Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Floating Joint Center of sphere M M U U D H G B F P C E R A (mm) Max. operating tension and compression N Center of sphere R Model Max. screw-in depth P Allowable eccentricity U M A Applicable bore size Weight (kg) B C D E F G H Nominal size Pitch Compression Tension JB40-8-125 JB63-10-150 JB80-16-200 JB100-20-250 JB140-22-250 20, 25 32 40 50, 63 80 8 10 16 20 22 29 35.5 47.5 59 71.5 1.25

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

225 48 200 213 4 175 188 15 150 163 313 125 138 288 23 100 113 263 36 75 100 238 54 12.5 37.5 50 88 75 250 225 54 200 213 4 175 188 17 150 163 313 125 138 288 23 100 113 263 36 75 100 238 54 12.5 25 37.5 50 88 87 250 225 69 200 225 5 175 200 24 150 175 325 125 150 300 25 100 125 275 51 75 112 250 64 12.5 25 37.5 50 100 87 250 225 69 200 225 5 175 200 24 150 175 325 125 150 300 25 100 125

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

C DH7 EN 0 0.1 ER (Max.)

JIS Standard Hydraulic Cylinder

115 58 27 40 M10 x 1.25 11 43 150 30 46 145 1/2 13 15 52 76 85 0.15 63 25 to 800 18 15 132 65 27 42 M12 x 1.5 14 43 156 35 165 52 1/2 15 63 15 98 90 0.2 80 25 to 1000 18 18 155 87 22 40 M16 x 1.5 16 44 166 35 65 190 3/4 18 17 80 110 118 0.18 0.23 0.3 100 25 to 1000 22 20 190 109 22 42 M18 x 1.5 18 44 172 75 40 230 3/4 19 20 135 102 150 (mm) Rod series B-series rod Bore size (mm) C-series

XM, XY

80/In-line type C D G Fd XLA C XL (K flange) XLQ XM XY XM XY B DH J XSA K XVD 45 XGT CYV A Fn (KF flange) E M (mm) Model A 121 148 177 B 80 100 117 C 31 39 45.5 D 53 61 80 E 75 87 114 Fn 95 110 Fd 52 70 83 G 104 126 150 H J K M XYC-50 XYC-63 XYC-80 178 209 268 29 36 44 10.5 9 9 78 99 116 487 Stainless steel High Vacuum Angle/In-line Valve 2 Stage Control, Single Acting/Bellows, O-ring Seal

Air Cylinder Series CS1

surfaces Same surface 35 100 110 150 2 110 + 30(n2) (n = 2, 4, 6, 8 ) 150 + 100(n2) (n = 2, 4, 6, 8 ) D-A3 D-G39 D-K39 35 + 30(n2) Different surfaces n 110 + 100(n2) (n = 2, 4, 6, 8 ) 150 + 30(n2) (n = 2, 4, 6, 8 ) Same surface 100 + 100(n2) 1 110 150 15 35 55 Different surfaces Same surface 150 110 2 150 + 30(n2) (n = 2, 4, 6, 8 ) 110 + 30(n2) (n = 2, 4, 6, 8 ) 35 + 30(n2) Different surfaces

Rotary Clamp Cylinders

Auto switch mounting surface Bore size (mm) 20, 25 32, 40, 50 63 Port side Port side Port side C A C A C A B B B Auto switch mounting surface Auto switch mounting surface Auto switch mounting surface Auto switch model A, B, C side Port side A, B, C side Port, A, B, C side qBQ-2 wBQ2-012 Two types of auto switch mounting bracket are used as a set.

Rotary Actuator/Vane Type

Clockwise CRQ2 Stopper ring Block C Hatched area represents a stopper lever.

CJ2X/CUX/CQSX/CQ2X/CM2X

C J G5-S CV Maintenance Snap Ring Installation/Removal Caution Caution MVGQ 1. For installation and removal, use an appropriate pair of pliers (tool for installing a type C snap ring). 2.

Air Slide Table Series MXS

Solid State Auto Switch: D-M9B, D-M9N, D-M9P, D-M9BW, D-M9NW, D-M9PW Stroke B Stroke E Model A 40 50 150 10 20 30 40 75 100 125 150 10 20 30 125 75 100 50 B MXS6 -0.4 -0.4 -0.4 11.6 17.5 9.6 9.6 9.6 21.6 27.6 10 MXS8 4.9 -0.1 0.9 8.9 16.9 41.9 14.9 9.9 10.9 18.9 51.9 26.9 11.6 MXS12 32.4 22.4 12.4 14.4 45.4 74.4 24.4 22.4 12.4 2.4 4.4 14.4 35.4 64.4 15.6 MXS16 32.7 22.7 12.7 12.7 42.7

CJ2X/CUX/CQSX/CQ2X/CM2X

C J G5-S CV Maintenance Snap Ring Installation/Removal Caution Caution MVGQ 1. For installation and removal, use an appropriate pair of pliers (tool for installing a type C snap ring). 2.

CJ2X/CUX/CQSX/CQ2X/CM2X

C J G5-S CV Maintenance Snap Ring Installation/Removal Caution Caution MVGQ 1. For installation and removal, use an appropriate pair of pliers (tool for installing a type C snap ring). 2.

Cylinder with Lock Series CLS

150 Same surface 110 + 30 (n2) (n = 2, 4, 6, 8) 150 + 30 (n2) (n = 2, 4, 6, 8) 35 + 30 (n2) Different surfaces D-A44 110 + 50 (n2) (n = 2, 4, 6, 8) 150 + 50 (n2) (n = 2, 4, 6, 8) 55 + 55 (n2) Same surface 15 1 pc. 110 150 2 pcs.

ISO Standard Hydraulic Cylinder

C Applicable Auto Switches/Refer to pages 431 to 490 for further details on each auto switch.

Environment

20: LEY63A Motorless 50 LAT 0 0 200 400 600 800 1200 1000 Speed [mm/s] LZ Allowable Stroke Speed [mm/s] LC3F2 Model AC servo motor Lead Stroke [mm] Symbol [mm] 30 50 100 150 200 250 300 350 400 450 500 600 700 800 A 12 900 600 B 6 450 300 C 3 225 150 LEY25 Motor mounting position: Top/Parallel, In-line 100 W /40 (Motor rotation speed) (4500 rpm) (3000 rpm) A 20 1200 800 B 10 600 400 C

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

MGZ Floating Joint MGT Center of sphere M M U U D H G B F P C E R A (mm) DMax. operating tension and compression N Center of sphere R Model Max. screw-in depth P Allowable eccentricity U M A Applicable bore size Mass (kg) B C D E F G H Nominal size Pitch Compression Tension -X JB40-8-125 JB63-10-150 JB80-16-200 JB100-20-250 JB140-22-250 20, 25 32 40 50, 63 80 8 10 16 20 22 1.25 1.5 2 2.5

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

150 100 50 200 250 Load (N) 150 100 100 400 500 Load (N) 300 200 8-8-10 10 Precision Air Slide Table Series MXP Table Accuracy Traveling parallelism C C side parallelism to A side D M D side parallelism to B side B W A Port C MX M MTS B Distance from 0 of gauge dial when guide block is moved to full stroke after body is fixed on a base.

2

with product) Connected to VBA20A, 40A Connected to VBA22A, 42A Tank IN port Rc 1/2 Booster regulator IN port C Booster regulator IN port C Spare port Rc 1/2 Spare port Rc 1/2 EXH: C EXH: C Tank OUT port Rc 3/4 (A) (A) (B) (B) OUT OUT 355 252 252 205 4 x 13 50 50 Drain port Rc 1/4 Drain valve 150 150 500 250 250 851 Booster regulator model A B C D VBA20A 531 444 Rc 3/8 VBA40A 570 479.8

Cylinder with Lock

C DH7 E EN 0 0.1 ER (Max.)