CM2

No. of auto switches mounted 2 Different sides C85 Auto switch model Same side n Different sides 1 Same side C95 D-C7 D-C80 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 10 50 15 50 + 45 (n 2) n 2 2 15 + 45 ( ) (n = 2, 4, 6) CP95 10 60 15 60 + 45 (n 2) NCM NCA n 2 2 15 + 50 ( ) (n = 2, 4, 6) 10 65 15 65 + 50 (n 2) Dn 2 2 D-B5/B6 D-G5NTL 15 + 50 ( ) (n = 2, 4, 6) 75 10 15 -X 75 + 55

ZP

G E D G E D G E D G ZPT20B ZPT25B 32 34 ZF 23.5 24 29 ZPT32B 20 25 22 27 5 8 12.4 10.5 25 28 37 15.6 10.5 18.9 14 ZP ZCU 10, 13, 16 Size 40, 50 Size AMJ Bellows Bellows Misc.

LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil G R Y Brake 50W 100W 200W 1 2 3 None With brake Nil K Power supply voltage Stroke 100/110VAC 50/60Hz 100/115VAC 50/60Hz 200/220VAC 50/60Hz 200/230VAC 50/60Hz Without motor Lead screw lead 1 H B C F A D E 8mm 12mm 20mm 5mm 10mm 25mm 40mm 2 0 Lead screw type The tables above show the definition for each symbol only and cannot

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

With light/ surge voltage suppressor (L)(M) (D)(F) 100 VAC 50/60 Hz VZ5000 200 VAC 50/60 Hz 24 VDC 2.4 4/2 5/3 M plug connector (M) (Option) Page 3-3-53 24 VAC 50/60 Hz Locking B type (Slotted) (A/B EA/EB) 48 VAC 50/60 Hz 110 VAC 50/60 Hz 3 position closed center 220 VAC 50/60 Hz 6 VDC 12 VDC 48 VDC VZ3000 Base Mounted DIN terminal (D) 0.83 4/2 5/3 Page 3-3-29 3 position exhaust center

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Auto Switch Mounting Height (mm) D-F5 D-J5 D-F59F D-F5W D-J59W D-F5BA D-F5NT Auto switch model D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-Y7BA D-A9 D-M9 D-M9W D-M9A D-Y69 D-Y7PV D-Y7WV D-A3 D-G39 D-K39 D-M9V D-M9WV D-M9AV D-A5 D-A6 D-A59W D-A9V D-P4DW D-A44 Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Bore size 32 40 50 63 80 100 125 24.5 23 35 67 27.5 77 27.5 27.5 24.5 25.5 23 32.5 23

MGP

There may be large variations depending on the surrounding environment (variations on the order of 30%). 66 Solid State Switches/Direct Mount/ D-Y59 /D-Y69 /D-Y7P(V) Series MGP Auto Switch Specifications D-Y5, D-Y6, D-Y7P, D-Y7PV (with indicator light) D-Y7PV D-Y59B D-Y59A D-Y69A D-Y7P D-Y69B Auto switch part no.

C95

, D-F5W D-J5, D-J59W D-F59F, D-F5BAL D-Z7, D-Y59, D-Y7BAL D-Z80, D-Y69, D-Y7W(V) D-Y7P(V) D-A5 D-A6 D-A59W D-F5NTL D-A3, D-G39 D-A44, D-K39 D-P5DWL Bore size (mm) MB A B A B A B A B A B A B A B MB1 32 0 10.5 1.5 14 9.5 22 4.5 17 2 14.5 0 10.5 1 13.5 40 0 21.5 1.5 25 9.5 33 4.5 28 2 25.5 0 21.5 1 24.5 CA2 50 0 23 2 26.5 10 34.5 5 29.5 2.5 27 0 23 1.5 26 63 0 28 2 31.5 10 39.5 5 34.5 2.5 32

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

Operating Range [mm] Auto switch model Bore size 32 40 50 63 80 100 125 D-M9m/M9mV D-M9mW/M9mWV D-M9mA/M9mAV 4 4.5 5 6 6 6 7 D-A9m/A9mV 7 7.5 8.5 9.5 9.5 10.5 12 D-F5m/F5mW D-J59/J59W D-F5BAL D-F59F/F5NTL 3.5 4 4 4.5 4.5 4.5 5 D-A5m/A6m 9 9 10 11 11 11 10 D-A59W 13 13 13 14 14 15 17 D-Y59m/Y69m D-Y7P(V)/Y7mW(V) D-Y7BAL 5.5 5.5 7 7.5 6.5 5.5 7 D-Z7m/Z80 7.5 8.5 7.5 9.5 9.5 10.5 13 D-G39/K39

Air Cylinder

/K59 D-G5D-K59W D-G5BA D-G59F D-G5NT 75 90 100 110 Same surface 15 + 50 (n 2) (n 4) 100 + 50 (n 4) 110 + 50 (n 4) 90 + 50 2 2 2 2 Different surfaces (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) O O 75 + 50 (n 2) 90 + 50 (n 2) 100 + 50 (n 2) (n = 2, 4, 6, 8) 110 + 50 (n 2) (n = 2, 4, 6, 8) Same surface (n = 2, 3, 4) (n = 2, 4, 6, 8) 1 10 90 100 110 Different

C85

Same side Different sides Different sides 15 + 45 (n = 2, 4...) ( n 2 ) 2 D-C7 C85 D-A7/A80 D-A7H/A80H D-A73C/A80C D-F7 50 15 10 50 + 45(n 2) D-C80 D-C73C D-C80C D-H7C D-H7 D-H7W D-H7BAL D-H7NF C95 15 + 50 (n = 2, 4...) ( n 2 ) 2 ) 10 + 35 (n = 2, 4...) ( n2 2 10 5 65 + 50(n 2) 65 15 10 D-F7V D-J79 CP95 15 + 45 (n = 2, 4...) ( n 2 ) 2 D-J79C D-A79W NCM 60 + 55(n 2) 60 15 10 D-F7W NCA

C85

Same side Different sides Different sides 15 + 45 (n = 2, 4...) ( n 2 ) 2 D-C7 C85 D-A7/A80 D-A7H/A80H D-A73C/A80C D-F7 50 15 10 50 + 45(n 2) D-C80 D-C73C D-C80C D-H7C D-H7 D-H7W D-H7BAL D-H7NF C95 15 + 50 (n = 2, 4...) ( n 2 ) 2 ) 10 + 35 (n = 2, 4...) ( n2 2 10 5 65 + 50(n 2) 65 15 10 D-F7V D-J79 CP95 15 + 45 (n = 2, 4...) ( n 2 ) 2 D-J79C D-A79W NCM 60 + 55(n 2) 60 15 10 D-F7W NCA

AC Servo Motor Driver (Pulse input type/Positioning type ）

H T E d W T D L Max.

CNA

) CLQ 30 40 30 30 30 30.5 34 43 33.5 50 D-Z7/Z80 D-A3/A44 D-A3C, D-A44C D-A5/A6 D-B5/B64 D-A59W D-B59W D-Y59/Y69 D-Y7P/Y7V D-Y7W/Y7WV D-Y7BAL D-F5/J5/F59F D-F5W/J59W D-F5BAL/F5NTL D-G5/K59/G59F D-G5W/K59W D-G5NTL/G5BAL D-G39/K39 D-G39C, D-K39C D-P5DWL 40 63 80 100 34 50 34 34 34 35 38.5 47 10.5 9.5 9 7 8 38 MLGP 41 63 41 41 41 42.5 46.5 53 44 11 11 11 10 9 48.5 80 48.5 48.5 49.5 51 55 60

CNA

model D-P5DWL CNA D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-Y69 D-Y7PV D-Y7WV D-Y7BAL CNS A 32 B CLS Operating Range Bore size (mm) Hs Ht Hs Ht Hs Ht Hs Ht Auto switch model Bore size (mm) CLQ 30 40 30 30 30 30.5 34 43 33.5 50 D-Z7/Z80 D-A3/A44 D-A3C, D-A44C D-A5/A6 D-B5/B64 D-A59W D-B59W D-Y59/Y69 D-Y7P/Y7V D-Y7W/Y7WV D-Y7BAL D-F5/J5/F59F D-F5W/J59W D-F5BAL/F5NTL D-G5/K59/G59F D-G5W/K59W D-G5NTL/G5BAL

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

VQC 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 3 Electrical entry VQZ 110 to 120 VAC, 50/60 Hz G: Grommet E: Grommet terminal T: Conduit terminal D, Y: DIN terminal 4 3 position exhaust center 220 VAC, 50/60 Hz 5 6 24 VDC 12 VDC SQ 4 7 240 VAC, 50/60 Hz Note) VFS 9 Other 3 position pressure center Option Note) L and M plug connectors: Max. 220 VAC VFR 5 L: L plug connector M: M plug

Stability of suction position,

ZP3EU-YF4JB10 [Weight: 430 g] ZP3EU-YF4JB30 [Weight: 461 g] ZP3EU-YF4JB50 [Weight: 486 g] Width across flats 17 Width across flats 30 Width across flats 17 Width across flats 30 Bushing Bushing 50 8 8 8 8 50 A B Bushing Bushing M22 x 1.5 M22 x 1.5 B A D-D D-D Rc1/8 Rc1/8 22 22 D D D D 26 26 32 32 11 11 42 42 19 19 4 4 11.11) 11.11) 30 (Rotating angle) 30 (Rotating angle) 50 61 Dimensions

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

D-G5NT D-G5lW D-K59W D-G5BA D-G59F D-F5l D-J59 D-F59F D-F5lW D-J59W D-F5BA D-M9l D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV D-B5l D-B64 D-A9l D-A9lV D-A59W D-F5NT D-P3DWA D-P4DW Bore size A B A B A B A B A B A B A B A B A B A B A B 40 10 8 6 4 4 1 5.5 3.5 3.5 0.5 0.5 0 1 0 7 4 2.5 0 4.5 1.5 12 9 50 10 8 6 4 3.5 1.5 5.5 3.5 3 1 0 0 0.5 0 6.5 4.5 2 0 4 2 11.5 9.5 63 12.5 11.5 8.5 7.5 6 5 8 7 5.5

Vacuum Pad

C A C A B D B D Dimensions Dimensions Dimensions Model A B C D E F Model A B C D E F Model A B C D E F ZPX40HB 25-A18 ZPX40HB 50-A18 ZPX40HB 75-A18 ZPX50HB 25-A18 ZPX50HB 50-A18 ZPX50HB 75-A18 ZPX63HB 25-A18 ZPX63HB 50-A18 ZPX63HB 75-A18 ZPX80HB 25-A18 ZPX80HB 50-A18 ZPX80HB 75-A18 ZPX100HB 25-A22 ZPX100HB 50-A22 ZPX100HB 75-A22 ZPX100HB 100-A22 ZPX125HB 25-A22 ZPX125HB 50-A22 ZPX125HB 75

Vacuum Pad

C A C A B D B D Dimensions Dimensions Dimensions Model A B C D E F Model A B C D E F Model A B C D E F ZPX40HB 25-A18 ZPX40HB 50-A18 ZPX40HB 75-A18 ZPX50HB 25-A18 ZPX50HB 50-A18 ZPX50HB 75-A18 ZPX63HB 25-A18 ZPX63HB 50-A18 ZPX63HB 75-A18 ZPX80HB 25-A18 ZPX80HB 50-A18 ZPX80HB 75-A18 ZPX100HB 25-A22 ZPX100HB 50-A22 ZPX100HB 75-A22 ZPX100HB 100-A22 ZPX125HB 25-A22 ZPX125HB 50-A22 ZPX125HB 75