5 Port Solenoid Valve

1 2 3 U D B In the case of the 32-output SI unit SV1000 SV2000 SV3000 U side (2 to 10 stations) D side (2 to 10 stations) Symbol 02 Stations Note 2 stations Both sides (2 to 20 stations) Double wiring Note 1) w SI unit specifications 16 02 16 stations 2 stations y SUP/EXH block assembly Symbol Communication connector Number of outputs Specified layout Note 2) (Available up to 32 solenoids

Compact 5-Port Solenoid Valve

Note 02 2 stations Double wiring*1 Symbol Stations Note 02 2 stations Double wiring*1 16 16 stations 02 2 stations Specified layout*2 (Up to 32 solenoids available) 10 10 stations 02 2 stations Specified layout*2 (Up to 20 solenoids available) y SUP/EXH block assembly 24 24 stations 20 20 stations *1 Double wiring: 2-position single, double, 3-position, and 4-position valves can be used

Water Regulator

Model Pressure range *1 Indication unit Connection thread Note MPa Port size 01 Rc1/8 02 Rc1/4 R1/8 R1/4 G46-7-02-SRB 0 to 0.7 R1/4 G46-10-02-SRB 0 to 1.0 G46-4-01 to 02-SRB 0 to 0.4 MPa Set pressure range: 0.05 to 0.69 MPa 02 WR110 X215 *1: Do not apply more pressure than the max. pressure displayed. It may cause a malfunction.

ZP

2 !0 !1 Component Parts o No.

7.5

position 2 position C2 C2 SJ3l60-C2 SJ2l60-C2 2 onetouch fitting 2 onetouch fitting 3 position 4 position 3 position 4 position 71 65 73 46 41 44 2 position 2 position C4 C4 SJ3l60-C4 SJ2l60-C4 4 onetouch fitting 4 onetouch fitting 3 position 4 position 3 position 4 position 77 48 73 61 69 44 39 42 2 position 2 position C6 SJ3l60-C6 SJ2l60-M3 6 onetouch fitting M3 x 0.5 3 position 4 position

5 Port Solenoid Valve Series SV1000/2000/3000/4000

(1) (1) (1) (1) Double wiring specifications Double wiring specifications Double wiring specifications Double wiring specifications 09 02 04 02 12 02 04 02 4 stations 4 stations 9 stations 12 stations (2) (2) (2) (2) 2 stations 2 stations 2 stations 2 stations Specified layout (Up to 8 solenoids possible.)

Micro Mechanical Valve Series VM1000

POM POM 2331 Series VFM300 Series VFM300 Basic VFM350-02-00 Symbol (C1) 2 (C2) 4 2 x 3.8 M5 x 0.8 Accessory mounting hole (Pilot exhaust port) 12 14 3 (E1) 1 (S) 5 (E2) 0.5 MPa supply 3.0 mm T.T. 2.0 mm O.T. 1.0 mm P.T. 16 N F.O.F. 2 x 4.2 mounting hole (SUP CYL port) 3 x 1 4 2 x 1 8 (EXH port) Roller lever VFM350-02-01 VFM350-02-01S 14 polyacetal or head steel roller Symbol (C1) 2 (C2

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Optional Parts ARP20(K) ARP30(K) ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G36-4-01 G46-4-02 Round type Note 2) 0.4 MPa Square embedded type Note 3) GC3-4AS [GC3P-010AS (Pressure gauge cover only)] G36-2-01 G46-2-02 Round type Note 2) 0.2 MPa Square embedded type Note 3) GC3-2AS [GC3P-010AS (Pressure gauge cover

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Optional Parts ARP20(K) ARP30(K) ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G36-4-01 G46-4-02 Round type Note 2) 0.4 MPa Square embedded type Note 3) GC3-4AS [GC3P-010AS (Pressure gauge cover only)] G36-2-01 G46-2-02 Round type Note 2) 0.2 MPa Square embedded type Note 3) GC3-2AS [GC3P-010AS (Pressure gauge cover

Series SV

Note 1) Note 1) Note 1) Note 1) Double wiring specification Double wiring specification Double wiring specification Double wiring specification ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... 09 02 04 02 12 02 04 02 4 stations 2 stations 9 stations 2 stations 4 stations 2 stations 12 stations 2 stations Note 2) Note 2) Note 2) Note 2) Specified layout (Up to 18 solenoids

SV

specifications Double wiring specifications Double wiring specifications 09 02 04 02 12 02 04 02 9 stations 4 stations 12 stations 4 stations 2 stations 2 stations 2 stations 2 stations (2) (2) (2) (2) Specified layout (Up to 8 solenoids possible.)

ZP3

Form w 1 Material e r Vacuum inlet Connection thread N S U F GN GS HS 04 06 08 UM 02 10.8 7 2 1.4 KQ2H02-M5N C2 04 14.7 8 4 2.5 KQ2H04-M5N ZP3 Y B3 02 10.8 7 2 1.4 KQ2H02-M5N 04 14.7 8 4 2.5 KQ2H04-M5N 06 10 6 KQ2H06-M5N Vacuum inlet: One-touch fitting 10 13 16 Applicable tubing O.D.

Air Cylinder Series CM2

2) 2 15 + 45 10 15 60 60 + 45(n 2) (n=2, 4, 6) CJ2 D-C73C D-C80C D-H7C (n 2) 2 15 + 50 CM2 10 15 65 65 + 50(n 2) (n=2, 4, 6) CG1 (n 2) 2 D-B5/B64 D-G5NTL 15 + 50 75 + 55(n 2) 10 15 75 (n=2, 4, 6) MB (n 2) 2 20 + 50 D-B59W 75 + 55(n 2) 15 20 75 MB1 (n=2, 4, 6) D-A3A(2) D-G39A D-K39A D-A44A CA2 35 + 30(n 2) 100 + 100(n 2) 10 35 100 CS1 Note 1) Auto switch mounting (The adjustment as

SJ3A6

Flat ribbon cable (10 pins) Symbol Stations 02 09 Symbol Stations 02 04 2 stations 9 stations 2 stations 4 stations Non-polar type, with plug (24 VDC) SJ3A6-5CU-DP (4 sets) SUP/EXH block (D side mounting) J: Flat ribbon cable (PC wiring) S6B: EX510 serial transmission Symbol Stations 02 08 Symbol Stations 02 08 2 stations 8 stations 2 stations 8 stations 1 3 2 D side U side Stations G: Flat

Industrial Filters

2) 2 Note 2) 2 Note 2) Number of elements 1 1 1 1 FGE 65 x L500 (L250 x 2) 65 x L500 (L250 x 2) 65 x L500 (L250 x 2) 65 x L500 (L250 x 2) Element size 65 x L250 65 x L250 65 x L250 65 x L250 Cover SCS14 Aluminum FGG Case Stainless steel 316 SPCE Main materials Gasket/O-ring Fluororesin NBR FGA Seal Nylon/Fluororesin Nylon Fluororesin FGC Weight (kg) 1.3 2.2 2.3 3.8 2.3 3.8 1.3 2.2 1.7 3.4

E-P HYREG ® Series VY1

01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5 M5 2 1 4 R 2 1 0.11 0.16 Weight (kg) (1) 0.19 0.25 0.35 0.55 0.75 1.5 2 4 Hysteresis (2) 1% F.S. 2.5% F .S. 3% F .S. 5% F .S.

VEX1

Proof pressure Max. operating pressure Set press. range Air operated Solenoid Ambient and fluid temperature Hysteresis Repeatability Sensitivity Mounting Lubrication Port 01 P A R mm2 02 01 02 03 04 04 06 10 10 12 14 20 02 Port size Rc(PT) 1 11 2 1 4 11 4 1 2 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 2 3 4 590 2 1 300 17 25 1.4 16 0.9 25 1.4 60 3.3 70 3.9 330 18 36 2.0 Cv 16 0.9 130 7.2 160 8.9 180 10

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

position 2 position C2 C2 SJ3l60-C2 SJ2l60-C2 2 onetouch fitting 2 onetouch fitting 3 position 4 position 3 position 4 position 71 65 73 46 41 44 2 position 2 position C4 C4 SJ3l60-C4 SJ2l60-C4 4 onetouch fitting 4 onetouch fitting 3 position 4 position 3 position 4 position 77 48 73 61 69 44 39 42 2 position 2 position C6 SJ3l60-C6 SJ2l60-M3 6 onetouch fitting M3 x 0.5 3 position 4 position

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 10 (1.0MPa), Connection Thread: 01 (R 1/8), Attachment: C2 (Clear Cover Removable, Wrench Tighten)