10

, 400, 450, 500, 600 Up to 1200 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 MB1 Up to 1800 CA2 Up to 1500 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 125 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800,

CS1

300 to 1000 0.2 Stroke 164 234 110 159 227 75 40 133 182 250 159 227 182 250 98 Lube Non-lube Air-hydro Lube Non-lube Air-hydro to 1000 0.2 Stroke 184 262 110 159 227 75 40 133 182 250 159 227 182 250 98 to 1200 0.2 Stroke 204 292 120 173 248 75 40 141 194 269 106 173 194 269 248 to 1200 Lube Non-lube 0.2 Stroke 228 326 135 272 85 45 153 290 115 294 276 190.5 208.5 192.5 210.5 Lube Non-lube

MB

, 300, 350, 400, 450, 500 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450

HRX-OM-Q026

/300-A-20. 8-1 8.1.2 HRSH100/150/200/250/300-A-40. 8-2 8.1.3 HRSH100/150/200/250-W-20. 8-3 HRSH Series HRX-OM-Q026 Contents 8.1.4 HRSH100/150/200/250-W-40. 8-4 8.1.5 Option T High head temp . 8-5 8.1.6 Refrigerant with GWP reference . 8-6 8.1.7 Communication specifications . 8-6 8.2 Dimensions . 8-7 8.2.1 HRSH100-A-20/40. 8-7 8.2.2 HRSH150-A-20/40-, HRSH200-A-20/40. 8-8 8.2.3 HRSH250/300-

1

, 275, 300 (CXWM16 to 25) 225, 250 (CXWM32) 225, 250, 275 (CXWL16 to 25) 225 (CXWL32) CXWM 16, 20, 25, 32 25 to 200 CXWL 16, 20, 25, 32 225, 250, 275 25 to 200 ML1 25, 32, 40 1001 to 2000 100 to 1000 CY3B 20, 25, 32, 40 2001 to 3000 100 to 1000 CY1B 50, 63 From 2001 200 to 2000 2001 to 4000 (25, 32) 2001 to 5000 (40) 2001 to 6000 (50, 63) REA 25, 32, 40, 50, 63 200 to 1000 (5), 10, 15, 20

Air Slide Table

300 0 0 50 100 150 200 250 300 350 400 L3: Overhang Allowable range: 300 mm L3: Overhang Allowable range: 400 mm Allowable overhang L [mm] Allowable overhang L [mm] 167 Model Selection MXQ Series Determine the overhang.

Base Mounted Metal Seal/Rubber Seal Series VQ

312.5 323 312.5 323 250 260.5 262.5 273 L2 L3 2-4-195 VQ0/1000 Kit (Terminal block) T It is a standard terminal block type.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

L Dimension n: Stations L n 2 135.5 125 93.5 24.5 3 135.5 125 104 19 4 148 137.5 114.5 20 5 160.5 150 125 21 6 173 162.5 135.5 22 7 185.5 175 146 23 8 198 187.5 156.5 24 9 198 187.5 167 19 10 210.5 200 177.5 20 11 223 212.5 188 21 12 235.5 225 198.5 22 13 248 237.5 209 23 14 260.5 250 219.5 24 15 260.5 250 230 18.5 16 273 262.5 240.5 19.5 17 285.5 275 251 20.5 18 298 287.5 261.5 21.5 L1 L2

Metal Seal/Rubber Seal Series VQ Body Ported

Note 1) Note 2) Dimensions Formula L1 = 10.5n + 14.5, L2 = 10.5n + 25 n: Station (Maximum 16 stations) n L 1 2 46 56.5 225 235.5 3 56.5 67 237.5 248 4 67 77.5 250 260.5 5 77.5 88 250 260.5 6 88 98.5 262.5 273 7 98.5 109 275 285.5 8 109 119.5 287.5 298 9 119.5 130 300 310.5 10 130 140.5 312.5 323 11 140.5 151 312.5 323 12 151 161.5 325 335.5 13 161.5 172 337.5 348 14 172 182.5 350 360.5 15

5 Port Solenoid Valve

250 262.5 275 148 160.5 160.5 173 185.5 185.5 198 210.5 210.5 223 235.5 235.5 248 260.5 260.5 273 285.5 L n 21 22 23 24 25 26 27 28 29 30 31 32 19 20 L1 L2 L3 L4 216.5 225 233.5 242 250.5 259 267.5 276 284.5 293 301.5 310 199.5 208 272.2 280.7 289.2 297.7 306.2 314.7 323.2 331.7 340.2 348.7 357.2 365.7 255.2 263.7 300 312.5 312.5 325 337.5 337.5 350 362.5 362.5 375 387.5 387.5 275 287.5

MGP

300, 350, 400 32 to 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 Applicable auto switches Lead wire length (m) Auto switch model no.

K35-OMW0030

20 250 450 30 200 15 320 350 30 530 40 68 8-6-4.

smcmaintenancepartslist

Seal kit includes a grease pack (125 to 160: 40 g, 180, 200: 50 g, 250: 60 g). Order with the following part number when only the grease pack is needed.

Basic type / Direct mount type Series CY3B/CY3R

, 300 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 1000 1500 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 3000 32 40 3000 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 5000 63 Note 1) Long stroke specification (XB11) applies to the strokes exceeding 2000 mm.

LEY-OM007

50.00 40 40 20.00 50mm 40mm 60 40% 60% 40 No. mm/s mm % % mm 0 ABS 250 40.00 60 40 20.00 No.1 No. mm/s mm % % mm 0 ABS 250 40.00 60 40 20.00 1 ABS 250 0.00 0 0 0.50 0mm 20mm 20 No. mm/s mm % % mm 0 ABS 250 40.00 60 40 20.00 1 ABS 250 20.00 0 0 0.50 (6) 4.3 []P21~P29 ACT Contoroller Help/Easy 1.3. 1 -6- (2) JOG SET MENU TEST DATA MONITOR JOG SET JOG JOG ALARM

Series VQ Base Mounted Metal Seal/Rubber Seal

260.5 11 187.5 250 260.5 L1 L2 L3 1.10-181 VQ0/1000 Kit (Connector) C Standard with lead wires plug-connected to each valve individually.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

, 320, 400, 500 1000 40 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 1900 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 1900 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 1900 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 1900 100 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 1900 125 2000 Made to Order (For details

3

Flow range: Line up 250 L type Flow range: Line up 250 L type New Integrated flow adjustment valve and temperature sensor Integrated flow adjustment valve and temperature sensor Remote type Remote type PVC piping type PVC piping type Flow adjustment valve Remote sensor unit Applicable fluid: Deionized water, chemical, etc. Integrated type and remote type added to series.

0.4

Formula: L1 = 10.5n + 45, L2 = 10.5n + 93.5 n: Stations (Maximum 16 stations) n L 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 L2 L3 L4 55.5 66 76.5 87 97.5 108 118.5 129 139.5 150 160.5 171 181.5 192 202.5 213 104 114.5 125 135.5 146 156.5 167 177.5 188 198.5 209 219.5 230 240.5 251 261.5 125 137.5 150 162.5 175 187.5 187.5 200 212.5 225 237.5 250 250 262.5 275 287.5 135.5 148 160.5 173 185.5

Environment

5 300 200 LEY32 Motor mounting position: Top/Parallel 200 W /60 (Motor rotation speed) (3600 rpm) (2400 rpm) A 16 1000 640 B 8 500 320 C 4 250 160 LEY32D Motor mounting position: In-line 200 W /60 (Motor rotation speed) (3750 rpm) (2400 rpm) A 20 1000 800 600 500 B 10 500 400 300 250 C 5 250 200 150 125 LEY63 Motor mounting position: Top/Parallel, In-line 400 W /60 (Motor rotation speed