CQ2

X 175 l -100DC Construction -100DC X 190 l X 200 l Double acting/Single rod Rod end male thread Component Parts Replacement Parts: Seal Kits Bore size (mm) Kit No.

Table of Contents

Connection port location Rotating angle Nil E Side ported Axial ported Classification Symbol Single vane Double vane 90 100 90 180 270 100 190 280 90 180 270 100 190 280 Standard Bolt Option Vane type S D Single vane Double vane A port B port B port A port Side ported Axial ported Body end of the short-shaft side Applicable Auto Switch/Refer to page 11-11-1 for detailed auto switch switches

Bag Filter FGF Series

x L440 1800 cm2 190 x L770 3400 cm2 190 x L440 5400 cm2 190 x L770 10200 cm2 190 x L440 9000 cm2 190 x L770 17000 cm2 Note 4) For the FGF1 series, this indicates cases where the with pressure gauge option has been selected.

4/5 Port Solenoid Valve

Station n L1 L2 Station 2 78 50 Station 20 438 410 3 98 70 4 118 90 5 138 110 6 158 130 7 178 150 8 198 170 9 218 190 10 238 210 11 258 230 12 278 250 13 298 270 14 318 290 15 338 310 16 358 330 17 378 350 18 398 370 19 418 390 65 Series SYJ7000 Type 42: Side Ported/SS5YJ7-42Stations C6,N7 C8,N9 [ ]: AC Grommet (G) 122 [126.4] Approx. 300 (Lead wire length) Manual override L1 14 L2 4-4.5

Compact Cylinder

229 80 88 96 64 72 100 50 40 30 50 117 129 141 153 166 178 190 202 214 300 361 80 63 153 165 177 190 202 214 226 239 251 337 398 20 80 270 289 308 327 347 366 385 404 423 557 653 63 100 1038 487 515 543 570 598 625 653 681 708 901 10 50 40 32 (g) Mass of Cylinder Movable Parts/With Built-in Magnet 5.0 4.0 3.0 25 Bore size (mm) 5 Cylinder stroke (mm) 20 16 10 15 20 25 30 35 40 45 50 75

Rotary Cylinder Series MRQ

Size of linear motion parts Output of rotary motion parts (at 0.5 MPa) Rotating angle Linear motion stroke (mm) 5 10 15 20 25 30 40 50 75 100 80 to 100 32 1.02 Nm 170 to 190 80 to 100 40 1.91 Nm 170 to 190 A connecting port can be selected from two positions that are available on the rotation unit.

ISO Cylinder

50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 8 46 (52) 64 (70) 76 (82) 86 (92) 10 46 (50) 64 (68) 76 (80) 86 (90) 12 50 (53.5) 75 (78.5) 91 (94.5) 105 (108.5) 16 56 (59.5) 71.5 (75) 87 (90.5) 82 (85.5) 97.5 (101) 113 (116.5) 98 (101.5) 113.5 (117) 129 (132.5) 111 (114.5) 126.5 (130) 142 (145.5) 20 62 112 137 95 145 170 115 165 190

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Connection port location Rotating angle Nil E Side ported Axial ported Classification Symbol Single vane Double vane 90 100 90 180 270 100 190 280 90 180 270 100 190 280 Standard Bolt Option Vane type S D Single vane Double vane A port B port B port A port Side ported Axial ported Body end of the short-shaft side Applicable Auto Switch/Refer to page 11-11-1 for detailed auto switch switches

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Connection port location Rotating angle Nil E Side ported Axial ported Classification Symbol Single vane Double vane 90 100 90 180 270 100 190 280 90 180 270 100 190 280 Standard Bolt Option Vane type S D Single vane Double vane A port B port B port A port Side ported Axial ported Body end of the short-shaft side Applicable Auto Switch/Refer to page 11-11-1 for detailed auto switch switches

mb1

190 238 238 9 9 10.5 10.5 12.5 12.5 42 42 53 53 73 73 MB-B03 MB-B05 11 11 MB-B08 Rotating Angle Method for longitudinal mounting of clevis pivot bracket When there is no air cushion, the unit is equipped with rubber bumpers.

CS1

Refer to p.1.10-8 for auto switch min. mountable stroke. 0.17 Stroke 390 534 175 357 55 190 372 248 115 263 In case of rod boot style, min. stroke is 30mm or more. (In case of rod boot style of bore size 160 and 300, min. stroke is 35mm or more.)

MB1

190 238 238 9 9 10.5 10.5 12.5 12.5 42 42 53 53 73 73 MB-B03 MB-B05 MB-B08 Rotation Bore size (mm) A Method for longitudinal mounting of clevis bracket When there is no air cushion, the unit is equipped with rubber bumpers.

SY

Refer to page 190 for details.

Square Tube Type Air Cylinder Series MB1

190 238 238 9 9 10.5 10.5 12.5 12.5 42 42 53 53 73 73 MB-B03 MB-B05 MB-B08 Rotation Bore size (mm) A Method for longitudinal mounting of clevis bracket When there is no air cushion, the unit is equipped with rubber bumpers.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

190 190 190 1 2 3 7 Operating angle m: Converts the operating range (Lm) of the auto switch into the rotation angle Angle of hysteresis: The hysteresis of the auto switch is converted to degrees.

Aluminum High Vacuum Angle Valve

0 2-1 o 0.2 153 188 q 190 138 O-ring Part No.

Rotary Cylinder Series MRQ Size: 32, 40 1

Size of linear motion parts Output of rotary motion parts (at 0.5 MPa) Linear motion stroke (mm) Rotating angle 100 30 75 5 10 15 20 25 40 50 80 to 100 32 1.02 Nm 170 to 190 80 to 100 1.91 Nm 40 170 to 190 A connecting port can be selected from two positions that are available on the rotation unit.

70astamb1

190 238 238 9 9 10.5 10.5 12.5 12.5 42 42 53 53 73 73 MB-B03 MB-B05 11 11 MB-B08 Rotating Angle Method for longitudinal mounting of clevis pivot bracket When there is no air cushion, the unit is equipped with rubber bumpers.

Rotary Table

less 31 49 37 5 or less 20 190 35 62 50 10 or less 39 66 33 5 or less 30 190 39 68 43 10 or less 43 72 29 5 or less 50 190 49 83 33 10 or less 53 87 22 5 or less 70 190 54 95 30 10 or less 58 99 21 5 or less 100 190 61 108 27 10 or less 65 112 18 5 or less 200 190 81 139 21 10 or less 85 143 15 5 or less Operating range m: Value of the operating range Lm of a single auto switch converted

CM2

194 206 219 244 46 19 Boss-cut With air cushion Built-in One-touch fitting (mm) Bore WA G With gaiter ZZ Bore WB P N1 Q Bore Without gaiter 17.5 13 8 8.5 6 23 20 20 1 to 50 17.5 13 8 10.5 6 26 25 25 51 to 100 101 to 150 151 to 200 201 to 300 20 130 143 155 168 193 103 17.5 13 8 11.5 6 28.5 32 32 25 134 147 159 172 197 107 21.5 16 11 15 8 32.5 40 40 32 136 149 161 174 199 109 40 165 178 190