ZP

D 02 1.2 M4 x 0.7 4 04 1.6 06 08 2.5 28.4 N S U F GN GS B4 M5 x 0.8 19.5 04 06 ZP R U 02 1.2 M5 x 0.8 5 04 1.6 06 08 2.5 B5 A2 Dimensions Per Vacuum Inlet Construction p. 115 Model Adapter Assembly p. 122 D E F Fitting part min. hole size Vacuum inlet direction q Pad dia.

5-Port Solenoid Valve

SY5l3 0 1l-lll1-ll-Wl-V02l (Top ported) Plug F (Max. 3) For "F" marking (Thread type) 26.8 14.5 4A X 2B PE F B A A 4 B 2 3EB 1P 5EA 1/8 (For threaded type) [4(A), 2(B) port] (16.2) (For threaded type) 25.9 One-touch fitting [4(A), 2(B) port] (For threaded type) Applicable tubing O.D.: 4, 5/32" 6, 1/4" 8, 5/16" (For 01 threaded type) (76.7) (62.3) * These figures show the SY5230-5Z1

Table of Contents

Displacement of Section A when force acts on Section F Displacement of Section A when force acts on Section F Guide central axis (1 axis type) F A F F For the double axis type, this is the cylinder's central axis.

Air Slide Table

B A1 A2 Extension stroke end Retraction stroke end Rubber Stopper Model A1 A2 B C D E F G H K L1 L2 M N Adjuster part no.

Air Slide Table Series MXP

Table Deflection (Reference Values) Table displacement due to pitch moment load Displacement on A when load is applied on F . Table displacement due to yaw moment load Displacement on A when load is applied on F . Table displacement due to roll moment load Displacement on A when load is applied on F .

240

Table displacement due to pitch moment load (marked with the arrow) Table displacement due to yaw moment load (marked with the arrow) Table displacement due to roll moment load (marked with A) F A F F L L Distance L [mm] Model LEPS6 LEPS10 Stroke [mm] 25 50 25 50 Distance L [mm] 53.0 77.0 59.5 82.0 LEPS6 LEPS6 LEPS6 0.30 0.30 0.10 0.25 0.25 Displacement [mm] Displacement [mm] Displacement

Made to Order

CS1 series Without auto switch With auto switch H 120 120 130 145 145 175 190 Bore size (mm) F 50 50 50 55 55 69 69 ZZ 245 245 266.5 291 291 357.5 387.5 F 50 50 50 55 55 H 120 120 130 145 145 ZZ 245 245 266.5 295 300 125 140 160 180 200 250 300 F H ZZ + Stroke (mm) MB series Bore size H ZZ 32 47 135 40 58 146 50 67 165 63 67 165 80 81 199 100 81 199 ZZ + Stroke H (mm) MB1 series Bore

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. 1 2 3 Circuit Cable color U V W Red White Black Connector A2 terminal no.

ASR

A2 AK ASS T T ASR ASF Model T H D1 D2 D3 L1 L2 L6 A2 M L5 A1 Weight (g) Note 5) MAX.

Card Motor

Confirm that the pushing force F [N] does not exceed the allowable pushing force. F Fmax 0 1 2 3 4 5 6 LAT3m-10 Allowable thrust setting value Time while pushing force is applied 4.2 Position 0 20 40 60 80 100 Duty ratio [%] Time From Fig. 5: LAT3m-10, pushing direction away from the connector at pushing position 4 mm, find Fmax = 4.5 As F = 4 Fmax = 4.5, the selected model can be used.

ZSE F/ISE

ZSM PF2 IF Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Data Special fitting types are used in semiconductor production equipment (Metal gasket seal fittings) Leak rate: 1 x 10 10 Pa.m3/s ZSE/ISE60(F)-A2 ZSE/ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (Metal gasket seal fittings

CHKD/CHKG

Magnet With auto switch only 9 Magnet plate Stainless steel With auto switch only 10 Scraper 11 Rod seal 12 Piston seal NBR 13 Tube gasket 14 Piston gasket 269 CHKD Series Dimensions Basic type/CHKDB 2 x Rc P F with effective thread depth G F with effective thread depth G Q Q Width across flats f c R D R a b g e H E E h + Stroke C B + Stroke 4 x K through 8 x L counter bore 4 x K through

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

How to Order How to Order ZSE80(F)/ISE80 X500 ZSE80(F)/ISE80(H) X501 Piping Piping Output Output Option ZSE ISE Option Note 1) Not applicable to the rated pressure 0.1 to 2 MPa specifications (ISE80H). Note 2) A restrictor (equivalent to -X510) is installed inside the fitting. (Piping specifications A2(L) and B2(L) are excluded.)

ASR

A2 AK ASS T T ASR ASF Model T H D1 D2 D3 L1 L2 L6 A2 M L5 A1 Weight (g) Note 5) MAX.

KJ

/O.D. mm 5/8 6/9 6.5/10 8/12 8.5/12.5 Symbol 01 02 03 04 Symbol 50 60 65 80 85 15-2-87 16 16 Series KKH Dimensions: Socket (S) Male thread type (mm) A1 A2 When connected T Connection port size D H Width across flats L2 When connected Effective area mm2 L1 Min. bore size Body size Weight g A2 Model A1 T KKH3S-01MS R 1/8 33.5 20.4 20.4 6.0 36.0 14 40.0 37.5 D -02MS 19.6 R 1/4 1/8 31.5 19.5

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

N) Pitch moment Yaw moment Roll moment F F L1 A1 Mp A2 L2 W L3 A3 Graph (1) Load Weight: W Mr Static moment Dynamic moment MXY6 W My W L3 A3 0.6 A2 L2 Rubber stopper screw MX Load weight W kg Mr 0.5 L1 A1 Metal stopper screw Mp 0.4 W MTS My W 0.3 W MY 0.2 Mey Mep 0.1 We CY We 0.0 A2 L3 A3 L2 Collision speed V mm/s 0 100 200 300 400 500 280 560 MG Courtesy of Steven Engineering, Inc.-230 Ryan

Rotary Actuator

Position of rotational axis: Parallel to side b and through the center of gravity b a a r 3r2 + a2 )= m a2 )= m 12 12 3. Thin rectangular plate (Including rectangular parallelepiped) 8.

Slider Type Ball Screw Drive/11-LEFS Series

L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time [s] T = T1 + T2 + T3 + T4 [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.

Vacuum Unit Ejector / Vacuum Pump System

Is E or F: For pressure switch for vacuum ,lead wire with connector (Length 2m) for pressure switch for vacuum G When 1.

Vacuum Unit Ejector / Vacuum Pump System

Note 7) Select F or H for (1) System/Body Type for the single unit model. -13No. ZK2-OM00201 (4) Wiring Note 8) Symbol Type L Individual wiring Note 9) F D-sub connector (25 pins) Note 10) P Flat ribbon cable connector (26 pins) Note 10) N No wiring (No valve) Note 8) Common wiring is available only solenoid valve wiring. Individual wiring is specified for vacuum switches and sensors.