Electric Actuator Triple Axis P&P Unit

1600 15 7.5 1000 15 5 1600 kg mm/s mm 250 500 250 500 0.05 When axes are combined, select each axis considering the weight of the work piece and the body.

HRX-OM-W002

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-8 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-W002 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

0.5

300 mm 300 mm 300 mm 4 s 4 s 6 s 6 s 8 s 0 8 s 0 8 s 2 s 4 s 6 s 8 s 0 2 s 4 s 6 s 8 s 0 2 s 2 s 300 mm 300 mm 300 mm 300 mm 0 400 800 1200 1600 2000 Installation distance [mm] 0 400 800 1200 1600 2000 Installation distance [mm] 0 2000 0 400 800 1200 1600 2000 Installation distance [mm] 0 400 800 1200 1600 2000 Installation distance [mm] 1600 2000 m] Extensive static neutralization area can

25

Nil P NPN PNP Bar length (mm) 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 With 2 pcs. 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 Since input/output function cannot be used, specify Nil when the AC adapter is being used.

5

Auto Switch Mounting Height (mm) D-B5m D-B64 D-B59W D-G5m D-K59 D-G5NT D-G5mW D-K59W D-G5BA D-G59F Auto switch model D-F5m D-J59 D-F5mW D-J59W D-F5BA D-F59F D-F5NT D-Z7m D-Z80 D-Y59m D-Y7P D-Y7BA D-Y7mW D-M9m D-M9mW D-M9mA D-A9m D-A3mC D-G39C D-K39C D-A44C D-A3m D-G39 D-K39 D-A44 D-A5m D-A6m D-A59W D-M9mV D-M9mWV D-M9mAV D-A9mV D-Y69m D-Y7PV D-Y7mWV D-P3DWA D-P4DW Bore size Hs Ht Hs Ht Hs

Made to Order

D-M9(V)/M9W(V)/M9A(V) D-A9(V) D-B5/B6 D-G5/K5 Hs Hs B A B A D-B7/B8 D-G7/K7 D-C7/C8 D-H7 Hs Hs B A B A Proper Auto Switch Mounting Position (mm) Proper Auto Switch Mounting Height (mm) D-B7/B80 D-B73C D-B80C D-G79/K79 D-K79C D-H7C D-G5NT D-G5/K59 D-G5W D-K59W D-B5/B64 D-B59W D-G5BA D-G59F Auto switch model D-G59F/G5 D-K59 D-G5W D-K59W D-G5NT D-G5BA Auto switch model D-H7 D-H7C D-H7NF D-H7W

AC Servo Motor Driver (Network card type ）

H T E d W T D L Max.

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

H T E d W T D L Max.

LEC-OM07605CN

(1) LECSS2-T P+DP+CG3G4 G3G4 P+D P+D P P+ C C G3 D (3) (1) G4 5m 5 m (12) 1.

Membrane Air Dryer

D-DN

AIR CYLINDER

Parts list * is different from standard type (C(D)S2) No.

XLF Series

D D D Valve seal (maintenance part) 4 Body (material: A6063) C C C C E E E E E E E E (K flange ) F F F Fn n n n (KF flange) F F F Fd d d d Heater (option) Auto switch (option) G G G G H H H H B B B B A A A A A A A A Unit: mm Model A B C D E Fn Fd G H XLF-16 40 103 38 1 30 17 40 XLF-25 50 113 48 1 12 40 26 39 XLF-40 65 158 66 2 11 55 41 63 XLF-50 70 170 79 2 11 75 52 68 XLF-63 88 196 100 3

ChemicalThermo-con

D/MS3102A20-15S Connect the DC cable connector of the heat exchanger. 6 Contact b for upper/lower temp. limit alarm (closed when alarm occurs) A F Alarm output connector D-sub 9 pin (pin type) 7-9 Unused G E B 6. Communication connector: D-sub 9 pin OMRON Corp. XM2D-0901 or equivalent, holding screw M2.6 Connection cable: With shielding 22AWG or more Pin No.

XL-OMY0002

30 40 13 XL-OMY0002 8 X L D 25 M9N A A ( X A N1 A ) 25 40 B A 50 63 80 C P11 160 100 FKM() P8 KF (NW) D K (DN) () A / A F G A J B K C L M M9N D-M9N M9P D-M9P / 560 M9B D-M9B A90 D-A90 H0 H4 H5 5150 100 A93 D-A93 120 M9// 25H4 14 XL-OMY0002 9. 200 2580 100 100,160 [] 1 1.5 1 XLD-25,XLD-40,XLD-50,XLD-63,XLD-80 200 XLD-100,XLD-160 100 : FKM 110 Pa <> 15 XL-OMY0002

l

BBA1: D-A5/A6/F5/J5 D-F5BAL switch is set on the cylinder with the screws above when shipped. When a switch only is shipped, BBA1 screw is attached.

Air cylinder

Doc. no.CS2*-OM0001M D PRODUCT NAME Air cylinder MODEL / Series / Product Number CS2*125320-** Contents 1. Safety Instructions P.2 2.

High Vacuum L Type Valve

H5 Initial power / 100 VAC 200/40 400/70 400/80 600/130 800/180 Power 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

XL-OMV0002

KF ) Fn J H B A G A mm A B C D E Fn G H J XLC-16 40 110 38 1 30 17 40 26 XLC-25 50 120 48 1 12 40 26 39 27.5 XLC-40 65 171 66 2 11 55 41 63 36 9 XL-OMV0002 4-2.162580,100,160 C E D C E E (KF ) (K ) Fn Fd J K H B A G A mm A B C D E Fn Fd G H J K XLC-50 70 183 80 31 10.5 75 52 77 29 10.5 XLC-63 88 209 100 39 11 87 95 70 76.5 36 9 XLC-80 90 250 117 45.5 11 114 110 83 105 44 9 XLC-100 108 317.5

XLG Series

H 5 Initial power / Power consumption (W) 100 VAC 200/40 400/70 400/80 600/130 200 VAC 800/40 1600/80 1600/80 2400/130 Item XL-80 XL-100 XL-160 Rated voltage of the heater 90 to 240 ACV Heater assembly number XLA25-60S-3 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 1 pc. 2 pcs. 3 pcs.