10

Note 1) 75 + 50 (n 2) (n = 2, 4, 6, 8) Note 1) 80 + 50 (n 2) (n = 2, 4, 6, 8) Note 1) 85 + 50 (n 2) (n = 2, 4, 6, 8) Note 1) 90 + 50 (n 2) (n = 2, 4, 6, 8) Note 1) 1 70 75 80 85 90 D-F5l/J59 D-F5lW D-J59W D-F5BA D-F59F 2 (Different surfaces, same surface) 90 95 110 115 120 130 n (Same surface) 90 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 95 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 110

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

3.2 D-M9B (2-wire) OUT Black Most sensitive position 6 DC(-) Blue 22 D-M9B OUT(+) Brown OUT(-) Blue 18

Cylinder with Lock Series CLS

59 16 107 58 110 M14 x 1.5 15 65 19 Up to 1000 3 30 14 47 78 43 31 50 161 18 110 146 1/4 128 28 17 36 36 90 59 16 114 64 110 M14 x 1.5 15 75 19 Up to 1200 5 46 14 56 53 182 95 23 132 169 1/4 144 32 20 40 40 90 59 43 18.5 130 74 120 17 36 80 22 M16 x 1.5 +0.100 0 Up to 1200 118 30 16 5 63 60 204 106 36 167 195 3/8 162 40 23 50 45 115 70 48 17 18.5 149 86 135 20 41 90 26 M18 x 1.5 +0.100

Compact Cylinder

95 100 110 130 150 55 60 65 70 75 80 85 90 95 100 110 130 150 M6 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110 l x 130 l x 150 l M5 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110 l x 130 l x 150 l 45 50 55 60 65 70 75 80 85 90 M4 x 45 l x 50 l x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l Courtesy of Steven Engineering

Auto Switch Guide

RZQ Reed switchD-A90(V)/A93(V)/A96(V) Solid state switchD-M9N(V)/M9P(V)/M9B(V) F9NW(V)/F59W/F9BW(V) F9BAL MI W S CEP1 CE1 Auto Switch Mounting Bracket Part No.

Auto Switch Guide

Data Reed switchD-A90(V)/A93(V)/A96(V) Solid state switchD-M9N(V)/M9P(V)/M9B(V) F9NW(V)/F59W/F9BW(V) F9BAL Auto Switch Mounting Bracket Part No.

Auto Switch Guide

MLGP Reed switchD-A90(V)/A93(V)/A96(V) Solid state switchD-M9N(V)/M9P(V)/M9B(V) F9NW(V)/F59W/F9BW(V) F9BAL RLQ MLU ML1C Auto Switch Mounting Bracket Part No.

Auto Switch Guide

Data Reed switchD-A90(V)/A93(V)/A96(V) Solid state switchD-M9N(V)/M9P(V)/M9B(V) F9NW(V)/F59W/F9BW(V) F9BAL Auto Switch Mounting Bracket Part No.

Auto Switch Guide

Data Reed switchD-A90(V)/A93(V)/A96(V) Solid state switchD-M9N(V)/M9P(V)/M9B(V) F9NW(V)/F59W/F9BW(V) F9BAL Auto Switch Mounting Bracket Part No.

Mechanically Jointed Rodless Cylinder Series MY1

30 60 40 122 25 140 28 MY1B 80 15 22 53 660 61 15 90 690 38 120 40 70 48 155 28 176 35 MY1B100 20 42 69 760 75 20 120 800 Y 2 x d R WX D Bottom ported (Applicable O-ring) Hole Size for Centralized Piping on the Bottom WX Y d D R Applicable O-ring Model 90 45 18 26 1.8 MY1B 80 120 50 18 26 1.8 MY1B100 P22 (Machine the mounting side to the dimensions below.) 968 Series MY1B Mechanically Jointed

Auto Switch Guide

(Tightening torque of M2.5 screw should be 0.1 to 0.2 Nm.) 20 Reed switchD-A90(V)/A93(V)/A96(V) Solid state switchD-M9N(V)/M9P(V)/M9B(V) F9NW(V)/F59W/F9BW(V) F9BAL Data Auto Switch Mounting Bracket Part No.

MY1

MY1B (Basic type) B A (mm) 10 16 20 Mounting position A 35 27 20 B 165 133 90 Operating range l Note) 8.5 6.5 6 MY1M (Slide bearing guide type) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B A (mm) 16 20 Mounting position A 70 90 B 90 110 Operating range l Note

Air Slide Table

38.5 90 193.5 6 3 155 174 MXQ20A-100Z 50 16 108 56 90 63.5 115 266.5 8 4 205 224 MXQ20A-125Z 55 32 133 59 90 63.5 140 291.5 8 4 230 249 MXQ20A-150Z 62 48 158 62 90 63.5 165 316.5 8 4 255 274 41 Air Slide Table/Double-ported Type MXQA Series Dimensions: MXQ 20A [Adjuster Option] MXQ 20A-m With adjuster option (20) Double-ported type MXQA Metal stopper with bumper : Both ends, : Extension

Electric Actuator

Weight [g] D-M9N(V) D-M9P(V) D-M9B(V) Auto switch model Caution 0.5 8 8 7 Precautions 1 14 14 13 Lead wire length (m) 3 41 41 38 Fix the auto switch with the existing screw installed on the auto switch body.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

90 Max. 25 8 16 250 270 Rod flange (F) [mm] Bore size [mm] R TF FB E2 UF W MF 4 x FB 32 32 64 7 50 79 16 10 40 36 72 9 55 90 20 10 50 45 90 9 70 110 25 12 63 50 100 9 80 120 25 12 80 63 126 12 100 153 30 16 100 75 150 14 120 178 35 16 E2 R W MF TF UF 125 90 180 16 Max. 157 Max. 224 45 20 Head flange (G) [mm] Bore size [mm] MF ZF 32 10 130 40 10 145 50 12 155 63 12 170 80 16 190 100 16 205

Table of Contents

D-M9N(V)/D-M9P(V)/D-M9B(V) Direct Mounting Style . D-F8N/D-F8P/D-F8B Direct Mounting Style . D-Y59A, B /D-Y69A, B /D-Y7P(V) Direct Mounting Style . D-F9G/D-F9H Normally Closed Direct Mounting Style. D-Y7G/D-Y7H Normally Closed Direct Mounting Style. 2-color Indication Type . D-F79W/D-F7PW/D-J79W Rail Mounting Style. D-F7NWV/D-F7BWV Rail Mounting Style .

Compact Cylinder

L x 100 L 100 100 (mm) (mm) Cylinder model C D Mounting bolt size Cylinder model C D Mounting bolt size CQUB32-5 CQUB40-5 M5 x 65 L M5 x 65 L 65 65 -10 -10 x 70 L x 70 L 70 70 -15 -15 x 75 L x 75 L 75 75 -20 -20 x 80 L x 80 L 80 80 -25 -25 x 85 L x 85 L 85 85 -30 -30 x 90 L x 90 L 90 90 10.5 10.5 -35 -35 x 95 L x 95 L 95 95 -40 -40 x 100 L x 100 L 100 100 -45 -45 x 105 L x 105 L 105 105

Compact Cylinder Series CQS

C D 35 40 45 50 55 60 35 40 45 50 55 60 45 50 55 60 C D 65 70 75 80 85 90 45 50 55 60 65 70 75 80 85 90 Cylinder model Mounting bolt size Cylinder model Mounting bolt size CDQSWB12-5D -10D -15D -20D -25D -30D CDQSWB16-5D -10D -15D -20D -25D -30D CDQSWB20-5D -10D -15D -20D CDQSWB20-25D -30D -35D -40D -45D -50D CDQSWB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D M3 x 35L x 40L x 45L x

Auto Switch Guide Reed Switches/Solid State Switches For Rotary Actuators (Air Grippers) 1

MRQ Auto Switch Internal Circuit DD-90 20OUT () Weight OUT () Brown Contact protection box CD-P11 CD-P12 Reed switch (g) OUT ( ) D-90 D-97 Auto switch model OUT ( ) Blue Black line 5 5 0.5 Lead wire length (m) 23 23 3 D-97 37 37 5 Contact protection box CD-P12 Choke coil OUT (+) Brown Dimensions OUT (+) Reed switch Zener diode Zener diode D-90 OUT () OUT () Blue Black line Resistor LED

CLS

As a guide, it should be turned about 90 past the point at which tightening can be felt. 9-9-23