Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

ISO Cylinder

M9BV M9B V V V v v Connector H7C J79C V V V V 3-wire (NPN) 5 V, 12 V M9NWV M9NW M9NWV M9NW V V V v v IC circuit 3-wire (PNP) M9PWV M9PW M9PWV M9PW V V V v v 2-wire 12 V M9BWV M9BW M9BWV M9BW V V V v v Diagnostic indication (2-color indicator) Relay, PLC Yes 24 V 3-wire (NPN) 5 V, 12 V M9NAV1 M9NA1 M9NAV1 M9NA1 v v V v v IC circuit 3-wire (PNP) M9PAV1 M9PA1 M9PAV1 M9PA1 v v V

NCQ2/CQ2

Mass (g) Precautions Caution D-M9N(V) D-M9P(V) D-M9B(V) Auto switch model 0.5 8 8 7 1 14 13 Lead wire length (m) Do not fix the auto switch with screws other than the existing screw installed on the auto switch body.

Piping: G (Centralized Piping), Bore Size: 20mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 350mm

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 20, Stroke(mm): 350, Max.

Compact Cylinder

Auto switch model Load voltage Lead wire length (m) Indicator light (N) Applicable load Pre-wired connector Type Special function Electrical entry Wiring (Output) None 0.5 1 (M) 3 (L) 5 (Z) DC AC Perpendicular In-line (Nil) M9NV M9PV M9BV M9NWV M9PWV M9BWV M9NAV M9N M9P M9B M9NW M9PW M9BW M9NA IC circuit 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire

MHZ

Weight (g) End boss type (Symbol) Model H E M K MHZA2-6 28 28 28 28 MHZAJ2-6 29 29 29 29 12-2-24 24 Parallel Style Air Gripper Standard Type Series MHZ2 Size: 6, 10, 16, 20, 25, 32, 40 How to Order MHZ 6 MHZ2 D 6 M9B MHF MHL Number of auto switches Number of fingers 2 2 fingers Nil S 2 pcs. 1 pc.

MHZ

Weight (g) End boss type (Symbol) Model H E M K MHZA2-6 28 28 28 28 MHZAJ2-6 29 29 29 29 12-2-24 24 Parallel Style Air Gripper Standard Type Series MHZ2 Size: 6, 10, 16, 20, 25, 32, 40 How to Order MHZ 6 MHZ2 D 6 M9B MHF MHL Number of auto switches Number of fingers 2 2 fingers Nil S 2 pcs. 1 pc.

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

lightweight Compact design with higher allowable moment compared to MXY8/MXW8 Long stroke Long stroke MX MXY12Max. stroke 400 mm MTS Width mm Height Model Allowable moment Nm g Weight mm Width Magnetically coupled rodless cylinder Series variations MY Pitch, Yaw Roll Stroke Adjuster options Function options 30 25 MXY8-50 50 100 400 Bore size (mm) 0.7 times 610 420 13 5.7 49 47 CY 300 200 350

MK

MK-F020 MK-F025 MK-F032 MK-F040 MK-F050 MK-F063 Bore size (mm) 20 25 32 40 50 63 Accessory With boss in head side 2 3 5 7 13 25 With arm 100 100 200 200 350 350 13 32 Centering location ring Set pin Bolt for cylinder body Rear flange type (including mounting bolt) 133 153 166 198 345 531 Calculation: (Example) MKG20-10RFN Standard calculation: MKB20-10R 250 g 6 g 133 g 2 g 100 g 491

Parallel Style Air Gripper Series MHZ

-10D/MHZL2-10D MHZ2-32D MHZA2, MHZ2, MHZL2 250 Pressure 0.7 MPa 20 200 0.6 MPa Gripping force (N) Gripping force (N) Pressure 0.7 MPa 15 0.5 MPa 0.6 MPa 0.5 MPa 150 0.4 MPa 10 0.4 MPa 0.3 MPa 0.2 MPa 0.3 MPa 100 L MHZ 0.2 MPa 5 50 MHF 0 10 20 30 40 50 0 50 100 150 MHL Gripping point L (mm) Gripping point L (mm) MHZ2-16D/MHZL2-16D MHR MHZ2-40D 400 Pressure 0.7 MPa MHK Pressure 0.7 MPa 50 350

Smooth Cylinder

, 400, 450, 500 Replacement Parts: Seal Kits 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Kit No.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

, 400, 450, 500 Replacement Parts: Seal Kit 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

, 400, 450, 500 Replacement Parts: Seal Kit 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

MGP

5.99 6.85 7.70 8.55 50 MGPM50 3.36 4.00 4.73 5.37 6.01 6.65 7.29 7.93 9.54 10.8 12.1 13.4 63 MGPM63 4.18 4.94 5.78 6.54 7.29 8.05 8.80 9.56 11.4 12.9 14.4 15.9 80 MGPM80 6.49 7.43 8.67 9.61 10.5 11.5 12.4 13.4 15.8 17.7 19.5 21.4 100 MGPM100 10.5 11.9 13.6 14.9 16.3 17.6 18.9 20.2 23.6 26.2 28.9 31.5 (kg) MGPL12100/MGPA12100( (mm) (mm) 10 20 25 30 40 50 75 100 125 150 175 200 250 300 350

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100

350, 400, 450, 500, 600, 700, 800, 900, 1000 63 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100 80 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200 100 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200, 1300 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

How to Order MB Series ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Air Cylinder: Standard Type Double Acting, Single Rod

400, 450, 500 CA2 Up to 1800 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper -XC5 Heat resistant cylinder (10 to 110C) -XC6 Made of stainless steel*3 *4 Up to 2700 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CS1 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 -XC7 Tie-rod

Air Cylinder Double Acting, Single Rod JMB Series ø 32, ø 40, ø 45, ø 50, ø 56, ø 63, ø 67, ø 80, ø 85, ø 100

, 175, 200, 250, 300, 350, 400 400 67 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 400 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 500 85 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 500 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 500 Precautions Theoretical Output Be sure to read this before handling the products

Air Cylinder: Single Rod Series MB ø32, ø40, ø50, ø63, ø80, ø100, ø125

CS1 32 700 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 CS2 50 1000 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 Symbol Specifications -XA 63 1000 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 Change of rod end shape -XB5 Oversized rod cylinder 80

Air Cylinder

, 175, 200, 250, 300, 350, 400 400 67 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 400 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 500 85 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 500 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 500 Precautions Theoretical Output Be sure to read this before handling the products