Table of Contents

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

Smooth Cylinder/Low Speed Cylinder

Cylinder model C D 50 55 60 65 70 75 35 40 45 50 55 60 65 70 75 80 D 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 Mounting bolt part no.

LX

(5.1) 4 5.5 10 5.8 36 10.5 1 0.2 6.5 6.5 1 3 39 28 3.3 T-slot A +0.030 0 depth 4 C +0.030 0 depth 4 L-M6 4H9 Body mounting reference plane Work piece mounting reference plane T-slot A dimension T-slot B dimension 6.5 Refer to Cross section C-C. 27.5 T-slot B 4H9 Cross section C-C Model D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3

LX

(5.1) 4 5.5 10 5.8 36 10.5 1 0.2 6.5 6.5 1 3 39 28 3.3 T-slot A +0.030 0 depth 4 C +0.030 0 depth 4 L-M6 4H9 Body mounting reference plane Work piece mounting reference plane T-slot A dimension T-slot B dimension 6.5 Refer to Cross section C-C. 27.5 T-slot B 4H9 Cross section C-C Model D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3

Table of Contents

T-slot A dimension T-slot B dimension 6.5 T-slot B 27.5 4H9 Cross section C-C D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model LXSH2BD-50 LXSH2BD-75 LXSH2BD-100 LXSH2BD-125 LXSH2BD-150 Refer to page 301 for mounting.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt D 45 50 55 60 65 70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 130 155 Model C D 40 45 50 55 60 65 45 50 55 60 65 70 45 50 55 60 65 70 75 80 85 90 45 50 55 60 65 70 75 80 85 90 Model C Model C D 65 70 75 80 85 90 95 100 105 130 155 70 75 80 85 90 95 100 105 110 135 160 80 85 90 95 100 105 110 115 120 145 170 Bolt CDQ2WB32-5D -10D

5

Auto switch model Bore size (mm) 20 25 32 40 D-M9(V) D-M9W(V) D-A9(V) BM5-020 (A set of a, b, c, d) BM5-025 (A set of a, b, c, d) BM5-032 (A set of a, b, c, d) BM5-040 (A set of a, b, c, d) REA D-M9A(V) BM5-020S (A set of b, c, d, e) BM5-025S (A set of b, c, d, e) BM5-032S (A set of b, c, d, e) BM5-040S (A set of b, c, d, e) REB Switch bracket (Resin) Transparent (Nylon) Note 1) Auto switch

Made to Order

(C) (C) (C) (C) (C) (C) Cushion valve CL1 1.

Vacuum Pad

A B D C A B D C A B D Dimensions Dimensions Dimensions Model A B C D E Model A B C D E Model A B C D E ZPT40HB 25-A18 ZPT40HB 50-A18 ZPT40HB 75-A18 ZPT50HB 25-A18 ZPT50HB 50-A18 ZPT50HB 75-A18 ZPT63HB 25-A18 ZPT63HB 50-A18 ZPT63HB 75-A18 ZPT80HB 25-A18 ZPT80HB 50-A18 ZPT80HB 75-A18 ZPT100HB 25-A22 ZPT100HB 50-A22 ZPT100HB 75-A22 ZPT100HB 100-A22 ZPT125HB 25-A22 ZPT125HB 50-A22 ZPT125HB 75

Vacuum Pad

A B D C A B D C A B D Dimensions Dimensions Dimensions Model A B C D E Model A B C D E Model A B C D E ZPT40HB 25-A18 ZPT40HB 50-A18 ZPT40HB 75-A18 ZPT50HB 25-A18 ZPT50HB 50-A18 ZPT50HB 75-A18 ZPT63HB 25-A18 ZPT63HB 50-A18 ZPT63HB 75-A18 ZPT80HB 25-A18 ZPT80HB 50-A18 ZPT80HB 75-A18 ZPT100HB 25-A22 ZPT100HB 50-A22 ZPT100HB 75-A22 ZPT100HB 100-A22 ZPT125HB 25-A22 ZPT125HB 50-A22 ZPT125HB 75

Vacuum Pad

A B D C A B D C A B D Dimensions Dimensions Dimensions Model A B C D E Model A B C D E Model A B C D E ZPT40HB 25-A18 ZPT40HB 50-A18 ZPT40HB 75-A18 ZPT50HB 25-A18 ZPT50HB 50-A18 ZPT50HB 75-A18 ZPT63HB 25-A18 ZPT63HB 50-A18 ZPT63HB 75-A18 ZPT80HB 25-A18 ZPT80HB 50-A18 ZPT80HB 75-A18 ZPT100HB 25-A22 ZPT100HB 50-A22 ZPT100HB 75-A22 ZPT100HB 100-A22 ZPT125HB 25-A22 ZPT125HB 50-A22 ZPT125HB 75

Vacuum Pad

A B D C A B D C A B D Dimensions Dimensions Dimensions Model A B C D E Model A B C D E Model A B C D E ZPT40HB 25-A18 ZPT40HB 50-A18 ZPT40HB 75-A18 ZPT50HB 25-A18 ZPT50HB 50-A18 ZPT50HB 75-A18 ZPT63HB 25-A18 ZPT63HB 50-A18 ZPT63HB 75-A18 ZPT80HB 25-A18 ZPT80HB 50-A18 ZPT80HB 75-A18 ZPT100HB 25-A22 ZPT100HB 50-A22 ZPT100HB 75-A22 ZPT100HB 100-A22 ZPT125HB 25-A22 ZPT125HB 50-A22 ZPT125HB 75

Hydraulic

Mounting bolt Mounting bolt diagram C D D Model C Mounting bolt Model C D Mounting bolt M5 x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l M8 x 95l x 100l x 105l x 110l x 115l x 120l x 125l x 130l x 135l x 160l x 185l 5D (M) CHQB63 10D (M) CH QB20 55 60 65 70 75 80 85 90 95 100 70 75 80 85 90 95 100 105 110 115 140 165 75 80 85 90 95 100 105 110 115 120 145 170 90 95 100 105

Air Slide Table

Load [N] (Plate size: t = 8) Lr = 90 mm MXQ12( )-Z, MXQ8B-Z A C MXQ12( )-Z, MXQ8B-Z A C MXQ12( )-Z, MXQ8B-Z A C 0.012 0.200 0.007 ST 100 ST 100 0.006 0.010 Table displacement [mm] Table displacement [mm] Table displacement [mm] ST 10 to 30 ST 40, 50 0.150 0.005 0.008 ST 50, 75 0.004 ST 75, 100 ST 75 0.006 0.100 ST 30, 40 0.003 0.004 0.002 0.050 ST 100 ST 40, 50 ST 10 to 30 ST 10, 20 0.002

Air Cylinder

Return: Double Clevis (D) Stroke CJ2D 10 16 SZ CDH9+0.030 0 Piping port M5 x 0.8 GB NB CJ1 Clevis pin (cdd90.030 0.060) MM Rod end nut C C CJP D CZ 0 0.3 B 0 0.3 CJ2 CJ2 ZZ + Stroke Z + Stroke S + Stroke H A NA CX+0.2 +0.1 B 0 0.3 JCM U U CZ 0 0.3 R R CM2 CM3 CG1 [mm] Bore size A B C CD (cd) CX CZ D GB H MM NA NB R U S 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st 61 to 75 st 76 to 100

Air Cylinder Series CM2

CD-S02 CD-S03 20, 25 32, 40 8 19.5 0.9 1.6 24.5 7.6 Type C 8 for axis B 10 29 1.15 1.35 34 9.6 Type C 10 for axis C D d Applicable bore size d H C B D Part no.

Air Cylinder Series MB

75 75 75 75 75 60 54 36 23 12.5 12.5 12.5 12.5 12.5 12.5 10 136 144 152 152 164 164 170 56 41 23 64 51 25 64 51 25 68 56 29 76 61 29 82 75 27 Standard Type: With Mounting Bracket Dimensions not shown are the same as basic style.

2 Phase Stepper Motor/Without Motor Brake Series LXS

N x P (52) 28 20 U N (M6 x 1) C (5.1) 1 0.2 5 T-slot A 36: T-slot pitch 39 36 28 Body mounting reference plane 4H9 +0.030 0 6.5 27.5 C Work piece mounting reference plane Refer to Cross section C-C. depth 4 4H9 +0.030 0 L-M6 x 1 Depth 4 T-slot B (mm) Cross section C-C 10 4 5.5 D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6

Air Cylinder

(mm) Auto switch model Bore size (mm) 20 25 32 40 D-M9l(V) D-M9lW(V) D-A9l(V) Auto switch model Bore size 20 25 32 40 D-A9l(V) 6 6 6 6 BM5-020 (A set of a, b, c, d) BM5-025 (A set of a, b, c, d) BM5-032 (A set of a, b, c, d) BM5-040 (A set of a, b, c, d) D-M9l(V) D-M9lW(V) D-M9lA(V) 3 3 4 3.5 D-M9lA(V) Note 2) BM5-020S (A set of b, c, d, e) BM5-025S (A set of b, c, d, e) BM5-032S (A set of

CV/MVGQ

C J G5-S Standard Stroke CV Bore size (mm) Standard stroke (mm) Symbol Specifications 40 25, 50, 75, 100, 125, 150, 200, 250, 300, 350, 400, 450, 500 -XA Change of rod end shape MVGQ 50, 63 25, 50, 75, 100, 125, 150, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper 80, 100 25, 50, 75, 100, 125, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700 Piston rod and rod end nut