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JIS B 8361: General rules for hydraulic equipment. JIS B 9960-1: Safety of machinery Electrical equipment for machines. (Part 1: General requirements) JIS B 8433-1993: Manipulating industrial robots Safety. etc. *2) Labor Safety and Sanitation Law, etc. Caution Operator error could result in injury or equipment damage.

button dimensions b L M1 M2 Applicable tubing O.D.

VXF(A)26BA(B) VXF(A)26CA(B) VXF(A)26DA(B) VXF(A)27BA(B) VXF(A)28BA(B) Note) Spring is shipped together with the product, but not assembled. 10 Series VXF2 Dimensions: Direct piping type VXF21A<<B B D C D C J J K I K I R Q z 300 S z 300 Q R S L L E E U U 1/4 Exhaust port 1/4 Exhaust port H H F F G G 2 x P Port size 2 x P

Option Symbol and Composition Fluid Name and Option Option symbol Seal material Coil insulation type Body, Shading coil material Fluid (Application) Option symbol and body material Brass or BC6 Stainless steel Applicable valve 10A to 50A 10A to 25A F, B L, J B J Note 1) Standard A B C D E F G H J K L N P Q S T NBR FKM Ethyl alcohol Ethylene glycol Caustic soda (25% ) Gas oil Silicon oil

3 A-y A-u A-i A-y B-q B-w B-e B-r B-w B-t B-y B-t Orifice body PTFE seal O-ring Sleeve O-ring O-ring O-ring Name plate O-ring O-ring Orifice body Name plate O-ring O-ring O-ring O-ring Orifice O-ring O-ring Name plate O-ring O-ring O-ring O-ring PEEK resin Special PTFE Special FKM POM Special FKM Special FKM Special FKM Special FKM Special FKM PEEK resin Special FKM Special FKM HNBR Special

If B is turned ON in 2. state, the output is turned OFF. If either A or B is turned ON, cylinder is actuated.

Then the pressure in the pressure action chamber B falls to open the main valve C. When the coil o is not energized, the pilot valve A is closed and the pressure in the pressure action chamber B rises and the main valve C closes.

Analog Output Flow/Analog output Output A B C Voltage output 1 V 1.1 V 5 V Current output 4 mA 4.4 mA 20 mA C Model Rated flow [L/min] Minimum Maximum LFE1 0.5 20 LFE2 2.5 100 LFE3 5 200 B A Outside the range 0 Min.

Note 3) Surface treatment No. 2D applies to the external surface of the vessel. (Scratches, scrapes, blotches and uneven color may be present as long as they do not interfere with function or performance.) The symbol refers to surface finishing of JIS G 4305 cold rolled stainless steel sheet. 47 B

60534-1:2005 IEC 60534-2-3:1997 JIS B 2005-1:2012 JIS B 2005-2-3:2004 Equipment: JIS B 8471, 8472, 8473 Cv Process fluid control equipment 2.

the flow rate ratio to be b = 0.3.

When P2 + 0.1 b, choked flow P1 + 0.1 293 Q = 600 x C (P1 + 0.1) (1) 273 + t When P2 + 0.1 > b, subsonic flow P1 + 0.1 2 P2 + 0.1 b P1 + 0.1 Q = 600 x C (P1 + 0.1) 1 (2) 1 b 293 273 + t Q : Air flow rate [dm3/min (ANR)], dm3 (Cubic decimeter) of SI unit are also allowed to described by l (liter). 1 dm3 = 1 l .

AREA A position 2 The AREA signal is output commonly for the ranges set for both the AREA A and AREA B. AREA B Set as AREA 1 AREA 2. position 1 AREA B position 2 48 - Data (Saved data) Data is sent as hexadecimal numbers.

Position 2 The AREA signal is output for both the AREA A and AREA B set configuration. AREA B Set as AREA 1AREA 2. Position 1 AREA B Position 2 21 (2) Step Data Save Command "EU" Details Use after executing Step Data setting comand "EE".

(process data) a: Inclination b: Intercept [Inclination and intercept to the unit specification] Series Unit Flow range Inclination a Intercept b 1000 L 0.25 0 L/min 2000 L 0.50 0 PF3A7#H 1000 L 0.0088275 0 cfm 2000 L 0.0176575 0 [Calculation example] (1) Conversion from the process data to the flow measurement value (For PF3A701H series, unit L/min, flow range 1000 L and PD = 2800) Pr =

(Part1:General requirements) ISO 10218-1992:Manipulating industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1:-((1 :) JIS B 8433-1993: 2) : : : 1 2. 3. 1. 2. 3. 4. 2 No.LFE*-OMY0008 / 1 1.5 3 3) 1 1 () [] 3 No.LFE*-OMY0008 () () () () 4 No.LFE*-OMY0008 () * (100 20 ) () <> 2MPa 5 No.LFE*-OMY0008 * (1623 ) FG (49N ) () M12 IN IN OUT OUT OUT OUT () 6 No.LFE

When used in stopper application mounting hole, diameter should be 2d or more = E b o I il Cro.z Compact Guide Cylinder:Series MGQ Permissible lateral load (Ordinary-use load) F + 12 t6 ' i 4 : : : 49 25 51 F t 108 A6 104 176 3 3 206 686 343 80. : . l ' s s i 1070 lN=OlO2kql r(N.m) Bore size Modd to 20 r 3 B ' .50 75 .t( P , 0.29 o.24 o.21 0.18 0.16 0.48 o.39 0.31 o.37 0.33 -^ I McoM 0.51

When used in stopper application mounting hole, diameter should be 2d or more = E b o I il Cro.z Compact Guide Cylinder:Series MGQ Permissible lateral load (Ordinary-use load) F + 12 t6 ' i 4 : : : 49 25 51 F t 108 A6 104 176 3 3 206 686 343 80. : . l ' s s i 1070 lN=OlO2kql r(N.m) Bore size Modd to 20 r 3 B ' .50 75 .t( P , 0.29 o.24 o.21 0.18 0.16 0.48 o.39 0.31 o.37 0.33 -^ I McoM 0.51