A

I L O T O P E R AT E D P R E S S U R E R E G U L AT O R ACCESSORIES P I L O T O P E R AT E D P R E S S U R E R E G U L AT O R Mounting Bracket B24 NAR425 B25 NAR625 S Y M B O L S Bracket Dimensions Bracket No.

VQ7-6/7-8

50 38 B A R2 R1 P 2-1/8 13 13 Mounting hole 2-6.5 Indicator light 34 34 (P , A, B) 3-1/4, 3/8 42.5 42.5 G1/2 (Cable 8 to 10) Bottom ported drawing Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 137.5 SMC 125.5 93 14 (A, B port) 25 (X port) 12 Y 5 3 37 25 22 14 1

ZX

Model ZX1 J1 E P F Nil Vacuum switch (E) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Vacuum switch (ZSE2) ZX1-J1-E Adsorption confirmation switch (P) (Release to atmospheric pressure) Pressure sensor Spacer 1 (For side mounting) Manual override (Non-locking)

LEC-OM071xx

Range Setting Enabled Section Pn402 2 Forward Torque Limit 0 to 800 1% 800 Immediately Setup 4.6.1 Pn403 2 Reverse Torque Limit 0 to 800 1% 800 Immediately Setup 2 Forward External Torque Limit Pn404 0 to 800 1% 100 Immediately Setup 4.6.2 2 Reverse External Torque Limit Pn405 0 to 800 1% 100 Immediately Setup Pn406 2 Emergency Stop Torque 0 to 800 1% 800 Immediately Setup 4.3.2 2 Speed

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

X 500 500 500 0 0 0 0 1 2 3 4 5 0 5 10 15 0 5 10 15 20 25 Work load [kg] Work load [kg] Work load [kg] 1500 1500 1500 Mey 1000 1000 1000 L5 [mm] L5 [mm] L5 [mm] m Wall Y L5 500 500 500 0 0 0 0 1 2 3 4 5 0 5 10 15 0 5 10 15 20 25 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] 600 600 600 Z 400 400 400 200 200 200 0 0 0 0 5 10 15 20 25 0

KJ

) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com P L2 Reference dimensions after NPT thread installation.

CL

For stopping accuracy, refer to Series CLJ (P. 9-2-12), Series CLM2 (P. 9-2-20), Series CLG1 (P . 9-2-30), and Series CL1 (P . 9-3-2) respectively. 7. In order to further improve stopping accuracy, the time from the stop signal to the operation of the lock should be shortened as much as possible.

Table of Contents

Series VQ1000 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Plug Lead Plug-in Cassette P. 2-4-12 P. 2-4-14 P/J kit Series VQ0 P R SMC P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ1000 P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ2000 P. 2-4-38 P. 2-4-42 P. 2-4-46

Electric Actuator

Belt Drive/Series LEFB Type 1 Size Equivalent lead (mm) Stroke (mm) 2 300, 500, 600, 700, 800, 900, 1000 48 16 Step motor (Servo/24 VDC) 48 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 25 48 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 32 48 300 ,500 ,600, 700, 800, 900, 1000 16 Servo motor (24 VDC) 48 25 300, 500 ,600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000

SZ3000

1 P 1 A 4 2n2One-touch fitting [4(A), 2(B) port] 24 SY 13.3 (Pitch) P = 10.5 Applicable tubing O.D.: 4 6 SYJ 16.2 34 17 SX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 36.7 B 2 B 2 B 2 B 2 B 2 R 3 R 3 A 4 A 4 A 4 A 4 A 4 P 1 P 1 4One-touch fitting [1(P), 3(R) port

Integrated Controller

p. 44 Construction p. 46 Dimensions p. 47 Auto Switch Mounting p. 29, 53 Solid State Auto Switch, Normally Closed Solid State Auto Switch, 2-Color Indicator Solid State Auto Switch p. 30, 54 e-Actuator Electric Specifications p. 59 Wiring Examples p. 60 Operation Data Setting p. 61 Options p. 62 Slider Type Specific Product Precautions p. 33 Rod Type Specific Product Precautions

VM

. 5-6-8 Series VM100 P . 5-6-12 Series VM200 P . 5-6-20 Series VM400 P . 5-6-26 Series VZM500 P . 5-6-41 Series VZM400 P . 5-6-35 Series VFM300 P . 5-6-48 Series VFM200 P . 5-6-54 Series VFM800 P . 5-6-32 Transmitters Page Relay Valve P . 5-7-1 Shuttle Valve P . 5-7-3 Shuttle Valve with One-touch Fitting P . 5-7-5 AND Valve with One-touch Fitting P . 5-7-7 Time Delay Valve P . 5-7

LEC-OM069xx

1% 800 Immediately Setup 4.6.1 Pn403 2 Reverse Torque Limit 0 to 800 1% 800 Immediately Setup Pn404 2 Forward External Torque Limit 0 to 800 1% 100 Immediately Setup 4.6.2 Pn405 2 Reverse External Torque Limit 0 to 800 1% 100 Immediately Setup Pn406 2 Emergency Stop Torque 0 to 800 1% 800 Immediately Setup 4.3.2 2 Speed Limit during Torque Control Pn407 0 to 10 1 min-1 10 Immediately Setup

F

A G E G A S K E T: N I P P L E: M-3N M-5N U N I V E R S A L T E E: M-3UT M-5UT P L U G: M-3P M-5P M-5G1 M-3G P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R E L B O W: M-5L G A S K E T: M-5GH T E E: M-5T H O S E N I P P L E: M-5H-4 M-5H-6 H O S E E L B O W: M-5HL-4 M-5HL-6 Similar to Picture

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

lead wire bending radius 10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Auto switch D-A7/A8 K M E S L B A + Stroke L + Stroke J Rod End Male Thread Rod end male thread With auto switch 50 st or less 55 to 75 80 to 100 A1 Without auto switch Q 2-P Q Bore size

MXQ

Rubber stopper (P. 8-5-40) Metal stopper (P. 8-5-43) ZZ Z 18.2 0.3 20 3.5 3 4-M2.5 x 0.45 thread depth 2.5 6.5 12.5 K 5 M 3-M3 x 0.5 thread depth 5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3 depth 2.5 +0.03 0 2 N 1 x F 11 6 (Adjuster at extension end) 9 4-

Prevents Micro-Bubbles

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com PB B A B A Double acting N.C. Double acting VX3 With indicator PA N.C. B A VXA N.C. Single type Suck back P P P VN A B A B Unit Single type Unit LVC Manifold (5 stations max.) LVA LVH A R P 3 port N.C. PA LVD N.C.

1

P.43 P.43 P.71 SY70 SY30 Manifold Top ported Bottom ported Top ported Type 51 SY50 From page 43 P.43 P.43 P.71 P.43 SY70 SY33 Type 52 SY53 From page 63 P.63 P.63 P.81 P.63 SY73 SY30 Type 10 SY50 From page 95 P.95 P.95 P.113 P.143 P.163 P.171 P.179 P.187 P.95 P.123 P.133 P.151 SY70 Type 11 SY50 From page 95 P.95 P.95 P.143 P.163 P.171 P.179 P.187 P.95 P.113 P.123 P.133 P.151 SY70 SY33 Type

3 Port Air Operated Valve Series SYJA300 1

800) 258-9200-www.stevenengineering.com 3(R) NC 1(P) Switch mark (Mounting hole) 2-5.2 (R port) Rc 1/4, 3/8 47 41.6 69 68 29.5 28.5 22.5 13.5 (P port) Rc 1/4, 3/8 Rc 1/4, 3/8 A B Base mounted: VPA544V(A port) 13.5 91.4 57 47 13.5 (PA port) Rc 1/8 NO 2(A) 32 42 52 PA 3(R) NC 1(P) Switch mark Rc 1/4, 3/8 47 2-5.2 (Mounting hole) (R port) 41.6 69 68 29.5 28.5 22.5 13.5 Rc 1/4, 3/8 (P port) 5

NCA1

588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com E LF + Stroke Bore size (in) MM KK A AA B BA C D DD E EA EE G J R WF Y LF P ZB 150 (1.5") 5/8 7/16-20 3/4 1 1/8 1 1/8 3/8 9/16 1/4-28 2 0.3 3/8 1.26 1.1 1.43 1 1.71 3 5/8 2.36 4 3/4 2.02 200 (2") 5/8 7/16-20 3/4 1 1/8 1 1/8 3/8 9/16 5/16-24 2 1/2 0.3 3/8 1.26 1.06 1.84 1 1.71 3 5/8 2.4 4 3/4 2.6 250 (2.5") 5/8 7/16-20