Bearing Style: Ball Bush Bearing, Bore Size: 32mm, Thread: Rc, Stroke: 50mm, Auto Switch: Y7P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -

Bearing Style: Ball Bush Bearing, Bore Size: 25mm, Thread: Rc, Stroke: 50mm, Auto Switch: Y7P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -

Bearing Style: Slide Bearing, Bore Size: 25mm, Thread: Rc, Stroke: 50mm, Auto Switch: Y7P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -

Bearing Style: Slide Bearing, Bore Size: 40mm, Port Type: Rc (Or M5x0.8 for 16 Bore), Stroke: 50mm, A: Air Cushion, Auto Switch: Y7P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -

Bearing Style: Ball Bushing Bearing, Bore Size: 25mm, Port Type: Rc (Or M5x0.8 for 16 Bore), Stroke: 50mm, A: Air Cushion, Auto Switch: Y7P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -

Bearing Style: Ball Bushing Bearing, Bore Size: 40mm, Port Type: Rc (Or M5x0.8 for 16 Bore), Stroke: 50mm, A: Air Cushion, Auto Switch: Y7P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -

Bearing Style: Slide Bearing, Bore Size: 16mm, Port Type: Rc (Or M5x0.8 for 16 Bore), Stroke: 50mm, A: Air Cushion, Auto Switch: Y7P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -

Bearing Style: Slide Bearing, Bore Size: 20mm, Port Type: Rc (Or M5x0.8 for 16 Bore), Stroke: 50mm, A: Air Cushion, Auto Switch: Y7P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -

Bearing Style: Slide Bearing, Bore Size: 20mm, Port Type: NPT, Stroke: 50mm, A: Air Cushion, Auto Switch: Y7P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -

Bearing Style: Slide Bearing, Bore Size: 25mm, Port Type: NPT, Stroke: 50mm, A: Air Cushion, Auto Switch: Y7P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -

Bearing Style: Slide Bearing, Bore Size: 32mm, Port Type: Rc (Or M5x0.8 for 16 Bore), Stroke: 50mm, A: Air Cushion, Auto Switch: Y7P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -

Bore Size: 50mm, Port Type: NPT, Stroke: 50mm, Stroke Adjustment: 0 to 10, Auto Switch: Y7P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: 2 pcs. (Or None in the Case of No Switch), X Option: Adjustable Stroke, Extension Type, Speed Control Type: -, Applicable Tubing: -, Suffix: -

Bore Size: 16mm, Port Type: Rc (Or M5x0.8 for 12, 16 Bores), Stroke: 50mm, Stroke Adjustment: 0 to 10, Auto Switch: Y7P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: 2 pcs. (Or None in the Case of No Switch), X Option: Adjustable Stroke, Extension Type, Speed Control Type: -, Applicable Tubing: -, Suffix:

Table of Contents

Threaded type from 6A to 50A is standardized.

Pilot Operated

Description Size Option Stainless steel Option Stainless steel Brass (C37) Brass (C37) 15A to 25A 32A to 50A 15A to 25A 32A to 50A 15A to 25A 32A to 50A 15A to 50A 15A to 25A 32A to 50A 15A to 25A 15A to 25A 32A to 50A 10A to 50A 15A to 50A 15A to 50A 15A to 50A 15A to 50A 15A to 50A 15A to 50A 10A to 25A 32A to 50A 10A to 25A 32A to 50A 10A to 50A 32A to 50A 10A to 50A 10A to 25A 32A to

2

Do not use standard dew point 40C (symbol: L) type, standard dew point 60C (symbol: S) type and IDG30A, 50A, 30HA, 50HA for dehumidifying breathing air. Do not use only outlet air (dry air) in a closed room. 1. Consider the purge air flow rate. Find the purge air flow rate from the charts and calculate the required outlet air flow rate + purge air flow rate.

7

Q 200 VAC 9 50A N.C. S CAC408 50 50A Flange R 230 VAC G N.O.

2/3 Port Valve

Screw-in styles, 6A to 50A, are standardized.

Process Valve Series VNA

Threaded type from 6A to 50A is standardized.

5 Port Solenoid Valve

Port size Manifold pitch VVQ0-50A-C2 2 one-touch fitting VVQ0-50A-C3 3.2 one-touch fitting VVQ0-50A-C4 4 one-touch fitting 8.5 VVQ0-50A-N1 1/8" one-touch fitting VVQ0-50A-N3 5/32" one-touch fitting SS070-50A-20 2 barb fitting SS070-50A-32 3.2 barb fitting 7.5 SS070-50A-40 4 barb fitting Note) Purchasing order is available in units of 10 pieces.