Table of Contents

MI-A0801-10 MI-A0801-20 MI-A1201-10 MI-A1201-20 MI-A1201-30 MI-A2001-10 MI-A2001-20 MI-A2001-30 MI-A2501-30 MI-A2501-50 MI-A3201-30 MI-A3201-50 MI-A0802-10 MI-A0802-20 MI-A1202-10 MI-A1202-20 MI-A1202-30 MI-A2002-10 MI-A2002-20 MI-A2002-30 MI-A2502-30 MI-A2502-50 MI-A3202-30 MI-A3202-50 MI-A0803-10 MI-A0803-20 MI-A1203-10 MI-A1203-20 MI-A1203-30 MI-A2003-10 MI-A2003-20 MI-A2003-30 MI-A2503

ISO Cylinder

DA DA C0.5 R sphere DA 30 C 30 DA C A H C A H A H T W1 H Symbol: A19 Symbol: A18 Symbol: A17 Symbol: A16 DA AL MM 30 MM 30 MM 30 MM 30 H A H A H A A C H Symbol: A23 Symbol: A22 Symbol: A21 Symbol: A20 DA 30 30 L RD MM MM 30 DA MM 30 DB DB T A H A T C B A H A L K H W H Symbol: A27 Symbol: A26 Symbol: A25 Symbol: A24 DA 30 MM DA 30 MM MM MM AL H LB K A L A H AL H AL L K H Symbol: A30 Symbol

NCQ2/CQ2

Spring Extend C D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 x 55L C D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 Cylinder model Mounting bolt part no.

High Vacuum Angle Valve

None XLF16-30-1-2 XLF25-30-1-2 XLF40-30-1-2 XLF50-30-1-2 XLF63-30-1-2 XLF80-30-1-2 Yes XLF16A-30-1-2 XLF25A-30-1-2 XLF40A-30-1-2 XLF50A-30-1-2 XLF63A-30-1-2 XLF80A-30-1-2 XLF High temperature None XLF16-30-1H-2 XLF25-30-1H-2 XLF40-30-1H-2 XLF50-30-1H-2 XLF63-30-1H-2 XLF80-30-1H-2 Yes XLF16A-30-1H-2 XLF25A-30-1H-2 XLF40A-30-1H-2 XLF50A-30-1H-2 XLF63A-30-1H-2 XLF80A-30-1H-2 XLFV General use

NCG/CG1

30 31 35.5 43 43 D-C73C, D-C80C D-B5, D-B6 D-B59W Bore size (mm) B 28.5 28.5 29.5 32.5 40.5 40.5 Hs 24.5 27 30.5 35 40.5 47.5 A 30 30 31 35.5 43 43 B 28.5 28.5 29.5 32.5 40.5 40.5 B 22.5 22.5 23.5 26.5 34.5 34.5 B 25.5 25.5 26.5 29.5 37.5 37.5 Hs 27 29.5 33 37.5 43 50 A Hs 27 30 33.5 38 43.5 50.5 A 27 27 28 32.5 40 40 Hs 27.5 30 33.5 38 43.5 50.5 20 25 32 40 50 63 24 24 25 29.5 37 37 D-H7

Air Cylinder Series CM2

15 24 9 62 14 13 5 20 M8 x 1.25 M20 x 1.5 133 142 15.5 10.5 8 1 25 22 9 30 25 10 19 10 13 8 45 8 30 15 30 9 62 14 17 6 26 5.5 M26 x 1.5 137 146 M10 x 1.25 19.5 10.5 33.5 8 1 32 22 9 30 25 10 19 12 13 8 45 10 30 15 9 64 14 17 6 26 5.5 M26 x 1.5 139 148 M10 x 1.25 19.5 10.5 37.5 34.5 4 1 40 24 10 11 11 38 15 30 14 16 50 12 39 88 18 22 8 21 7 M32 x 2 32 M14 x 1.5 177 188 13.5 46.5 42.5 41.2

Compact Cylinder

D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 C Mounting bolt part no.

XM, XY

temperature XLA16A-30-1H XLA25A-30-1H XLA40A-30-1H XLA50A-30-1H XLA63A-30-1H XLA80A-30-1H XMC XYC General use XLC16-30-1 XLC25-30-1 XLC40-30-1 XLC50-30-1 XLC63-30-1 XLC80-30-1 High temperature XLC16-30-1H XLC25-30-1H XLC40-30-1H XLC50-30-1H XLC63-30-1H XLC80-30-1H XMD XYD XLD25-30-1 XLD40-30-1 XLD50-30-1 XLD63-30-1 XLD80-30-1 General use : Standard High temperature XLD25-30-1H XLD40-30-1H

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

35 F 30 25 Gripping force (N) Gripping force (N) 0.5 MPa 0.5 MPa 25 20 0.4 MPa 0.4 MPa 20 15 0.3 MPa 0.3 MPa 15 0.2 MPa 0.2 MPa 10 10 5 5 F F 0 0 5 5 20 25 30 35 10 15 10 15 20 25 30 35 Gripping point L (mm) Gripping point L (mm) Internal grip MHSH3-25D MHSH3-25D 70 70 60 60 Pressure 0.6 MPa 50 50 Gripping force (N) Gripping force (N) Pressure 0.6 MPa 0.5 MPa 40 40 0.5 MPa 0.4 MPa 30 30 0.4

Free Mount Cylinder Series CU

D 30 6 30 M9BW CDU With auto switch D Made to order Built-in magnet Refer to page 484 for the Made to Order specifications.

Smooth Cylinder/Low Speed Cylinder

30 31 30 34 30 30 38 37 71.5 81.5 38.5 38 73 69 81 69 30 30 31.5 31.5 30 30 42.5 33 34 34 38 34 34 42 42 76.5 86.5 42 42 78.5 77 86.5 77 34 34 35.5 35.5 34 34 46.5 37.5 41.5 41 41 41 44 41 41 49 49 83.5 93.5 46.5 47 85.5 91 93.5 91 41 41 43 43 41 41 52 43 50 49.5 49 49 52.5 49 49.5 56 57.5 92 102 53.5 53.5 94 107 102 107 49 49 51 51 49.5 49 58.5 51.5 58.5 56.5 56 56 61 56 56.5 65 68 102.5

Auto Switch Guide

30-27 D-F59/F5P/J59/J51 Grommet CX Tie-rod Terminal conduit D-G39C/K39C D-M9N/M9P/M9B D8-30-28 D-M9NV/M9PV/M9BV 8-30-29 D-F8N/F8P/F8B -X 8-30-31 D-F9G/F9H Direct Grommet D-Y59A/Y59B/Y7P 208-30-30 D-Y69A/Y69B /Y7PV 8-30-32 D-Y7G/7H Data D-M5N/M5P/M5B D-H7NW/H7PW/H7BW 8-30-33 Band Grommet D-G59W/G5PW/K59W 8-30-34 2-color indication D-F79W/F7PW/J79W 8-30-35 Solid State Switch Rail Grommet

Auto Switch Guide

30-27 D-F59/F5P/J59/J51 Grommet CX Tie-rod Terminal conduit D-G39C/K39C D-M9N/M9P/M9B D8-30-28 D-M9NV/M9PV/M9BV 8-30-29 D-F8N/F8P/F8B -X 8-30-31 D-F9G/F9H Direct Grommet D-Y59A/Y59B/Y7P 208-30-30 D-Y69A/Y69B /Y7PV 8-30-32 D-Y7G/7H Data D-M5N/M5P/M5B D-H7NW/H7PW/H7BW 8-30-33 Band Grommet D-G59W/G5PW/K59W 8-30-34 2-color indication D-F79W/F7PW/J79W 8-30-35 Solid State Switch Rail Grommet

Auto Switch Guide

30-27 D-F59/F5P/J59/J51 Grommet CX Tie-rod Terminal conduit D-G39C/K39C D-M9N/M9P/M9B D8-30-28 D-M9NV/M9PV/M9BV 8-30-29 D-F8N/F8P/F8B -X 8-30-31 D-F9G/F9H Direct Grommet D-Y59A/Y59B/Y7P 208-30-30 D-Y69A/Y69B /Y7PV 8-30-32 D-Y7G/7H Data D-M5N/M5P/M5B D-H7NW/H7PW/H7BW 8-30-33 Band Grommet D-G59W/G5PW/K59W 8-30-34 2-color indication D-F79W/F7PW/J79W 8-30-35 Solid State Switch Rail Grommet

Air Cylinder Series MB

60 + 30 (n 4) 2 (n = 4, 8, 12, 16) 65 + 30 (n 4) 2 (n = 4, 8, 12, 16) 70 + 30 (n 4) 2 (n = 4, 8, 12, 16) 75 + 30 (n 4) 2 (n = 4, 8, 12, 16) 85 + 30 (n 4) 2 (n = 4, 8, 12, 16) n 2 (Different surfaces) 2 (Same surface) 60 90 65 95 75 100 80 105 85 110 90 125 D-A3 D-G39 D-K39 65 + 30 (n 2) (n = 2, 4, 6, 8) 75 + 30 (n 2) (n = 2, 4, 6, 8) 80 + 30 (n 2) (n = 2, 4, 6, 8) 85 + 30 (n 2) (

Air Cylinder

M8 x 1.25 24 M20 x 1.5 1/8 9 62 14 133 142 25 22 19.5 17 9 30 25 10 19 10 26 0 0.033 13 10.5 8 45 6 33.5 5.5 8 30 M10 x 1.25 30 M26 x 1.5 1/8 9 62 14 137 146 32 22 19.5 17 9 30 25 10 19 12 26 0 0.033 13 10.5 8 45 6 37.5 5.5 10 30 M10 x 1.25 34.5 M26 x 1.5 1/8 9 64 14 139 148 40 24 21 22 10 38 41.2 15 30 14 32 0 0.039 16 13.5 11 50 8 46.5 7 12 39 M14 x 1.5 42.5 M32 x 2 1/4 11 88 18 177 188

MHZ

Required gripping force = 0.1 kg x 20 x 9.8 m/s2 () 19.6 N or more 0 10 20 30 40 50 60 Gripping point L (mm) Selecting MHZ2-16D. A gripping force of 24 N is obtained from the intersection point of gripping point distance L = 30 mm and pressure of 0.4 MPa.

MHZ

Gripping point L (mm) DMHZJ2-16D/11-MHZ2-16D 2050 Pressure 0.7 MPa Pressure 0.7 MPa Gripping force (N) 40 0.6 MPa 0.5 MPa 0.6 MPa 0.5 MPa 0.4 MPa 30 0.4 MPa 0.3 MPa 0.2 MPa 0.3 MPa 20 0.2 MPa 10 0 10 20 30 40 50 60 Gripping point L (mm) MHZJ2-20D/11-MHZ2-20D Pressure 0.7 MPa Pressure 0.7 MPa 60 0.6 MPa 0.6 MPa 50 Gripping force (N) 0.5 MPa 0.5 MPa 40 0.4 MPa 0.4 MPa 30 0.3 MPa 0.3 MPa 20

Electric Actuator/Slider Type

, 50, 100, 150, 200, 250, 300 30, 50, 100, 150, 200, 250, 300 30, 50, 100, 150, 200, 250, 300 Work load [kg] Horizontal Note 2) 18 50 50 30 60 60 30 60 60 Vertical 7 15 29 7 17 35 10 22 44 Pushing force lbf [N] Note 3) (Set value: 45 to 90%) Max. speed [mm/s] 900 450 225 1200 600 300 1000 500 250 Pushing speed [mm/s] Note 4) 35 or less 30 or less 30 or less Max. acceleration/deceleration

5

30 34 30 31 30 30 30 30 30 37.5 35 42.5 33 37 71.5 81.5 38.5 31.5 38 31.5 73 69 81 69 50 34 34 38 34 35 34 34 34 34 34 41.5 39 46.5 37.5 42 76.5 86.5 42 35.5 42 35.5 78.5 77 86.5 77 63 41 41 44 41 41.5 41 41 41 41 41 50 41 52 43 49 83.5 93.5 46.5 43 47 43 85.5 91 93.5 91 80 49.5 49 52.5 49 50 49 49.5 49 49.5 49 58 49 58.5 51.5 57.5 92 102 53.5 51 53.5 51 94 107 102 107 100 56.5 56 61 56