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7 6 7 17 Mounting Bracket Part No.

Precision Clean Regulator

SRP1-M5 SRP1-01 Pressure gauge part no.

VS 8-2/VS 8-4

Single wiring 5 6 7 8 9 10 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 1 2 3 4 5 6 7 8 9 10 1 2 3 4 NEW CONCEPT N.C. valve N.C. valve N.C. valve N.O. valve N.O. valve N.O. valve 5 6 7 8 9 10 1 2 3 4 R2 B R1 A P IP65 enclosure compliant kit (Lead wire) M 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 5 (R1) 3 (R2) 5 (R1) 3 (R2) 5 (R1) 3 (R2) 1 2 3 4 4 (A) 2 (B) 4 (A) 2 (B) 4 (A

A

5 1/2 1/2 3/4 7/16 7/8 1/2 3/4-16 5 7/16 0 2.34 2.72 400 (4) 1/2 1.57 3.32 1 1/8 1 1/2 1 1/2 3/8-24 4 1/2 1 3/8 4 1/4 5 53/64 1 4.7 1.18 6 1/4 1/2 3/4 7/16 7/8 1/2 3/4-16 Courtesy of Steven Engineering, Inc. !

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Vane Style Size: 1, 3, 7, 20 .

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

7 Component Parts Description Material Description Material No. !1 !2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

7 Component Parts Description Material Description Material No. !1 !2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

ZR

(Refer to page 13-3-7.) Light/Surge voltage suppressor Vacuum switch electrical entry Maximum vacuum pressure Ejector unit nozzle dia.

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T0425 (0.5 m) H04-01 (1 pc.) DL04-01 (1 pc.)

Low Maintenance Filter Series FN1

FN11V FPM KT-FN11V 7 Low Maintenance Filter Series FN1 Dimensions Rc 1/4 0 315 45 IN OUT B.C.D230 135 225 42 4-11 G46-15-02 Pressure gauge port size Rc 1/4 Note) Use the Pc 1/4 port marked with an asterisk when designing an air release circuit.



(With bolt and washer) G27-10-R1-X207 G27-10-01 G36-10-01 G46-10-01 G Pressure gauge AN120-M5 N Silencer for breed port (PE) The optional parts are shipped in the same package.

PSE540/560

PSE56-C01 24 B PSE56-A2 A B Model 8.2 12 9.2 12.2 15.5 9.5 A PSE56-01 PSE56-02 PSE56-N01 PSE56-N02 PSE56-C01 PSE56-A2 PSE56-B2 R 1/8 R 1/4 NPT 1/8 NPT 1/4 Rc 1/8 URJ 1/4 TSJ 1/4 24 B PSE56-B2 A 24 B 16-3-28 7 Series PSE Specific Product Precautions 1 Be sure to read before handling. Pressure Sensor Handling Air Supply Warning Warning ZSE ISE 1.

AMR3000 to 6000

Model Model name IC AMR3000 AMR4000 AMR5000 AMR6000 Bracket 13576 13556 13587 13568 VBA G36-10-01 G46-10-02 Pressure gauge 1.0 MPa (5)(6) Accessory (Option)/Part No.

ZB-OM00301

Q2 +COM 30.30.4 4 L L 5 DC24V LO L 6 DC12V M M 5 MO M 5 4300 5MMO 6 B 6() 9 - No.ZB-OM00301 / kPa / P1 0-101 15V2F.S.7 P3 -100100 15V2F.S.7 8 EA EAM SI 9 NPN2 EAP [psi] 8 0-101 8 EB EBM SI 9 PNP2 EBP [psi] 8 8 FA FAM SI 9 NPN2 FAP [psi] 8 -100100 8 FB FBM SI 9 PNP2 FBP [psi] 8 73m 8 9kPa G 2m V 10 11 12 C2 2 B C4 4 N1 1/8 N3 5/32 K 12 L2 2 L4 4

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

G36-10-01) indicates thread. Specify no symbol for Rc, and N for NPT. Please consult with SMC if NPT gauge is required. Note 6) Use caution not to tighten excessively when mounting a pressure gauge, otherwise it may result in a breakdown. Use a sealant tape for sealing. Note 7) Piping adapter, O-ring, Hexagon socket bolt, Hexagon socket bolt assembly.

AMR3000 to 6000

Model Description AMR3000 AMR4000 AMR5000 AMR6000 : E4-l02 : E4-l03 : E4-l04 1 4 3 8 1 2 1 4 1 2 : E6-l06 : E6-l10 3 4 1 : E5-l04 : E5-l06 : E3-l02 : E3-l03 Adapter assembly (6) 3 8 3 4 AD33-X203 AD33-X202 AD33-X210 AD33-X201 Float style auto drain (Bowl assembly) IS1000-01 (Set at 0.4MPa) Compact pressure switch PT elbow (7) 135510 135613 Note 5) l in the gauge part number (e.g.

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+ PA &) Connection # % 7 7 # 7 7 # 7 7 # & 0 0 PAX PB (VXFC10) Operation sequence diagram & & % 7 17-3-79 10 The VX series will be revised shortly. Series VXF Precautions Be sure to read before handling.

3M/SMseries

-1.8WDC WF333O Exhaust Conter NVF343O GNced Center (B) (A) (B) (a) 01 c2 \ t \ T I'f E I J E Z (R2)(PxFl) (R2XPXR1) Prssure Center NVF3530 (B) (A) Spej;ifications -, Flurd-Art f Operatangprssurcrange2Positionsingle2O-12gPSlS(1.5-9kgF) U 2 pooition double-1 5 1 28 PSI (1 9kgf/cm'?

Air Fittings & Tubing

L B D E F 6.5 8.5 2.1 4.0 2.5 3.7 MS-5H-4 MS-5H-6 15.5 16.5 7 8 1.8 2.5 7 8 Hose elbow: MS-5HLH-4, -6 lB Effective area (mm2) Weight (g) Part No.

HRX-OM-W002

Alarm Notification and Troubleshooting . 7-1 7.1 Alarm Notification . 7-1 7.2 Alarm Buzzer Stop . 7-3 7.3 Troubleshooting . 7-4 7.3.1 Alarm contents, causes, and troubleshooting . 7-4 7.4 Other Errors . 7-6 Chapter 8 Control, Inspection, Exchange and Cleaning . 8-1 8.1 Quality Control of Circulating Fluid and Facility Water . 8-1 8.2 Inspection, exchange, cleaning . 8-2 8.2.1 Daily check