Made to Order

2 pcs. 1 pc. n pcs.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Stroke [mm] 25 485 Up to 400 32 588 Up to 500 63 3343 Up to 800 Size Pushing force [N] Stroke [mm] 25 485 Up to 400 32 736 Up to 500 63 1910 Up to 800 Size Pushing force [N] Stroke [mm] 25 485 Up to 300 32 588 Size Pushing force [N] Stroke [mm] 25 485 Up to 300 32 736 659 LECYM/LECYU Series System Construction Absolute encoder compatible LECYM Series -@ type Driver Main circuit power supply

Rotary Actuator/Vane Type

Single vane Double vane 90, 100D 270S 180S 90S 1) e ot e g 1 n N 8 a 0 4 e g r + 2 n 7 a 4 n + 0 r + o n 0 5 0 4 N 0 ti o 0 9 ot a N ti 0 e t a e ot 0 1) o g t 1 e n e o R ) a 1 0 ot R r ) N 1 n o e 4 ti 0 + a g 0 t o n 9 R ra e n g n io ra (90) (90) at n io Chamfer ot Plate Plate Plate at R ot R Plate (45) Chamfer Chamfer Note 2) Chamfer (45) B port A port B port A port B port A port

15

Force Conversion Graph (Guide) LEY25l (Motor mounting position: Top/Parallel, In-line) 500 400 Lead 3: LEY25C 300 Force [N] 200 Lead 6: LEY25B 100 Lead 12: LEY25A 0 60 30 120 90 Ratio to rated torque [%] LEY32Dl (Motor mounting position: In-line) LEY32l (Motor mounting position: Top/Parallel) 800 600 700 500 Lead 5: LEY32C 600 400 Lead 4: LEY32DC 500 Force [N] Force [N] 400 300 Lead 10: LEY32B

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

N Without magnet and rail Type N (Without magnet and rail) Auto switch can not be mounted on. Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

Integrated Controller

Lead 6: EQY25B 300 Force [N] Select a model based on the pushing force set value and force while referencing the force conversion graph. Lead 12: EQY25A 200 Selection example) Based on the graph shown on the right side, Pushing force: 100 [N] Pushing force set value: 40 [%] The EQY25DHB can be temporarily selected as a possible candidate.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

2 pcs. 1 pc. n pcs.

Table of Contents

0.042 0.17 0.33 1.1 1.9 2.9 0.037 0.15 0.29 1.0 1.7 2.6 0.033 0.14 0.26 0.92 1.6 2.4 0.059 0.26 0.81 1.8 3.0 4.3 0.052 0.24 0.74 1.6 2.7 4.0 0.047 0.22 0.69 1.5 2.6 3.8 0.85 1.4 2.2 0.78 1.3 2.1 0.73 1.2 2.0 0.68 1.2 1.8 0.17 0.59 1.1 3.9 5.7 8.5 0.15 0.54 1.0 3.6 5.3 7.9 0.14 0.56 1.1 3.8 5.7 8.6 With auto switch: CDUK-D With auto switch: CDUK-S With auto switch: CDUK-T (N) (N) (N) Model

2–4

. n pcs.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

2 pcs. 1 pc. n pcs.

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

Gripping force (N) 0.5 MPa 0.5 MPa 30 30 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 20 20 0.2 MPa 0.2 MPa 10 10 0 10 20 30 40 50 0 10 20 30 40 50 60 70 60 70 Gripping point L (mm) Gripping point L (mm) MHR2-30/MDHR2-30 MHR2-30/MDHR2-30 80 80 Pressure 0.6 MPa 0.6 MPa Pressure 70 70 F F 0.5 MPa 0.5 MPa Gripping force (N) Gripping force (N) 60 60 50 50 0.4 MPa 0.4 MPa 40 40 0.3 MPa 0.3 MPa 30 30 0.2 MPa

CQS

2 pcs. 1 pc. n pcs.

High Vacuum Angle Valve

A XLAV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLAV-16-2 41 18.5 8.5 2.7 3 XLAV-25-2 45.5 22.5 8.5 2.7 3 XLAV-40-2 54.5 35 8.5 2.7 3 XLAV-50-2 61 39.5 8.5 2.7 3 XLAV-63-2 80.5 44 12 4 2 XLAV-80-2 90.5 60 12 4 2 6 Aluminum High Vacuum Angle Valve Double Acting, Bellows Seal RoHS XLC Series How to Order q w e r t y u XLC 2 M9N 16

e-Rodless Actuator

100 TA M9B Nominal size Number of auto switches 16 25 Nil S n 2 pcs. 1 pc. n Stroke Refer to the standard stroke table.

Compact Type

Auto switch model D-M9N D-M9B D-M9P 0.5 8 7 8 Lead wire length m 3 41 38 41 Dimensions D-M9 Auto Switch Internal Circuit Mounting screw M2.5 x 4 L Slotted set screw D-M9B, N, P D-M9N Indicator light DC (+) Brown 2.6 Switch main circuit Switch main circuit Switch main circuit OUT Black 2.7 2.8 4 22 DC () Blue 3.2 D-M9N, P (3-wire) D-M9P Most sensitive position 6 DC (+) Brown 22 3.2 D-M9B (

Magnet: Built-in Magnet, Mounting: Head Trunnion, Type: Rubber Bumper, Bore: 63mm, Port Thread Type: G, Stroke: 600mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: Pivot Bracket not Assembled, Rod End Bracket: -, Auto Switch: -, Lead Wire or Prewire Connection: -, Number: -, X Option: -

Magnet: D (Built-in), Series: A2 (Standard), Mounting: D (Double Clevis), Tube Material: Aluminum, Bore Size: 63mm, Port Thread: TF (G), Stroke: 600mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: N (Pivot Bracket)

Magnet: D (Built-in), Series: A2 (Standard), Mounting: D (Double Clevis), Tube Material: Aluminum, Bore Size: 50mm, Port Thread: TN (NPT), Stroke: 600mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: N (Pivot Bracket)

Magnet: D (Built-in), Series: A2 (Standard), Mounting: T (Center Trunnion), Tube Material: Aluminum, Bore Size: 80mm, Port Thread: Rc, Stroke: 600mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: N (Pivot Bracket)

Magnet: None, Mounting: D (Clevis), Type: A (Air Cushion), Bore: 20mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 600mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: N (Pivot Bracket not Assembled)