VQC

block, add 21mm.) n: Stations (maximum 24 stations) n L L1 L2 L3 L4 1 55.5 178 200 210.5 2 66 188.5 212.5 223 3 76.5 199 225 235.5 4 87 209.5 237.5 248 5 97.5 220 250 260.5 6 108 230.5 250 260.5 7 118.5 241 262.5 273 8 129 251.5 275 285.5 9 139.5 262 287.5 298 10 150 272.5 300 310.2 11 160.5 283 312.5 323 12 171 293.5 325 335.5 13 181.5 304 325 335.5 14 192 314.5 337.5 348 15 202.5 325 350

5 Port Solenoid Valve, Series VQC

: 8 One-touch fitting (mm) Formulas: L1 = 16n + 57, L2 = 16n + 102 n: Stations (maximum 16 stations) n L L1 L2 L3 L4 1 73 118 137.5 148 2 89 134 150 160.5 3 105 150 175 185.5 4 121 166 187.5 198 5 137 182 200 210.5 6 153 198 212.5 223 7 169 214 237.5 248 8 185 230 250 260.5 9 201 246 262.5 273 10 217 262 287.5 298 11 233 278 300 310.5 12 249 294 312.5 323 13 265 310 337.5 348 14 281 326 350

JXCx-OMT0002

Product Specifications 4.1 Basic Specifications Item Specifications Number of axes per controller Max. 4-axis Controlled motor Step motor (servo 24 VDC ) Encoder Incremental phase A / B (Encoder resolution 800 pulse / rotation) Main control power supply Power supply voltage: 24VDC+/-10% Max. current consumption: 350 mA Power supply specification Note1) Motor drive and motor control power

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

L8 L6 B4 L5 B6 B3 B8 B4 LM B6 B5 LM Note 1) For CM and LM, indicate in the specification table. Note 2) Inch sizes use the following symbols. VQ1000 N1: 1/8" N3: 5/32" N7: 1/4" N5T: 10-32UNF NM: Mixed Top ported elbows are LN and bottom ported elbows are BN.

DOC1023126

Applicable stroke table Stroke [mm] Size 30 50 100 150 200 250 300 350 400 450 500 Manufacturable stroke range 25 15 to 400 32 20 to 500 25 - .

Fine Lock Cylinder with Guide Series MLGC ø20, ø25, ø32, ø40 2

Part No. 25 350, 400, 450, 500 75, 100, 125, 150, (Band and screw are included.) 32 350, 400, 450, 500, 600 Ball bushing bearing MLGCL 200, 250, 300 Bore size (mm) Auto switch model D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 40 350, 400, 450, 500, 600, 700, 800 20 25 32 40 BMA2 -020 BA -01 BA -02 BA -32 BA -04 BM1 -01 BM1 -02 BM1 -32 BM1 -04 Intermediate strokes and short strokes other

Hydraulic

Hs 56 36 B Auto switch 49 A Reed switches D-B5, D-B6 Approx.

Table of Contents

Vacuum Equipment Precautions . 349 350 350 352 353 354 359 359 359 360 360 360 361 361 361 362 363 366 369 370 370 371 374 375 377 379 381 383 385 387 389 391 393 395 397 399 401 403 405 405 405 406 407 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 Vacuum Equipment

Card Motor

NC NC A9 A9 Main circuit Main circuit NC NC A10 A10 24 VDC power supply for the output signals 24 VDC power supply for the output signals DC2 (+) DC2 (+) B1 B1 DC2 () DC2 () B2 B2 Load BUSY BUSY B3 B3 Load Load ALARM ALARM B4 B4 Load Load OUT0 OUT0 B5 B5 Load Load OUT1 OUT1 B6 B6 Load NC NC B7 B7 Maximum output current 10 mA Maximum output current 10 mA NC NC B8 B8 NC NC B9 B9 NC NC B10

ZP

ZPT2-B5/B6 Adapter part no. ZPT3-B8/B01/N01/T01 Adapter part no. Width across flat 12 (Hexagon) A A Width across flat 8 (Hexagon) B 4 11 B 8 9 9 B 4.5 7.9 6.6 9.8 Dimensions A B Model ZPT3-B8 ZPT3-B01 ZPT3-N01 ZPT3-T01 Dimensions M8 x 1.25 Rc1/8 NPT1/8 NPTF1/8 3.5 6.2 6.9 6.9 A B Model ZPT2-B5 ZPT2-B6 M5 x 0.8 M6 x 1 5 6 ZPT2-B01/N01/T01 Adapter part no. ZPT4-B6/B8 Adapter part no.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

(Station 1) (Station n) 58.2 54.5 46.2 10.3 BN7: 10.6 B6: 13.1 (7.3) BN7: 7.7 B6: 10.2 40 1(P) 1(P) port port 1(P) port 7.5 4(A) 4(A) port port 4(A) port 3/5(E) port 2(B) port 4.7 BN7: 6.1 B6: 3.6 (7.7) BN7: 9 B6: 6.5 (16.3) 10 19.3 (7) 24 Plug-in Connector Type PC Wiring System with Power Supply Terminal Series SJ2000/3000 How to Order P Connector type manifold SS5J 3 60 D G U 05 DIN rail

Clamp Cylinder with Lock Series CLK1

D-G5NTL 75 + 50 (n-2) 15 75 30.5 38 43 50 A B 0 (1) 0.5 2 2 D-A3 D-G3, D-K3 100 + 100 (n-2) 35 + 30 (n-2) 35 100 D-B5, D-B6 33.5 23.5 25 25 Approx. Hs 25.5 (28.5) 38 43.5 50.5 D-A4 35 + 30 (n-2) 50 + 50 (n-2) 35 55 A B 0 2 3.5 3.5 D-G5NTL 27 25 26.5 26.5 Approx. Hs 33.5 38 43.5 50.5 A B 0 1.5 1.5 D-A3 D-G3, D-K3 23 24.5 24.5 Approx.

Compact Hydraulic Cylinder

BBA1 : D-F5, J5, A5, and A6 BBA3 : D-G5, K5, B5, and B6 Note 2) For details on BBA1 and BBA3, refer to page 296. When D-F5BAL, G5BAL switches are shipped mounted on a cylinder, the above stainless steel screws are used. Also, when switches are shipped separately, BBA1, BBA3 is included.

Made to Order

to 1000 Rc 1/4 104.5 19.5 75 65 30 192 108 20 9 86 69 187 323 M12 x 1.75 depth 23 350 to 1000 M12 x 1.75 depth 23 Rc 3/8 119.5 20.5 90 75 35 224 128 23 8.5 104 69 201 358 M14 x 2 depth 28 350 to 1000 Rc 3/8 150 23 102 95 40 262 143 33 10.5 128 87 249 431 M14 x 2 depth 30 350 to 1000 Rc 1/2 170 23 116 114 40 262 143 37.5 10.5 128 87 269 431 -X -X 1853 Made to Order Common Specifications:

SFOD-OMT0009CN

15 16 L (11) (30.7) 10.4 [820m] (a) (b) L E C P * A B-1 2 L 1 A A-1 6 B B-2 ) 8 8m 5 B A-2 ) 3 A 10m COM-A/COM B-3 4 COM-B/ A-3 ) B 15m (c) Shield ) C 20m Vcc B-4 12 GND A-4 13 ) A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 (14.2) (b) 2 1 (5.5) (14) (a) B A1 5 6 (17.7) 1 (c) 2 1 (18) A6 B6 (6.3) 15 16 L (11) (30.7) 82 No.SFOD-OMT0009CN-B 10.5 [5m ] L E C P *B* (a) (b) 2 A B-1 L

JXCx-OMU0026

A-3 Blue 4 (c) 5 5m Shield Cable color Terminal number Brown 12 Vcc B-4 Black 13 GND A-4 Red 7 A B-5 Cable type Black 6 A A-5 Orange 9 B B-6 Nil Robotic type cable B A-6 Black 8 (d) 3 Signal name Terminal number S Standard cable Red 4 Lock (+) B-1 Black 5 Lock (-) A-1 Sensor (+) B-3 Brown 1 Sensor (-) A-3 Blue 2 Actuator side Controller side (8) (a) (b) (14.2) B1 A1 2 1 (17.7) (14) (18) B6

JXCx-OMT0001CN

15 16 L (11) (30.7) 12.4 [820m] (a) (b) L E C P -* A B-1 2 L A A-1 1 B B-2 6 ) 8 8m B A-2 5 COM-A/COM B-3 3 ) A 10m COM-B/ A-3 4 ) B 15m (c) Shield ) C 20m Vcc B-4 12 GND A-4 13 A B-5 7 ) A A-5 6 () B B-6 9 B A-6 8 3 (14.2) (b) 2 1 (5.5) (14) (a) B1 A1 5 (17.7) 6 (c) 2 1 (18) A6 B6 (6.3) 16 15 L (11) (30.7) -82No.JXC-OMT0001CN-C 12.5 ([5m ] (a) (b) L E C P * B -* A B-1 2

SFOD-OMT0010

Cable length [L] A A-1 Red 1 B B-2 Orange 6 1 1.5m B A-2 Yellow 5 Green 3 COM-A/COM B-3 3 3m Blue 4 COM-B/ A-3 5 5m (c) Cable colour Terminal Shield number Vcc B-4 Brown 12 Cable type Black 13 GND A-4 Red 7 A B-5 Nil Robotic type cable Black 6 A A-5 Orange 9 S Standard cable B B-6 Black 8 B A-6 3 Actuator side Controller side (14.2) (b) 2 1 (8) (a) (14) B A1 (17.7) 6 5 1 (c) 2 1 (18) A6 B6

Multi-Axis Step Motor Controller

Actuator side (14) (18) A1 B1 (17.7) A 10*1 (13.5) B 15*1 A6 B6 1 2 C 20*1 Connector D (14.7) 15 16 Connector A (30.7) L (11) (10) *1 Produced upon receipt of order (Robotic cable only) Cable color Connector C terminal no. Brown 2 Red 1 Orange 6 Yellow 5 Green 3 Blue 4 Signal Connector A terminal no.

High Power Cylinder:

D-B5 D-B6 D-A3l D-A44 D-G39 D-K39 D-B59W D-C7 D-C8 D-H7l D-H7lW D-H7lF D-H7BAL D-B5/B6 D-B59W D-G5NTL D-A3l D-G39 D-K39 D-A44 D-C73C D-C80C Bore size (mm) A B A B A B A B A B A B A B HS HS HS HS HS 20 20.6 9 14.6 8.5 14.1 14 10.5 16.1 12.5 18.1 11.9 17.5 19.6 15 24.5 27.3 62 69.7 27 25 20.6 9 14.6 8.5 14.1 14 19.6 10.5 16.1 12.5 18.1 11.9 17.5 15 27 29.8 64.5 72.2 29.5 32 22.6 8.9 16.6 8.4