Table of Contents

8 @2 @0 @3 @5 @8 @7 o u !7 t CY3R15/20 CY3R15 Component Parts No. Description No.

Metal Seal/Rubber Seal Series VQ Body Ported

S U S U S AXT100-1-P (2) U S U S U S Flat cable housing assembly = Number of pins: 26, 20, 16, 10 P kit w VQ0 AXT100-1-J 20 (2) Flat cable housing assembly J kit AXT100-1-F (2) D-sub connector housing assembly = Number of pins: 25, 15 F kit e VQ4 Note 1) S kit is composed of a flat ribbon cable housing assembly (AXT100-1-PU20) of q SI unit and w P kit (20 pins).

5 Port Solenoid Valve

SS5Y5 10 NA 05 N M S U C 8 6 Refer to page 20 for Type 11/ Bottom ported dimensions. Mixed Mounting Type q w e r t o y !0 u i It is possible to mount SY3000 size valves on all stations. In this case, there is no need to fill in part i in the order code.

SQ1000/2000

Also, it is used with an individual EXH spacer to shut off the exhaust of individual valves. Specify the station position on a manifold specification sheet. D side 4.6 U side When an EXH passage is shut off with an EXH block plate, a label is attached for external confirmation of the shut off position (one label each).

Electric Actuator/Slider Type

30 40 0 5 10 15 20 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 1,000 1,000 1,000 Mey Horizontal m 500 500 500 L2 0 0 0 0 0 5 10 15 20 0 10 20 30 40 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 800 800 800 600 600 600 L3 400 400 400 Mer m 200 200 200 0 0 0 0 0 10 20 30 40 50 60 0 10 20 30 40 5 10 15 20 Work load [kg] Work load [kg] Work load [kg] 1,500

AC Servo Motor Driver (CC-Link Type ）

50 20 9 15 9.

ZP

( ( Thin flat with rib CT C C Note) Note) ( C C C ( C B Note) Note) J ( ( ( ( ( Bellows Note) Note) Note) Note) Note) MB ( ( ( ( ( ZJ ( ( ( ( Deep D C Nozzle pad AN ( ( Note) Note) Flat pad MT ( ( 4 x 10 4 x 20 4 x 30 ( 5 x 10 5 x 20 5 x 30 ( 6 x 10 6 x 20 6 x 30 ( 8 x 20 8 x 30 ( 3.5 x 7 ( W Oval 2 x4 C 3.5 x 7 C 4 x 10 C U H Flat HT Heavy-duty pad HB Bellows HW Oval U ( ( ( ( Mark-free

Table of Contents

20 20 74.5 90 98 30 35 40 19 25 25 20 23 25.5 29 32 32 VX31 VX32 VX33 1 4 1 8 3 8 1 4 27.5 27.5 3 8 1 4 17-3-85 6 The models VX31/32/33 have been revised.

Table of Contents

D2012-10-9 9 Series MHY2 Construction Closed condition Size 10 Size 16 Size 20, 25 r o !8 e w !7 t r o !8 e w @0 !7 t r o !8 e w @0 !7 t !5 !5 !5 !6 !6 !0 u !2 i q !1 y !9 !0 u !2 i q !1 y !9 !0 u !3 !2 i q !1 y !9 !4 !4 !

AC Servo Motor Driver (CC-Link Type ）

50 20 9 15 9.

Base Mounted Metal Seal/Rubber Seal Series VQ

The manifold with an vacuum ejector unit type is mounted from the U side. One vacuum ejector unit corresponds to one station.

NCQ2/CQ2

22.5 25 28 30 32 37.5 42.5 51 59 U 19 20 23 26 27.5 30 35 40.5 49 57 U 23.5 24.5 27.5 30.5 36.5 40 45 50.5 59 67 U 26.5 27.5 30 32.5 39.5 42.5 48 53.5 61.5 70 U 21 22 24.5 27.5 34 37.5 43 48 56.5 64.5 U 27.5 28.5 31 34 40.5 43.5 49 54.5 62.5 71 U 24.5 25.5 28 31 37.5 40.5 46 51.5 59.5 68 U 33 36.5 42 47 55.5 65.5 U 21.5 22.5 25.5 28 36 38 43.5 48.5 57 65.5 12 16 20 25 32 40 50 63 80 100

Compact 5-Port Solenoid Valve

For models without an SI unit (S0), note the number of output points of the SI unit that will be mounted. u P, E port entry, SUP/EXH block assembly Symbol P , E port entry SUP/EXH block assembly Application U U side (2 to 10 stations) Internal pilot All D D side (2 to 10 stations) B Both sides (2 to 24 stations) US U side (2 to 10 stations) Internal pilot, Built-in silencer D-sub connector

Compact Cylinder

28 36 38 43.5 48.5 57 65.5 U 21.5 22.5 25 28 30 32 37.5 42.5 51 59 U 19 20 23 26 27.5 30 35 40.5 49 57 U 23.5 24.5 27.5 30.5 36.5 40 45 50.5 59 67 U 26.5 27.5 30 32.5 39.5 42.5 48 53.5 61.5 70 U 21 22 24.5 27.5 34 37.5 43 48 56.5 64.5 U 27.5 28.5 31 34 40.5 43.5 49 54.5 62.5 71 U 24.5 25.5 28 31 37.5 40.5 46 51.5 59.5 68 U 33 36.5 42 47 55.5 65.5 12 16 20 25 32 40 50 63 80 100 The applicable

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

20 24.5 18.5 21.5 20 23 24 27 23 26 Auto Switch Mounting Height D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7BAL D-F79F D-F7NTL D-F7V D-F7WV D-F7BAVL D-J79C D-A79W D-A9V D-M9V D-F9WV D-A73C D-A80C D-A7 D-A80 D-F9BAL D-P5DWL Bore size (mm) U U U U U U U U U U 12 22 23 26 20.5 26.5 19.5 16 25 29 23.5 29.5 26 22.5 20 31 27 31.5 28 24.5 25.5 25 30 34.5 31 34 28.5 27.5 32 26.5 29 34 27 35 38

ZP

ZPY25D10--A10 59 93 23 Flat with ribs U C ZPY25D20--A10 ZPY20 -A10 69 131 20 23 28 14 24 1.7 1.8 4 42 51 ZPY25 -A10 U C ZPY25D30--A10 79 141 25 ZPY32 -A10 U C 77 ZPY25D40--A10 89 177 42.5 32 35 14.5 24.5 2.3 4.5 99 187 ZPY25D50--A10 Dimensions by Stroke Dimensions by Tubing 20, 25 32 H Model F G F G Model J K L U C U C U C U C ZPY-4-A10 ZPY 10--A10 5 1.8 14.5 87 53.5 53 87.5 23 ZPY-6-A10

AC Servo Motor Driver

50 20 50 8 16 8.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Driver Driver Servo amplifier Servo motor Servo amplifier Servo motor U U U U CAUTION V V M V M V W W W W Connecting a servo motor of the wrong axis to U, V, W, or CN2 of the driver may cause a malfunction. 3 3 3.

Series SV

U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) Series SV2000 ... ... 20 For 20 stations Stations 2 stations Symbol 02 Note Note 1) Double wiring specification ... ... ... ...

0.4

L kit <u SUP/EXH block assembly>