Series 10-, 21- AF-A Air Filter

Option Applicable model 10-/21-AF20-A 10-/21-AF30-A 10-/21-AF40-A 10-/21-AF40-06-A 10-/21-AF50-A 10-/21-AF60-A Bracket assembly Note 2) AF52P-050AS AF22P-050AS AF32P-050AS AF42P-050AS AF42P-070AS Note 2) Assembly includes a bracket and 2 mounting screws. 1069-1 A Air Filter 1021-AF-A Dimensions AF20-A AF30-A to 40-06-A 10211021T N S J M U D J M U D S N T Air Preparation Equipment Pressure

ZQ-OM01301

ZQ-OM01301-A Vacuum pump system Model of a single unit ZQ000 U A-K15L B-EA M G-3 3-N (1) (2) (3)(4) (5) (6) (7) (8)(9)(10) (1) Body type (6) Vacuum pressure switch unit specifications U For single unit Nil Note 4) With unit selection function M For manifold M Fixed SI unit (kPa) P Note 4) With unit selection function (2) Solenoid valve combination (Initial value: psi) K1 Supply valve (N.C

Table of Contents

Model A B C D E Y Y B C D A E Flat Model ZPY10D--A10 10 12 15 25 41 6 Flat with ribs U C ZPY16D--A10 ZPY10 -A10 16 18 16 26 42 7 15 12 22 1.7 10 12 1.8 3 38 ZPY13 -A10 U C 13 Dimensions by Stroke ZPY16 -A10 U C 38.5 16 18 12.5 22.5 1.2 3.5 10 16 H Model Dimensions by Stroke F G F G 10, 13 16 ZPYD10--A10 52 23 86 53 87 H Model F G F G ZPYD20--A10 62 124 63 125 51 U C U C U C U C U C ZPYD30

Standard Combinations

ACG20 to 40 AF + ARG + [S] + AL (7) Pressure switch S AF + [S] + ARG ACG20B to 40B AF + AFM + [S] + ARG ACG20C to 40C AF + ARG + AL + [V] ACG20 to 40 Residual pressure relief 3 port valve AW + AL + [V] ACG20A to 40A Port size V AF + ARG + [V] ACG20B to 40B Body size Port size AF + AFM + ARG + [V] ACG20C to 40C Symbol 20 30 40 AW + AFM + [V] ACG20D to 40D 01 02 03 04 1/8 Note 6) When more

Vacuum System Peripherals:

U D side D B Special specification M U side 2 to 10 stations 15 15 Includes number of blanking plate assembly .

Soft Start-up Valve AV2000/3000/4000/5000 1

M6 x 1 Depth 7.5 39 50 0 77 74 59 155 143 128 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 14-3-9 10 Series AV2000/3000/4000/5000 Connecting Spacer for Modular Style F.R.L.

Lubricator Series AL10 to 60

Drip failure can cause damage to the components that need lubrication. 14-2-62 Lubricator Series AL10 to 60 Construction AL10 AL20 JIS Symbol w w e q q t IN OUT IN OUT F.R.L. y y AV r u u AU AF AR AL30/40 AL50/60 IR w w q t VEX q e e t AMR IN OUT OUT IN ITV y r IC i r u VBA VE VY1 y G u PPA AL Component Parts Description Material Note No.

Proposals for Energy Saving

G46-10-01 2 pcs. G46-10-01 2 pcs. G27-10-R1-X209 2 pcs. G27-10-R1-X209 2 pcs.

ALF400 to 900, ALT-5/-9

Tube size 100 O.D. 6 I.D. 4 14-13-10 Specialty Lubricators NALF Series Auto Feed Lubricators NALF400, 400-06, 500, 600, 800, 900 Lubricator NALF400 Tank NALT-5 s n o i t a c i f i c e p S F L A N e b u L d e e F o t u A 0 0 4 F L A N 6 0 N 0 0 4 F L A N 0 0 5 F L A N 0 0 6 F L A N 0 0 8 F L A N 0 0 9 F L A N ) a P M ( g i s p e r u s s e r p y l p p u s . x a M ) 5 . 1 ( 0 2 2 ) a P M ( g

2-Color Display Digital Flow Switch Series PFM

Description Model 1 Body q u ZS-33-D 2 Lead wire with connector (2 m) w ZS-33-P1L 3 IN side Bottom piping adapter (with pin) i ZS-33-P2L 4 OUT side Bottom piping adapter (with pin) For 10 l/min ZS-33-10N For straight piping Flow adjustment valve assembly (with pin) For 25 l/min ZS-33-25N u 5 For 50 l/min ZS-33-50N r Bottom piping For 100 l/min ZS-33-11N i For 10 l/min ZS-33-10NL For bottom

Large Flow Air Filter AF800/900 Series

Symbol Air filter Air filter with auto drain How to Order AW -A -B 2 1 2 1 AW 12 AF 00 8 AG L L Option Air filter Flow Rate Characteristics (Representative Values) Nil E None Body size D 5 Drain cock with barb fitting Drain guide 8 9 1 2 1 2 AV AF800 J 6 R Flow direction: Right to left AF AF Pressure drop (MPa) Pressure drop (MPa) Auto-drain specifications Option 00 10 11 None Float type

IC

CH kPa 4 3 2 1 SW t e AV y D-IN RUN UP SET P-ON AU DOWN STOP READ r u AF i AR o Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com t y u i o IR !

AIR COMBINATION

ATTACHMENTS / ACCESSORIES OPTIONS PART NUMBER Attachments / Accessories (Options) part number Section Model For AC10*-A For AC20*-B For AC25*-B For AC30*-B For AC40*-B For AC40*-06-B For AC50*-B For AC55*-B For AC60*-B Descriptio Round type Standard G27-10-R1 G36-10-01 G46-10-01 Note1) Pressure gauge G27-10-R1 G36-4-01 G46-4-01 0.2 MPa setting Round type Standard G36-10-01-L G46-10-01-L

AIR COMBINATION

ATTACHMENTS / ACCESSORIES OPTIONS PART NUMBER Attachments / Accessories (Options) part number Section Model Descriptio For AC10*-A For AC20*-A For AC25*-A For AC30*-A For AC40*-A For AC40*-06-A Note1) Pressure gauge Standard G27-10-01 G36-10-01 G46-10-01 Round type G27-10-01 Note2) G36-4-01 G46-4-01 0.2 MPa setting Round type Standard G36-10-01-L G46-10-01-L Option G36-4-01-L G46-4-01-L

Regulator for 2 MPa Series ARX20

Handle 1348102#1 ADC POM e Bonnet Piston assembly 1348104A r POM POM, NBR Valve 1348105 t Brass, NBR Valve spring 1348109 y Stainless steel 1348108 (For 0.85 MPa) Steel wire Adjusting spring u 1348108-1 (For 0.3 MPa) Dimensions Panel cutout dimensions 26 R2.5 SUP OUT SMC K C O P A A L U S H 12 37 54 25 1.6 (Max. thickness 4.5) 44 79.5 (When regulating pressure = 82) 5.4 10 31.5 OUT OUT 35

Profi-E

U se a sof t cl ot h t o rem ove st ai ns. Ref er t o t he SM C w ebsi t e ( U RL ht t p: //w w w . sm cw orl d. com ) f or m ore i nf orm at i on about t roubl eshoot i ng. Thi s docum ent descri bes t he general purpose product . Som e part s m ay di f f er f or part i cul ar speci al product s. Thi s m anual i s subj ect t o change w i t hout pri or not i ce. ITV2OM00076A 10

VER2000/4000

6 q w e r t y u i Block packing !

ACG

ACG20 to 40 AF + ARG + [S] + AL (7) Pressure switch S AF + [S] + ARG ACG20B to 40B ACG20C to 40C AF + AFM + [S] + ARG ACG20 to 40 AF + ARG + AL + [V] Residual pressure relief 3 port valve AW + AL + [V] ACG20A to 40A Port size AF + ARG + [V] V ACG20B to 40B Body size Port size ACG20C to 40C AF + AFM + ARG + [V] Symbol 20 30 40 AW + AFM + [V] ACG20D to 40D 01 02 03 04 1/8 Note 6) When more

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

VCHR 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVX c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

SRF 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVH c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.