Display Pressure: 2 (0.2MPa), Connection Thread: 01 (R 1/8), Grade: SRB (General Degreasing, Production Line), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Display Pressure: 2 (0.2MPa), Connection Thread: 02M (R 1/4, M5 Female), Grade: SRB (General Degreasing, Production Line), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Display Pressure: 4 (0.4MPa), Connection Thread: 01 (R 1/8), Grade: SRB (General Degreasing, Production Line), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Display Pressure: 4 (0.4MPa), Connection Thread: 02M (R 1/4, M5 Female), Grade: SRB (General Degreasing, Production Line), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Display Pressure: 7 (0.7MPa), Connection Thread: 01 (R 1/8), Grade: SRB (General Degreasing, Production Line), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

1

P.T. 8 12 10 1 (P) 3 (R) 9 (61) 52 22 13 32 16 * 0.5 MPa supply 2 x 1/4 2 x 5.5 mounting hole 30 25 F.O.F.* 52 N P .T. 3 mm O.T. 2 mm T.T. 5 mm 40 Roller lever VM220-02-01A VM230-02-01A VM220-02-01SA VM230-02-01SA Symbol 2 port 17 Polyacetal or hard steel roller (A) 2 56.7 10 12 34.9 1 (P) 8 25 T.T. O.T.

AR Series Modular Type Regulator

gauge AF-A Note 2) Round type (with color zone) Standard G36-10-l01-L G46-10-l01-L 0.02 to 0.2 MPa setting G36-4-l01-L G46-4-l01-L AR -A -B Note 1) Assembly of a bracket and set nuts Note 2) l in round pressure gauge part numbers indicates a pipe thread type.

Regulator for 2 MPa ARX 20

01 G46 10 02 G36 4 01 G46 4 02 G36 P10 N01 G46 P10 N02 G36 P4 N01 G46 P4 N02 1348110A B Regulating pressure range Bracket 0.05 to 0.85MPa 0.05 to 0.30MPa 0 1 ARX20 Nil F ARX21 Nil F Thread type G Pressure gauge Rc NPT G Nil N F ARX20N ARX21N P Port size Panel nut 1/8 1/4 01 02 Option combination numbers Panel nut is also included with B.

Compact 5-Port Solenoid Valve

Note 02 2 stations Double wiring*1 Symbol Stations Note 02 2 stations Double wiring*1 16 16 stations 02 2 stations Specified layout*2 (Up to 32 solenoids available) 10 10 stations 02 2 stations Specified layout*2 (Up to 20 solenoids available) y SUP/EXH block assembly 24 24 stations 20 20 stations *1 Double wiring: 2-position single, double, 3-position, and 4-position valves can be used

Filter Regulator AW30, 40

-10-02 Round Square embedded type Round Square embedded type G46-10-02 G36-10-01 1.0MPa Note 3) GC3-10AS Note 2) GC3-10AS GC3-10AS 1 4 1 8 1 4 Note 1) Pressure gauge G46-2-02 G36-2-01 G46-2-02 Set pressure + 0.05MPa (at relief flow rate of 0.1l/min(ANR)) 5 to 60C (With no condensation) 5m 0.2MPa Note 3) GC3-2AS GC3-2AS GC3-2AS Note 4) AD48 N.O.

ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y Connection 4 4 thread 1.6 6 15 10 66 23 43 15 71 28 25 81 38 33 18 D B 02 1.2 Width across flats 12 A N S U F GN GS B3 B5 04 06 N4 U4 6 33 18 15 10 66 23 43 15 71 28 25 81 38 J K ZP T U 04 A8 1.6 6 33 18 J: 2.5 K: 2 15 10 66 23 43 15 71 28 25 81 38 06 08 C2 Dimensions Per Vacuum Inlet: Female Thread Vacuum inlet: One-touch

Micro Mechanical Valve Series VM1000

F.O.F. 4.5 mm 2.0 mm 2.5 mm 6 N Applicable tube Mounting hole 2 x 3.3 One way roller lever VM1000-4N-02 VM1000-4NU-02 VM1100-4N-02 VM1100-4NU-02 Symbol/2 port 3 port (A) 2 (A) 2 12 12 10 10 1 (P) 1 (P) 3 (R) 0.5 MPa supply Applicable tubing VM1100-4N-02 VM1000-4N-02 T0425 TU0425, T0403,TS0425 Side ported 3 port 2 port VM1100-4NU-02 VM1000-4NU-02 T.T. O.T. P.T.

Series SV

30% 50% 600 Stroke mm 70% 30% AS3201F -02-12 400 200 70% 50% 10% 0 800 MB 80 600 Stroke mm AS5000-02 AS420-02 400 200 0 AN300 -KM12 T1209 800 MB 100 600 Stroke mm AS5000-02 AS420-02 400 200 0 800 CS1 125 600 Stroke mm AS5000-02 AS420-02 400 200 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components

SV

30% 10% 30% 50% 70% SY 600 300 50% Stroke (mm) Stroke (mm) Stroke (mm) Stroke (mm) Stroke (mm) 70% 30% AS2201F -02-10 AS3201F -02-12 SYJ 400 200 SX 200 100 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 50% 30% 10% 70% 50% 70% 10% 0 0 800 400 MB 80 MB 63 300 600

ZP3

Form w 1 Material e r Vacuum inlet Connection thread N S U F GN GS HS 04 06 08 UM 02 10.8 7 2 1.4 KQ2H02-M5N C2 04 14.7 8 4 2.5 KQ2H04-M5N ZP3 Y B3 02 10.8 7 2 1.4 KQ2H02-M5N 04 14.7 8 4 2.5 KQ2H04-M5N 06 10 6 KQ2H06-M5N Vacuum inlet: One-touch fitting 10 13 16 Applicable tubing O.D.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Optional Parts ARP20(K) ARP30(K) ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G36-4-01 G46-4-02 Round type Note 2) 0.4 MPa Square embedded type Note 3) GC3-4AS [GC3P-010AS (Pressure gauge cover only)] G36-2-01 G46-2-02 Round type Note 2) 0.2 MPa Square embedded type Note 3) GC3-2AS [GC3P-010AS (Pressure gauge cover

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Optional Parts ARP20(K) ARP30(K) ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G36-4-01 G46-4-02 Round type Note 2) 0.4 MPa Square embedded type Note 3) GC3-4AS [GC3P-010AS (Pressure gauge cover only)] G36-2-01 G46-2-02 Round type Note 2) 0.2 MPa Square embedded type Note 3) GC3-2AS [GC3P-010AS (Pressure gauge cover

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

VEX1

Symbol Parts name VEX11001 02 VEX12001 02 VEX13002 03 04 04 06 10 VEX150VEX17010 12 VEX19014 20 VEX3-32A VEX5-32A VEX7-32A VEX9-32A VEX1-18-1A G27-10-01 G36-10-01 B F G Bracket (with bolt and washer) Air operated External pilot solenoid G46-10-01 VEX1-18-2A Pressure gauge (1) Note 1) When requring the gauge except mentioned above, specify the model number.

E-P HYREG ® Series VY1 1

G Description 04 06 10 02 03 04 02 03 04 VY110 0 1VY120 0 1VY130 0 1VY140 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 VY1D00-M5 VY1A0 0 1-M5 VY150 0 1VY1B0 0 1M 0 5 1 01 02 01 02 PPA B VEX9-32A VEX5-32A VEX7-32A VEX3-32A VEXA-18-2A VEX1-18-1A Bracket (With bolt, washer) AL F VEX1-18-2A VEXA-18-3A G27-10-R1-X207 G G46-10-01 G36-10-01 G27-10-01 Pressure gauge AN120-M5 AN120-M5 Pilot EXH port silencer