B 100 124 88.5 Operating range l Note) 9 10 6 B A MY1HT (High rigidity/High precision guide type) (mm) 63 50 Mounting position A 290.5 335.5 B 123.5 138.5 Operating range l Note) 5 5 A B 8-11-106
0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 XLS Series Dimensions XLS/Without control power supply D E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT C B L (mm) Grommet (G) A B C
), CF KF (NW) KF (NW), CF KF (NW) KF (NW), K (DN), CF KF (NW), K (DN) Flange type Body: SCS13 (Conforms to Stainless steel 304) Bellows: Stainless steel 316L Bellows holder: Stainless steel 304.
Light weight & compact Series XMA with KF(NW) flange Model Weight kg A mm B mm Conductance l/s XMA-16 5 0.33 40 103 XMA-25 XMA-40 XMA-50 14 0.61 50 113 B 45 1.40 65 158 80 2.00 70 170 A 160 XMA-63 XMA-80 3.60 196 88 200 6.20 90 235 : Common to all series.
(c) (a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.
Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-
C D Side support B MY-S B 2-J E C D A B J M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 C 15 25 35 45 E 4.9 6.4 8 11.7 F 3 4 5 6 H 3.4 4.5 5.5 6.6 A 61 67 81 100 120 142 172 G 6.5 8 9.5 11 D 26 38 50 64 B 71.6 79.6 95 118 142 164 202 Applicable cylinder MY1M16 MY1M20 MY1M25 MY1M32 MY1M40 MY1M50 MY1M63 Model MY-S16A B MY-S20A B MY-S25A B MY-S32A B MY-S40A 55 14.8 8.5 9 14 M10 x 1.5 80 B MY-S63A 70 18.3
Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to
Magnet: Built-in, Series: J2, Mounting: Double Clevis, Bore Size: 16mm, Stroke: 15mm, Action: Single Acting, Spring Return, Head Cover Port Location: Perpendicular to Axis, Pivot Bracket: Pivot Bracket shipped w/Product, Not Assembled, Rod End Bracket: Double Knuckle Joint, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length
Magnet: D (Built-in), Series: J2, Mounting: D (Double Clevis), Bore Size: 16mm, Stroke: 15mm, Action: S (Single Acting, Spring Return), Head Cover Port Location: Perpendicular to Axis, Pivot Bracket: N (Pivot Bracket shipped w/Product, Not Assembled), Rod End Bracket: W (Double Knuckle Joint), Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector
(Or None in the Case of No Switch), Auto Switch Mounting Type: B (Band Mounting)
(Or None in the Case of No Switch), Auto Switch Mounting Type: B (Band Mounting)
(Or None in the Case of No Switch), Auto Switch Mounting Type: B (Band Mounting)
(Or None in the Case of No Switch), Auto Switch Mounting Type: B (Band Mounting)
(Or None in the Case of No Switch), Auto Switch Mounting Type: B (Band Mounting)
Magnet: Built-in, Mounting: Double Clevis, Bore: 16mm, Stroke: 30mm, Head Cover: Perpendicular to Axis, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 3m, Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting: Band Mounting, Cushion: Rubber Bumper, Series: J2
Magnet: Built-in, Mounting: Double Clevis, Bore: 16mm, Stroke: 30mm, Head Cover: Perpendicular to Axis, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9NV--Solid State, Gen. Purpose, 3 Wire NPN, Vertical, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting: Band Mounting, Cushion: Rubber
Magnet: Built-in, Mounting: Double Clevis, Bore: 16mm, Stroke: 30mm, Head Cover: Perpendicular to Axis, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 1m, Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting: Band Mounting, Cushion: Rubber Bumper, Series: J2
Magnet: Built-in, Mounting: Double Clevis, Bore: 16mm, Stroke: 30mm, Head Cover: Perpendicular to Axis, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 1 pc., Auto Switch Mounting: Band Mounting, Cushion: Rubber Bumper, Series: J2
Magnet: Built-in Magnet, Series: J2, Mounting: Double Clevis, Bore Size: 16mm, Stroke: 30mm, Cushion: Rubber Bumper, Head Cover Port Location: Perpendicular to Axis, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting Type: Band