urethane rubber.

Vacuum

{check leakage). 98 lloninntal Type Uacuum Entny: Witlrout BullcD lrllilh 0ne-Iouch Tube litting Specif ications 2, 4,6, 8, 10, 13, 16, 10,13,16,20 10, 16,25, 4D 6,8, 10, 13, 16,20 NBR (black), Silicone (white), Urethane (brown), Ftuorine (black with mark), Conductive NBR (black with mark), Conductive Silicone {black with NBR (50 J Silicone rubber (40"J. Urethane rubber.

Cooling Capacity: Cooling Capacity: 1100/1300W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: Rc, Option: Automatic Water Supply Function

Cooling Capacity: Cooling Capacity: 1100/1300W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: Automatic Water Supply Function