Filter Type: BFC (Odor Removal Filter), Body Size: 30, Thread Type: F (G), Port Size: 03 (3/8)

BACTERIA REMOVAL FILTER. G16. 0.28000 lb. CLEAN GAS FILTER.

Filter Type: BFD (Bacteria Removal Filter, Nominal Filtration: 0.01μm; Bacteria Capture Performance LRV ≥ 9), Body Size: 30, Thread Type: F (G), Port Size: 02 (1/4)

ODOR REMOVAL FILTER. G16. 0.20000 lb. CLEAN GAS FILTER.

Filter Type: BFC (Odor Removal Filter), Body Size: 30, Thread Type: Rc, Port Size: 03 (3/8)

Body Size: 40, Filter Type: A (Antibacterial Filter + Antibacterial Filter), Thread Type: N (NPT), Port Size: 03 (3/8)

Body Size: 40, Filter Type: A (Antibacterial Filter + Antibacterial Filter), Thread Type: N (NPT), Port Size: 02 (1/4)

Filter Type: BFD (Bacteria Removal Filter, Nominal Filtration: 0.01μm; Bacteria Capture Performance LRV ≥ 9), Body Size: 40, Thread Type: N (NPT), Port Size: 03 (3/8)

Filter Type: BFC (Odor Removal Filter), Body Size: 30, Thread Type: N (NPT), Port Size: 02 (1/4)

CLEAN GAS FILTER. BACTERIA REMOVAL FILTER. 0.46000 lb. G16.

Filter Type: BFD (Bacteria Removal Filter, Nominal Filtration: 0.01μm; Bacteria Capture Performance LRV ≥ 9), Body Size: 40, Thread Type: N (NPT), Port Size: 04 (1/2), Flow Direction: R (Flow Direction: Right to Left)

Filter Type: BFA (Antibacterial Filter, Nominal Filtration: 5μm; Antibacterial Activation Value of 4 or Above), Body Size: 40, Thread Type: N (NPT), Port Size: 03 (3/8), Flow Direction: R (Flow Direction: Right to Left)

Filter Type: Bacteria Removal Filter, Nominal Filtration: 0.01μm; Bacteria Capture Performance LRV ≥ 9, Body Size: 40, Thread Type: NPT, Port Size: 1/2, Flow Direction: Flow Direction: Right to Left

Body Size: 30, Filter Type: A (Antibacterial Filter + Antibacterial Filter), Thread Type: N (NPT), Port Size: 02 (1/4), Flow Direction: R (Right to Left)

Filter Type: BFA (Antibacterial Filter, Nominal Filtration: 5μm; Antibacterial Activation Value of 4 or Above), Body Size: 30, Thread Type: Rc, Port Size: 02 (1/4), Flow Direction: R (Flow Direction: Right to Left)

ZP

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

ZP

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

Table of Contents

Metric sizes Type 04 06 08 10 12 4 6 8 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 01 02 03 04 M5 x 0.8 1/8 1/4 3/8 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06 15

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D 02 1.2 M4 x 0.7 4 04 1.6 06 08 2.5 28.4 N S U F GN GS B4 M5 x 0.8 19.5 04 06 ZP R U 02 1.2 M5 x 0.8 5 04 1.6 06 08 2.5 B5 A2 Dimensions Per Vacuum Inlet Construction p. 115 Model Adapter Assembly p. 122 D E F Fitting part min. hole size Vacuum inlet direction q Pad dia.

ZP

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-