Process Pump Series PA3000/5000/PAX1000 Series PB1000

Since the marked point is below the curve for 50l/min (ANR), the maximum rate will be about 50l/min (ANR).

Digital Flow Switches, Series PF2A, Series PF2W

SET MODE SD SG RD RS-232C COM S.STOP OUT1OUT2OUT3OUT4OUT5 AC100~240V Pulse counter M/C Flow control for each branch line For Air P.2 50l/min 10l/min 500l/min 200l/min 100l/min 12000l/min 6000l/min 3000l/min Flow rate measurement range l/min Integrated display type Remote type Output specifications Port size (Rc, NPT, G) 1/8 1/4 3/8 1/2 11/2 1 2 Switch output Analog output Accumulated pulse

Slider Type Ball Screw Drive/11-LEFS Series

[mm] Dimensions Model L A B n D E Without lock With lock 11-LEFS32l-50l 332 384 56 180 4 11-LEFS32l-100l 382 434 106 230 4 11-LEFS32l-150l 432 484 156 280 4 11-LEFS32l-200l 482 534 206 330 6 2 300 11-LEFS32l-250l 532 584 256 380 6 2 300 11-LEFS32l-300l 582 634 306 430 6 2 300 11-LEFS32l-350l 632 684 356 480 8 3 450 11-LEFS32l-400l 682 734 406 530 8 3 450 11-LEFS32l-450l 732 784 456

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Model L A B n D E F LEFS25lll-50l 210.5 56 160 4 20 LEFS25lll-100l 260.5 106 210 4 LEFS25lll-150l 310.5 156 260 4 LEFS25lll-200l 360.5 206 310 6 2 240 LEFS25lll-250l 410.5 256 360 6 2 240 LEFS25lll-300l 460.5 306 410 8 3 360 LEFS25lll-350l 510.5 356 460 8 3 360 LEFS25lll-400l 560.5 406 510 8 3 360 LEFS25lll-450l 610.5 456 560 10 4 480 LEFS25lll-500l 660.5 506 610 10 4 480 LEFS25lll-

Mounting: B (Direct Mount Rod Side Tapped), Bore Size: 20mm equiv., Stroke: 50mm, Connector: w/Connector, Sensor Cable Length: 0.5m, Auto Switch: A93V--Reed, DC Volt, AC Volt, LED, Vertical

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Others, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): 0～60, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～1.0, Specification: Built-in magnet, Auto Switches: A93V, Lead

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Others, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): 0～60, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～1.0, Specification: Built-in magnet, Auto Switches: A93V, Lead

3

Cylinder model Hexagon wrench key MKB12-10Z -20Z -30Z MKB16-10Z -20Z -30Z MKB20-10Z -20Z -30Z MKB25-10Z -20Z -30Z MKB32-10Z -20Z -30Z -50Z MKB40-10Z -20Z -30Z -50Z MKB50-10Z -20Z -30Z -50Z MKB63-10Z -20Z -30Z -50Z CQ-M3 x 50L x 60L x 70L CQ-M3 x 50L x 60L x 70L CQ-M5 x 75L x 85L x 95L CQ-M5 x 75L x 85L x 95L CQ-M5 x 85L x 95L x 105L x 125L CQ-M5 x 80L x 90L x 100L x 120L CQ-M6 x 90L x 100L

Table of Contents

Vacuum suction port 50l/min (ANR) Suction flow rate For basic specifications such as allowable moment, refer to the "Standard motor" pages for equivalent products listed on Features pages 1 and 2. 104 105 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Made to Order

Electric Actuators

Suction at both ends. 50l/min (ANR) 100l/min (ANR) Suction flow rate For basic specifications such as allowable moment, refer to the "Standard motor" pages for equivalent products listed on Features pages 1 and 2. 106 Made to Order/Clean Room Specification Series LJ1H20 Dimensions/LJ1H202 (X60) Scale: 15% When two dimensions are shown, the top dimension is for 100 to 600mm strokes, and the

LJ1H

Vacuum suction port 50l/min (ANR) Suction flow rate For basic specifications such as allowable moment, refer to the "Standard motor" pages for equivalent products listed on Features pages 1 and 2. 104 105 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Made to Order

Digital Flow Switch (Integrated display type)

to 3 5, 10L range: -1 to 4 25, 50, 100, 200L range: 1300 0x0514 OUT1 uses the unit for accumulated output index value (When unit: "L" is selected) 2 R/W Accumulated output index L S16 0 Y 0 to 5 OUT1 uses the unit for accumulated output set value (When unit: "ft3" is selected) 1 R/W Accumulated output set value ft3 S16 0 Y Setting range 0 to 9 1310 0x051E Setting range 1, 2, 5, 10, 25, 50L

Mounting: B (Direct Mount Rod Side Tapped), Bore Size: 12mm equiv., Stroke: 50mm, Connector: w/Connector, Sensor Cable Length: L (3m), Auto Switch: A93V--Reed, DC Volt, AC Volt, LED, Vertical

Mounting: F (Rod Side Flange), Bore Size: 12mm equiv., Stroke: 50mm, Connector: w/Connector, Sensor Cable Length: L (3m), Auto Switch: A93V--Reed, DC Volt, AC Volt, LED, Vertical

Mounting: Direct Mount Rod Side Tapped, Bore Size: 12mm equiv., Stroke: 50mm, Connector: w/Connector, Sensor Cable Length: 3m, Auto Switch: A93V--Reed, DC Volt, AC Volt, LED, Vertical, Lead Wire or Prewired Connector: -, Number: -

Mounting: Rod Side Flange, Bore Size: 12mm equiv., Stroke: 50mm, Connector: w/Connector, Sensor Cable Length: 3m, Auto Switch: A93V--Reed, DC Volt, AC Volt, LED, Vertical, Lead Wire or Prewired Connector: -, Number: -

Bore Size: 16mm, Port Thread: Rc (25-100 Bore, M Thread 16-20 Bore), Piping: Standard, Stroke: 50mm, Stroke Adjusting Unit: Low Load Shock Absorber+Adjust Bolt, End Lock: None, Auto Switch: A93V--Reed, DC Volt, AC Volt, LED, Vertical, Lead Wire or Prewired Connector: -, Number: -

Bore Size: 16mm, Port Thread: Rc (25-100 Bore, M Thread 16-20 Bore), Piping: Standard, Stroke: 50mm, Stroke Adjusting Unit: L (Low Load Shock Absorber+Adjust Bolt), End Lock: None, Auto Switch: A93V--Reed, DC Volt, AC Volt, LED, Vertical

4-channel Flow Monitor ( compatible)

Item Display Content Setting of connection product [4L] 4 L range [16L] 16 L range [40L] 40 L range [PFW] is selected [100L] 100 L range [250L] 250 L range [10L] 10 L range [rAnG] [50L] 50 L range Selection of flow range [100L] 100 L range [PFA] is selected [200L] 200 L range [500L] 500 L range [4L] 4 L range [PFd] is selected [16L] 16 L range [40L] 40 L range Press the SET button to set.

Digital Flow Switch (Remote type monitor unit)

PF2A30 series PF2A31 series 1 to 10 L/min type (PF2A510) 5 to 50 L/min type (PF2A550) [11L]: [21L]: [51L]: 10 to 100 L/min type (PF2A511) 20 to 200 L/min type (PF2A521) 50 to 500 L/min type (PF2A551) [10L]: [50L]: PF2W30 series PF2W33 series [11L]: 10 to 100 L/min type (PF2W511) 0.5 to 4 L/min type (PF2W504) [04L]: [20L]: [40L]: 2 to 16 L/min type (PF2W520) 5 to 40 L/min type (PF2W540) PF2D30