Magnet: Magnet, Shaft Type: Single Shaft, Size: 15, Thread Type: M5 (10, 15); Rc 1/8 (20, 30, 40), Rotation Angle: 170° to 190°, Air Cushion: Rubber Bumper, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Magnet: Magnet, Shaft Type: Single Shaft, Size: 15, Thread Type: M5 (10, 15); Rc 1/8 (20, 30, 40), Rotation Angle: 170° to 190°, Air Cushion: Rubber Bumper, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 3m, Number: 1 Pc.

Magnet: Magnet, Shaft Type: Single Shaft, Size: 15, Thread Type: M5 (10, 15); Rc 1/8 (20, 30, 40), Rotation Angle: 170° to 190°, Air Cushion: Rubber Bumper, Auto Switch: M9PA--Solid State, Water Resist., 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 1.0m Cord Length, M8-3 Pin Connector, Number: -

Magnet: Magnet, Shaft Type: Single Shaft, Size: 15, Thread Type: M5 (10, 15); Rc 1/8 (20, 30, 40), Rotation Angle: 170° to 190°, Air Cushion: Rubber Bumper, Auto Switch: M9PA--Solid State, Water Resist., 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 1.0m Cord Length, M12-4 Pin Connector, Number: -

Magnet: Magnet, Shaft Type: Single Shaft, Size: 15, Thread Type: M5 (10, 15); Rc 1/8 (20, 30, 40), Rotation Angle: 170° to 190°, Air Cushion: Rubber Bumper, Auto Switch: M9NA--Solid State, Water Resist., 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

1

DIN Rail Option Nil 0 3 Direct mounting Without DIN rail (with bracket) For 3 stations Specify a longer rail than the total length of specified stations. 16 For 16 stations INDEX Protective class class # (Mark: ) 180 Series SY3000/5000/7000 How to Order Valves (With mounting screw) Refer to page 17 for valve specifications. q w r e t y u i o !0 !

Table of Contents

MHC Model MHT Note) Opening/Closing stroke (mm) Cylinder bore (mm) Rotating angle () Weight (g) MHY Action Model MHW 306 90 MRHQ10D 4 10 305 180 MRHQ 593 90 MRHQ16D 6 16 Misc. 591 180 Double acting 1055 90 MRHQ20D 10 20 D1052 180 1561 90 20MRHQ25D 14 25 1555 180 307 90 MRHQ10S MRHQ10C 4 10 306 180 MRHQ16S MRHQ16C 594 90 6 16 592 180 Single acting 1060 90 MRHQ20S MRHQ20C 10 20 1057 180 1566

Table of Contents

Data Reed switchD-A90(V)/A93(V)/A96(V) Solid state switchD-M9N(V)/M9P(V)/M9B(V) F9NW(V)/F59W/F9BW(V) F9BAL Auto Switch Mounting Bracket Part No.

NCQ2/CQ2

Note 7) Note 7) Stroke standard (pneumatic) Long stroke 5 10 15 20 25 30 35 40 45 50 75 100 125 150 175 200 250 300 Bore 12 16 20 25 32 40 50 63 80 100 125 140 160 180 200 Note 7) Only CQ2 is available with 180 and 200 bores.

Rotary Actuator/Vane Type

S Z CRB2 u CDRB2 B W 20 180 S Z L M9B With auto switch q r e !

Table of Contents

Table unit has positioning mechanisms for each 90 and 180 of rotation.

Table of Contents

Solenoid valve ( ): Effective area [mm2] : Metal : Metal seal Speed controller Composed effective area (mm2) E 64.8 to 67 D 36 to 45 VQ4000 (36.0) VQ4000 (39.6) VFR3000 (41.4) VFS3000 (36.0) G 180 to 300 VFR6000 (191) VFS6000 (180) VP70 (300) F 102.6 to 120 2 Standard type 1 With One-touch fittings C 16.2 to 21.6 VQ2000 (16.2) SY7000 (21.6) SX7000 (21.6) Elbow type 1-A Refer to System

Compact Cylinder

Bore size Auto switch 125 140 160 180 200 125 mm 140 mm 160 mm 180 mm 200 mm Nil Without auto switch Refer to the below table for applicable auto switches. Auto switch mounting groove Z 125 to 200 4 surfaces Port thread type Nil Rc NPT G Body option TN TF Standard (Rod end female thread) Rod end male thread Nil M Cylinder stroke (mm) Refer to the next page for standard strokes.

Compact Hydraulic Cylinder

-125, BS5-160 BS5-180, BS5-200 When D-F5BAL auto switch is shipped mounted on a cylinder, the above stainless steel screws are used.

High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

Made to Order

M L CXS series: 20, 25, 32 M L CXS series: 10, 15 Stroke Stroke CXS 10 M L CXS 15 M L CXS 20 M L CXS 25 M L CXS 32 M L 150 210 229 75 Model Stroke SS ZZ Z 80 135 152 50 120 175 192 70 150 205 222 80 90 145 162 60 80 100 100 155 172 110 165 182 175 257 287 125 180 197 200 282 312 120 180 199 65 125 207 237 150 232 262 110 170 189 125 185 204 110 192 222 110 180 204 120 202 232 120 190 214

Electric Actuator/Slider Type

Lx = 180 mm, Ly = 170 mm, Lz = 360 mm 4.

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

(Including Bracket, Set Screw) Cylinder series Applicable bore size (mm) 200 40 BMB5 -032 50 BA7 -040 63 BA7 -040 80 BA7 -063 100 BA7 -063 125 BA7-080 140 160 180 32 BMB5 -032 MDB MDBB, MDNB CDA2, CDBA2 CDA2Q CDA2H CDA2Y, CDLA CDNA, CE2 CDL1 CDS1, CDLS CDS2 CDNS BA7 -040 BA7 -040 BA7 -063 BA7 -080 BA7 -080 BS5-200 BS5-180 BS5 -125 BS5 -125 BS5 -160 Note 1) When using type D-M9A(

Rotary Table/Rack & Pinion Style Series MSQ

Port location/Rotation 2 3 4 5 Standard type 180 90 180 90 Port location/Rotation Symmetric type Rotation 180 90 2: Standard type, 180 Refer to the table to the right. 3: Standard type, 90 Standard type Connecting port Connecting port Connecting port position 4: Symmetric type, 180 5:Symmetric type, 90 Symmetric type Connecting port Connecting port Applicable Auto Switch/Refer to pages 761

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

For Safety Instructions and Actuator Precautions, refer to pages 7-13-3 to 7-13-6. 125 140 160 180 200 Bore size (mm) 0.05 Minimum operating pressure Allowable Kinetic Energy (J) Caution 125 140 160 180 200 Bore size (mm) Snap Ring Installation/Removal Allowable kinetic energy 12.4 9.8 7.4 1.