MY1

CX E A B C D D(mm) -X Model Applicable bore size A B C 12 15 25 D E F G H J M4 x 0.7 M4 x 0.7 M5 x 0.8 A B A B A B MY-S10 MY-S16 MY-S20 43.6 53.6 65.6 75 84 105 131 158 200 236 MY1B10 MY1B16 MY1B20 MY1B25 MY1B32 MY1B40 MY1B50 MY1B63 MY1B80 MY1B100 35 43 53 61 70 87 113 136 170 206 21 26 38 3.6 4.9 6.4 3.4 3.4 4.5 6.5 6.5 8 1.8 3 4 20Data A B MY-S25 50 8 5.5 35 M6 x 1 9.5 5 A B MY-S32 64

Mechanically Jointed Rodless Cylinder Series MY1

. 25) 5.5 22 87 12 82 15 31 100 8 73.2 15 RB2015 4 57 22 74 970 Series MY1B Mechanically Jointed Rodless Cylinder Basic Type Side Support Side support A MY-SA 2 x G 2 x H F MY1B E C D A B MY1M Side support B MY-SB MY1C MY1H 2 x J MY1HT MY1W E A B C D MY2C (mm) MY2H B C D 21 E 3.6 F 1.8 G 6.5 H 3.4 J A 35 Model Applicable bore size MY1B 10 MY1B 16 MY1B 20 MY1B 25 MY1B 32 MY1B 40 MY1B 50 MY1B

Air Cylinder Series CA2

E B C CJ1 H1 H1 AL AL K A N F B1 K F A N H + Stroke S + Stroke Air release CJP B C H ZZ + 2 Strokes CJ2 With rod boot (One side) With rod boot (Both sides) CM2 e e e d d CG1 f 10.2 10.2 l MB f l f l + Stroke h + l + Stroke 10.2 h + l S + Stroke h + l ZZ + l + 2 strokes ZZ + 2l + 2 strokes MB1 (mm) Stroke range (mm) A Bore size (mm) AL B B1 C D E F G H1 J K KA M MM N Without rod boot With

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Locking type C (Manual) 3(R) port PE port 3 position exhaust center Rated voltage 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 4 1 0 1 0 4 5 24 VDC 12 VDC 3 position pressure center Manual override/Non plug-in type 6 9 Nil: Non-locking push type B: Locking type B (Slotted) C: Locking type C (Manual) Other 5 Option Electrical entry Grommet L plug connector

MGP

200st 75st 200st 24 28 34 54 70 78 25 30 38 M5 X 0.8 10 12 12 44 44 44 62 81 91 5 17 17 110 120 120 200 200 46 54 64 27 39 39 56 72 82 60 77 77 117 117 38 44 50 25, 50, 75, 100 3 3 4 16 20 25 3.5 3.5 4.5 M6 X 1.0 25, 50, 75, 100, 125, 150, 175, 200 M6 X 1.0 MGPM (Slide Bearing)/Dimensions A, DB, E MGPL (Ball Bushing Bearing)/Dimensions A, DB, E Bore (mm) Bore (mm) A E DB A E DB 25st 125st

Table of Contents

C D E F Dimensions Part no.

Electric Actuator with Integrated Guide

D A B Traveling accuracy (mm) Model D side against B side C side against A side LTF8 LTF6 0.02/200 or less 0.02/200 or less 0.02/200 or less 0.02/200 or less Simplified Selection Flow Chart Simplified Selection Flow Chart Simplified Selection Flow Chart Single Axis Electric Actuator Series LTF (AC Servomotor) Single Axis Electric Actuator Series LTF (AC Servomotor) Work load kg Maximum speed

Electric Slide Tables

7 @6 r w @9 @7 @8 e u @0 i y D A A D C-C D-D B-B !5 !1 !9 @3 #0 q @4 E C C E !4 !2 !0 !8 @1 !6 t o @2 @5 !3 Component Parts No. Description Material Note 1 2 3 4 5 6 7 8 9 No.

SV

R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

) E L E C T R I C A L E N T R Y O P T I O N S None Z With Indicator Light and Surge Voltage Suppressor F Through Base H O W T O O R D E R M A N I F O L D S E E I N S I D E F R O N T C O V E R F O R FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT, REQUEST CATALOG REFERENCE N233 DETAILS OF YOUR LOCAL SALES OFFICE 2.74 SOLENOID VALVES SERIES NVFS H O W T O O R D E R M A N I F O L D / O P T I O

NCQ8

Mounting bolt C D Mounting Bolt Size for NCQ8B056 to 400-(Without Auto Switch) Model C D Bolt size order number D Bolt size order number Model C D Bolt size order number Model C NCQ8B056-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B075-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B106-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350

Step Motor Controller

-m LECSS2-m L11 L21 For single phase 200 VAC For three phase 200 VAC L1 CNP1 NFB MC CNP3 L1 CNP1 NFB MC CNP3 Single phase 200 to 230 VAC Three phase 200 to 230 VAC L2 L2 U U U Motor V U Motor V L3 L3 V V W M N W M N() W W P1 P1 PE PE P2 P2 CNP2 CNP2 P P(+) Regeneration option Regeneration option C C D D Detector Detector CN2 CN2 L11 L11 L21 L21 Note) For single phase 200 to 230 VAC, power

Air Cylinder

Auto switch model Bore size (mm) 20 25 32 40 50 63 80 100 D-M9(V) D-M9W(V) D-A9(V) BMA3-020 (A set of a, b, c, d) BMA3-025 (A set of a, b, c, d) BMA3-032 (A set of a, b, c, d) BMA3-040 (A set of a, b, c, d) BMA3-050 (A set of a, b, c, d) BMA3-063 (A set of a, b, c, d) D-M9A(V) Note 2) BMA3-020S (A set of b, c, d, e) BMA3-025S (A set of b, c, d, e) BMA3-032S (A set of b, c, d, e) BMA3-040S

Electric Actuator

-m For three phase 200 VAC For single phase 200 VAC L1 CNP1 NFB MC CNP3 L1 CNP1 NFB MC CNP3 Three phase 200 to 230 VAC Single phase 200 to 230 VAC L2 L2 U U U Motor V U Motor V L3 L3 V V W M N () W M N W W P1 P1 PE PE P2 P2 CNP2 CNP2 P (+) P Regeneration option Regeneration option C C D D Detector Detector CN2 CN2 L11 L11 L21 L21 Note) For single phase 200 to 230 VAC, power supply should

Air Cylinder Series MB

D-X Individual -X Technical data 335 Series MB1 Standard Type Basic style: (B) Cushion valve W V Port 2 x P MM G G With rod boot E e E D d H1 MB Effective thread 10.2 16 2 x 4 x J 10.2 f l S + Stroke H A K F N N C h B ZZ + Stroke Without Air Cushion Bore size (mm) Bore size (mm) S ZZ S ZZ 32 40 50 63 80 100 125 90 90 102 141 145 164 102 124 124 132 164 200 200 235 In the case of w/o air

15

E C x 200 (= D) 20 Note) When mounting the actuator using the body mounting reference plane, use a pin.

JXCx-OMT0023

repeat command end Program end 1000[r/min] 20[ms] 1000[10STMm] 100[ms] 3 [times] 100[10STMm] 100[ms] 2 [times] 200[10STMm] 100[ms] a) b) c) d) e) f) d) Incremental move command (200 10STM m) b) Incremental move command (100 10STM m) Forward rotation 0r/min Servo motor speed 1100 1200 1300 1000 1500 1700 a) c) e) f) 13 44 13.

AC Servo Motor Driver (CC-Link Type ）

station 3 communication ready 4 C 5 D 6 E 7 F 8 15 18 15.

CA2

boot 2-P (Rc, NPT, G) 4-LD G G 4-J 2-cushion valve MM B1 Width across flats KA FV FY E D B e H1 AL B C f h + l l H A F N K N 9 FT S + Stroke FZ FX ZZ + l + Stroke ZZ + Stroke Stroke range (mm) A Bore size (mm) B B FV FD FX FY C AL B1 D E F FT FZ G H1 J Without rod boot With rod boot Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588

Basic type / Direct mount type Series CY3B/CY3R

Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a w 0.0 10 0 20 10 t i o o n L Operation cycles a t e l u g c e i t 1 n r a e p r a Non-contact construction w t Particulate generation from the linear guide unit has been reduced with the use