Vacuum System Peripherals:

e Valve Model SX340 is for internal pilot.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Model H E B L M C M 3 4 LQ1E12 LQ1E11 1/8 18.5 11.5 10 2 4 Class 1 LQ1E52 LQ1E51 LQ1E42 LQ1E41 LQ1E33 LQ1E32 LQ1E31 LQ1E22 LQ1E21 12 19 10 12 6 8 10 4 6 14 28 16.5 4 6 15 17 36.5 23 5 9 20 B L (E) C M 21 43 28 6 9 24 SMC 1/4 26 54 39 7 14 29 C L H (E) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800

CM2

Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 9 MB f l 9 h ZZ + Stroke MB1 3 Width across flats B 3 Width across flats B CA2 With rod boot (Both sides) e e CS1 C76 9 9 l + Stroke 9 l 9 f f C85 Cushion valve Width across flats 1.5 h + Stroke h ZZ + 2 x Stroke C95 With air cushion CP95 NCM NCA Built-in One-touch fittings One-touch fitting port size P D-X

1

q w e SY No.

VM

E C Padlock mounting position C D D Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SUP SUP . A OUT IN A OUT IN 1 2 B 3 B EXH. EXH.

C76

9 @0 q w e r t y u i o !

MB

to 800 19.5 27 32 32 37 37 10 14 18 18 22 26 With Rod Boot (mm) f l 901 to 1000 h Bore size (mm) e 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 901 to 1000 801 to 900 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 32 40 50 63 80 100 50 111 36 23 12.5 25 37.5

SX

actuation 600 500 400 300 200 100 0 SX3140-01 900 800 700 600 500 400 300 200 100 0 SX5140-02 900 800 700 600 500 400 300 200 100 0 SX7140-03 It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected with cylinder, and its needle valve with being fully open.

SYJ3000/5000/7000

Component Parts Replacement Parts No. u i Description Description Sub-plate Pilot valve No. q w e r t y Note Aluminum die-casted Part no.

NCA1

2 4-NT WF G J TN Depth ND E XT SN + Stroke Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A ZB + Stroke Bore size (in) MM KK NT TN WF XT Y LF P SN ZB A AA B BA C D DD E E/2 EA EE G J ND R 150 (1.5") 5/8 7/16-20 1/4-20 5/8 1 1 15/16 1.71 3 5/8 2 1/4 4 3/4 3/4 2.02

I

A N D R E S I S TA N C E L O A D H O W T O O R D E R P R E S S U R E S W I T C H GS40 GS40-01 W I R I N G E X A M P L E S U S E D W I T H A S E Q U E N C E C O N T R O L L E R (COM T E R M I N A L I S V E) Courtesy of Steven Engineering, Inc. ! 230 Ryan Way, South San Francisco, CA 94080-6370 ! Main Office: (650) 588-9200 ! Outside Local Area: (800) 258-9200 !

Electric Actuator

SMC Corporation of America 10100 SMC Blvd., Noblesville, IN 46060 www.smcusa.com SMC Pneumatics (Canada) Ltd. www.smcpneumatics.ca (800) SMC.SMC1 (762-7621) e-mail: sales@smcusa.com For International inquires: www.smcworld.com 2012 SMC Corporation of America, All Rights Reserved.

IDG

pressure dew point (C) P1 = 0.5 MPa 10 10 P1 = 0.5 MPa P1 = 0.7 MPa 20 20 P1 = 0.7 MPa 30 30 40 40 50 0 400 800 1200 1600 50 0 200 400 600 800 1000 Outlet air flow rate (l/min (ANR)) Outlet air flow rate (l/min (ANR)) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Compact

1 1 2N q w e r t y u i o !

LEC-OM071xx

Range Setting Enabled Section Pn402 2 Forward Torque Limit 0 to 800 1% 800 Immediately Setup 4.6.1 Pn403 2 Reverse Torque Limit 0 to 800 1% 800 Immediately Setup 2 Forward External Torque Limit Pn404 0 to 800 1% 100 Immediately Setup 4.6.2 2 Reverse External Torque Limit Pn405 0 to 800 1% 100 Immediately Setup Pn406 2 Emergency Stop Torque 0 to 800 1% 800 Immediately Setup 4.3.2 2 Speed

Free Mount Cylinder

GB GA Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-NN MM D CB CA K C J JA E H A' A 2-P through KA B 4-T counterbore Width across flats L S + Stroke Z + Stroke (mm) Port size Bore size (mm) GA H J JA A B A' C CA CB D E GB 20 25 32 29 32.5 35 19 23 27 16 20 24

V

THREE-PORT VALVES FIVE-PORT VALVES D I R E C T A C T I N G VT S E R I E S (S E E V A LV E S E C T I O N) V A C U U M V E R S I O N SY B O D Y P A R T E D (S E E V A LV E S E C T I O N) H O W T O O R D E R VT S E R I E S H O W T O O R D E R SY S E R I E S VT3 V Refer to series VT307/327 P O R T W AY SY 20 X20 S I Z E 07 17 25 S I Z E E N T E R A S S TA N D A R D P A R T F O R E X T E R N

JXCx-OMU0004

P.50 6 * 8 e PLC PLC 9.

LEC-OM069xx

1% 800 Immediately Setup 4.6.1 Pn403 2 Reverse Torque Limit 0 to 800 1% 800 Immediately Setup Pn404 2 Forward External Torque Limit 0 to 800 1% 100 Immediately Setup 4.6.2 Pn405 2 Reverse External Torque Limit 0 to 800 1% 100 Immediately Setup Pn406 2 Emergency Stop Torque 0 to 800 1% 800 Immediately Setup 4.3.2 2 Speed Limit during Torque Control Pn407 0 to 10 1 min-1 10 Immediately Setup

CNA

MLGC Q T H1 AL A H S + Stroke ZZ + Stroke CNG N K F M M BN W V MNB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com C B CNA CNS With rod boot CLS CLQ e MLGP 8 f l RLQ ZZ + l + Stroke h + l MLU ML1C DBore size (mm) Stroke range (mm) A AL B B1 BN BP BQ C D E F GA GB