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Retaining rings (split pins for 40) are included. 10 Series CM3 Dimensions of Accessories Rod End Nut (mm) Pivoting Clevis Bracket (For CM3E) (mm) Material: Iron Material: Iron d L LV LX LC hole +0.15 +0.05 Axis 0.040 0.076 LR D C H B LH LT C D d H B Part no.

The higher the value is set, the quicker it stops. < [A] Pushing force> Pushing force ratio is defined. < [A] Trigger LV> The condition at which [INP] output signal is turned on. Set it at the value equivalent to the pushing force or less. The [INP] output signal is given when the target force (Trigger LV) is achieved.

14 12.7 11.0 25.4 4.0 1/4-28 122.4 131.4 143.4 LY 25 14 12.7 12.6 28.4 4.8 5/16-24 125.4 134.4 146.4 32 21 19 17.3 41.4 6.4 7/16-20 142.4 153.4 171.4 CI D I 40 19 16.6 17.3 41.4 6.4 7/16-20 150.4 161.4 179.4 MM AL A K LH LE 50 22.4 19.8 18.8 52.6 7.9 1/2-20 183.6 198.6 218.6 KA 4-J LT C0.1 63 22.4 19.8 18.8 52.6 7.9 1/2-20 183.6 198.6 218.6 NA S + Stroke Z + Stroke LZ + Stroke LP LG LF LV

RS H A R V Integral clevis style (E): CG5ENS RZQ ZZ + Stroke CD hole H10 Shaft d9 M GA GB L RR U CX LL 2-RcP H1 Width across flats B1 MI W S LY CEP1 CI D CE1 I MM LH AL A K LE KA 4-J CE2 LT C0.1 NA ML2B LF LP LG LV LX S + Stroke Z + Stroke LZ + Stroke H 4-LD C J G5-S Stroke range A Bore size (mm) CV AL B1 C CD(Hole) CI CX D GA GB H H1 I J K KA L M MM NA P RR S U + 0.058 0 0 0.2 0 0.2 0 0.2

RS H A R V Integral clevis style (E): CG5ENS RZQ ZZ + Stroke CD hole H10 Shaft d9 M GA GB L RR U CX LL 2-RcP H1 Width across flats B1 MI W S LY CEP1 CI D CE1 I MM LH AL A K LE KA 4-J CE2 LT C0.1 NA ML2B LP LG LF LV LX S + Stroke Z + Stroke LZ + Stroke H 4-LD C J G5-S Stroke range A Bore size (mm) CV AL B1 C CD(Hole) CI CX D GA GB H H1 I J K KA L M MM NA P RR S U + 0.058 0 0 0.2 0 0.2 0 0.2

RS H A R V Integral clevis style (E): CG5ENS RZQ ZZ + Stroke CD hole H10 Shaft d9 M GA GB L RR U CX LL 2-RcP H1 Width across flats B1 MI W S LY CEP1 CI D CE1 I MM LH AL A K LE KA 4-J CE2 LT C0.1 NA ML2B LP LG LF LV LX S + Stroke Z + Stroke LZ + Stroke H 4-LD C J G5-S Stroke range A Bore size (mm) CV AL B1 C CD(Hole) CI CX D GA GB H H1 I J K KA L M MM NA P RR S U + 0.058 0 0 0.2 0 0.2 0 0.2

Applicable bore size LC LD L LE LF LG LH LR LT LX LY LV CG1 CM-E020B CM-E032B 20/25 32/40 8 6.8 24.5 22 15 30 30 10 3.2 12 59 18.4 CD-S02 10 9 34 25 15 40 40 13 4 20 75 28 CD-S03 MB Clevis Pin (mm) C95 Applicable bore size 20 25/32 40 Part No.

Korea [ISO 9002] SMC New Zealand [ISO 9001] SMC Singapore [ISO 9002] SMC Spain [ISO 9002] SMC Sweden [ISO 9002] SMC Switzerland [ISO 9002] SMC Taiwan [ISO 9002] SMC UK [ISO 9001/ISO14001] SMC US [ISO 9001] 15 Table of Contents Page Page Actuators Valves Pin Cylinder/Series CJ1 38 Gas and Chemical Liquid Valve/Series LVM 17 Miniature Cylinder/Series CJP 39 High Purity Chemical Valve/Series LV

Movement method Speed Position Acceleration Deceleration Pushing force Trigger LV Pushing speed Positioning force Area 1, 2 In position Step data setting Step data Parameters setting Parameter Jog operation/Constant rate movement Return to origin Test drive (Specify a maximum of 5 step data and operate.)

D-X 163 CM2Y Series Integrated Clevis (E) CM2YE Bore size Stroke Z LZ + Stroke ZZ + Stroke Z + Stroke RR LP S + Stroke L AL F K A H U G NA +0.058 0 2 x P (Rc, NPT, G) CDH10 0 0.1 CX H1 G 1.5 I Eh8 NA CI D LH MM 2 x LD NN Effective thread length FL Width across flats B1 Width across flats KA LF LY LG LT LV Refer to page 166 for details of clevis pivot bracket.

189 214 239 264 25 12.5 25 37.5 50 75 100 125 146 159 171 184 209 234 259 155 168 180 193 218 243 268 32 12.5 25 37.5 50 75 100 125 151 164 176 189 214 239 264 163 176 188 201 226 251 276 40 12.5 25 37.5 50 75 100 125 180 193 205 218 243 268 293 192 205 217 230 255 280 319 With Air Cushion Built-in One-touch Fittings Clevis Pivot Bracket Bore size (mm) Bore size (mm) Bore size (mm) LZ LY LV

Therefore, SMC products cannot be used for business or certification ordained by the metrology (measurement) laws of each country. 3 - LV Series High Purity Chemical Liquid Valve Precautions 1 Be sure to read this before handling the products. Refer to the back cover for Safety Instructions. Design / Selection Piping Warning Caution 1. Check the specifications.

(Not available in this product) Trigger LV Pushing speed Can be set in units of 1mm/s. (Not available in this product) Moving force 100% at step motor, 250% at servo motor (Not changeable). Area output Can be set in units of 0.01mm. In position During positioning operation: Width to the target position. It should be set to LEFS:0.5 or more.

/See 1.2 Specifications on p.5 turned ON because the effective pushing force of pushing operation exceeds the Trigger LV value. INP output signal is unstable.

Movement mode Movement mode 3 ABS 1 () INC 2 Speed Speed *1 (mm/s) Position Position (-) (+) [mm] 1 (mm/s 2) Accelerati on Accelerati on Decelerati on Decelerati on 1 (mm/s 2) 100% (%) * Pushing force Pushing force *1 0 1100 (1100 ) INP ON INP ON (:%) Trigger LV Trigger LV *1 -42- (1100 ) ( mm/s) * Pushing speed Pushing speed *1 Moving force Moving force *1 (%) (mm/s)

When the pushing force exceeds the value set in the step data Trigger LV. Caution After pushing operation is finished, even if controller changes to energy saving mode, INP signal status maintains to ON.

(If values other than 0 set the operation will be changed to the pushing operation.) g < Trigger LV> For pushing operation only. Not applicable for this product. h < Pushing speed> For pushing operation only. Not applicable for this product. i < Moving force> Max. Force at the positioning operation. The force is automatically adjusted corresponding to the load.

Valve configuration Pilot operated dual 2 port Pilot operated 2 port Operating pressure 0.3 to 0.6 MPa range Valve construction Poppet seal Manual override Push type Rated voltage 24 VDC, 12VDC Power consumption 0.35W Conductor cross section: 0.2 mm2 (AWG24) Lead wire (ZK2-LV--A) Insulator O.D.: 1.4 mm Note 4) Refer to Valve assembly on page 33 for the valve model number.

ZK2-OM00201 (7) Connector assembly ZK2 LV W K A Valve type: J Valve type: K, R Applicable valve type Lead wire length Nil 300 mm Valve type K, R 6 600 mm W (With supply valve and release valve) 10 1000 mm 20 2000 mm S Valve type J (Supply valve only) 30 3000 mm (8) One-touch fitting assembly (Purchasing order is available in units of 10 pieces.)