SMC Pneumatic Clean Series Manufacturer Clean bench (Class M3.5) 5min 55min 75l Sampling time Interval time Setting conditions Supply rate 15l/min Sampling air flow Exhausted from relief port Laser dust monitor (Suction flow rate 15l/min) Particle generation measuring circuit Evaluation method To obtain the measured values of particle concentration, the accumulated value Note 1) of particles captured every 5 minutes
Manufacturer Clean bench (Class M3.5) 5min 55min 75l Sampling time Interval time Setting conditions Supply rate 15l/min Sampling air flow Exhausted from relief port Laser dust monitor (Suction flow rate 15l/min) Particle generation measuring circuit Evaluation method To obtain the measured values of particle concentration, the accumulated value Note 1) of particles captured every 5 minutes
Manufacturer Clean bench (Class M3.5) 5min 55min 75l Sampling time Interval time Setting conditions Supply rate 15l/min Sampling air flow Exhausted from relief port Laser dust monitor (Suction flow rate 15l/min) Particle generation measuring circuit Evaluation method To obtain the measured values of particle concentration, the accumulated value Note 1) of particles captured every 5 minutes
X 80l X 85l X 90l X 95l M5 X 40l M5 X 45l X 45 l X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l X 80 l X 85 l X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l X 80 l X 85 l X 90 l 15 10.5 7.5 X 100 l X 105 l X 130 l X 155 l M10 X 75l M5 X 40l X 115 l X 140 l X 80l X 85l X 90l X 95l X 45 l X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l X 80 l X 85 l M6 X 55l X 60 l X 65 l X 70 l X 75 l X 80 l X 85 l X 90
x 85l x 95l x 120l x 145l M6 x 85l x 95l x 105l x 130l x 155l M8 x 90l x 100l x 110l x 135l x 160l M10 x 105l x 115l x 140l x 165l M10 x 120l x 130l x 155l x 180l M5 x 50l x 55l x 60l x 65l x 75l x 85l M5 x 55l x 60l x 65l x 70l x 80l x 90l M5 x 60l x 65l x 70l x 80l x 90l x 115l x 140l 9 8 9.5 13.5 15.5 10 15 17.5 3 Compact Cylinder with Air Cushion Series RQ Replacement Parts/Seal Kits
M5 x 80l M5 x 85l M6 x 75l M6 x 80l M6 x 85l Lever with built-in shock absorber 0.97 1.01 1.05 RSQB12-10 RSQB16-10 -15 RSQB20-10 -15 -20 RSQB32-10 -15 -20 RSQB40-20 -25 -30 RSQB50-20 -25 -30 Note) CX Round bar, Chamfered, Roller 1.03 1.07 1.11 50 Lever with built-in shock absorber 1.26 1.30 1.34 CY 7 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080
90 115 140 Model C D 65 70 75 85 95 120 145 85 95 105 130 155 90 100 110 135 160 105 115 140 165 120 130 155 180 R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63-30 -40 -50 -75 -100 R(D)QB80-40 -50 -75 -100 R(D)QB100-40 -50 -75 -100 M5 x 50l x 55l x 60l x 65l x 75l
Size: 10, Motor Size: L (Compact Type), Lead Screw Type, mm: J (LEP*6: 8; LEP*10: 10), Stroke: 75mm, Motor Cable Mounting Direction: L (Entry on Left Side)
Size: 10, Motor Size: Standard, Lead Screw Type, mm: K (LEP*6: 4; LEP*10: 5), Stroke: 75mm, Motor Cable Mounting Direction: L (Entry on Left Side)
Mounting: L (Axial Foot), Bore Size: 20mm, Stroke: 75mm, Cushion: 40~63 Bore-Cushion Both Sides; 12~32 Bore-No Cushion, Connector: Connector, Cable Length: L (3m)
Mounting: F (Rod Side Flange), Bore Size: 12mm equiv., Stroke: 75mm, Connector: w/Connector, Sensor Cable Length: L (3m)
Mounting: F (Rod Side Flange), Bore Size: 20mm equiv., Stroke: 75mm, Connector: w/Connector, Sensor Cable Length: L (3m)
Mounting: L (Axial Foot), Bore Size: 12mm equiv., Stroke: 75mm, Connector: w/Connector, Sensor Cable Length: L (3m)
Mounting: B (Direct Mount Rod Side Tapped), Bore Size: 20mm equiv., Stroke: 75mm, Connector: w/Connector, Sensor Cable Length: L (3m)
Mounting: L (Axial Foot), Bore Size: 20mm equiv., Stroke: 75mm, Connector: w/Connector, Sensor Cable Length: L (3m)
Mounting: Rod Side Flange, Bore Size: 12mm equiv., Stroke: 75mm, Connector: w/Connector, Sensor Cable Length: 3m, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -
Mounting: Axial Foot, Bore Size: 12mm equiv., Stroke: 75mm, Connector: w/Connector, Sensor Cable Length: 3m, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -
Mounting: Axial Foot, Bore Size: 20mm equiv., Stroke: 75mm, Connector: w/Connector, Sensor Cable Length: 3m, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -
Mounting: Double Clevis, Bore Size: 32mm, Stroke: 75mm, Cushion: 40~63 Bore-Cushion Both Sides; 12~32 Bore-No Cushion, Connector: Connector, Cable Length: 3m, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -
Mounting: Rear Flange, Bore Size: 12mm, Stroke: 75mm, Cushion: 40~63 Bore-Cushion Both Sides; 12~32 Bore-No Cushion, Connector: Connector, Cable Length: 3m, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -