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Series Variations 'l I Four mounting tYPes Provided rl.4r ffitrrc_ .t! 1 r|{t -h rffi Slandard With type air cushion MGP MGP F a s y a d r u s h e n L c l H * p e E a i o I recti I Piping is possible from two di ons High ' 1 2 " ' 1 6 20 40 * I I Auto switches can be mounted on two sides T;;...*. Clea. room series: . water resisbnttype: o20to o100 -!

Vacuum

Spacar Type Rl Individual supply ports R9 Common supply, individual breaking R16 Common ports (dumm a a a When using spacr Z(1-Rl partiatty, othervalves shoutd b6 fitted with dumftv sDacers_ Valve unit ports with spacer R9, R16 are common with main manitold ports Valve unil ports with spacer Rl are isolatsd lrom marn rnanitold pofts.

MGP

HN HL RN RL 0.05 0.36 0.07 0.05 0.06 0.40 0.35 0.39 20 63 0.06 0.90 0.07 0.05 0.07 0.97 1.03 1.10 25 80 0.09 1.52 0.10 0.09 0.10 1.60 1.60 1.68 32 100 0.15 0.18 0.14 0.18 40 Calculation (example) MGPM50-100-HN Basic weight + Lock unit additional weight 5.74 + 0.24 = 5.99kg 0.24 0.27 0.23 0.27 50 Allowable Rotational Torque of Plate Non-rotating Accuracy of Plate Torque: T (Nm) + T (Nm

MGP

Order a seal kit according to applicable bore size. 3.17-32 Compact Guide Cylinder Series MGPS MGPS50/80 XAH7 depth XL T slot dimension 4-YY depth YL b a CL MLGC X 0.02 XB RB RA CNA X c d XAH7 e CB XC XAH7 (mm) XL CV/MVG T slot dimension Bore size (mm) 50 80 a 11 13.3 b 17.8 20.3 c 10 12 d 6 8 e 17.5 22.5 XX details CXW 8-RR depth RL XX section CXS WB Z QA WA QB CXT XX section Through 4-OA

Direct Solenoid

P80601 1 Faoltcrir*rl coll-A-c. solanold l lli/1m V 3y60 Ha. 120t60 Nt@ aa)a) qIA{S c01ar0 qIA.11 10 '| Solanold str. n!

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Bore size [mm] HN HL RN RL JMGP 20 0.05 0.07 0.05 0.06 25 0.06 0.07 0.05 0.07 32 0.09 0.10 0.09 0.10 40 0.15 0.18 0.14 0.18 50 0.24 0.27 0.23 0.27 63 0.36 0.40 0.35 0.39 80 0.90 0.97 1.03 1.10 100 1.52 1.60 1.60 1.68 MGP MGP MGPW Calculation: (Example) MGPM50-100-HN Basic Weight + Lock unit additional weight 5.74 + 0.24 = 5.98 kg MGQ Non-rotating Accuracy of Plate Allowable Rotational

Magnet: D (Built-in), Mounting: U (Front Trunnion), Bore Size: 40mm, Stroke: 50mm, Cushion: A (Air Cushion), Rod Boot: None, Lock Style: RL (Rod Side Lock/Locking)

Magnet: D (Built-in), Mounting: B (Basic Style), Bore Size: 40mm, Stroke: 50mm, Cushion: A (Air Cushion), Rod Boot: None, Lock Style: RL (Rod Side Lock/Locking)

Magnet: D (Built-in), Mounting: B (Basic Style), Bore Size: 25mm, Stroke: 50mm, Cushion: A (Air Cushion), Rod Boot: None, Lock Style: RL (Rod Side Lock/Locking)

Cylinder (Tube) Inner Diameter(φ): 25, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence, Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Built-in magnet, Support bracket: -, Auto

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence, Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Built-in magnet, Support bracket: -, Auto

Cylinder (Tube) Inner Diameter(φ): 25, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence, Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Built-in magnet, Support bracket: -, Auto

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence, Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Built-in magnet, Support bracket: -, Auto

Magnet: Built-in, Mounting: Front Trunnion, Bore Size: 40mm, Stroke: 50mm, Cushion: Air Cushion, Rod Boot: None, Lock Style: Rod Side Lock/Locking, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Auto Switch Mounting Bracket: -

Table of Contents

Threaded type from 6A to 50A is standardized.

Pilot Operated

Description Size Option Stainless steel Option Stainless steel Brass (C37) Brass (C37) 15A to 25A 32A to 50A 15A to 25A 32A to 50A 15A to 25A 32A to 50A 15A to 50A 15A to 25A 32A to 50A 15A to 25A 15A to 25A 32A to 50A 10A to 50A 15A to 50A 15A to 50A 15A to 50A 15A to 50A 15A to 50A 15A to 50A 10A to 25A 32A to 50A 10A to 25A 32A to 50A 10A to 50A 32A to 50A 10A to 50A 10A to 25A 32A to

2

Do not use standard dew point 40C (symbol: L) type, standard dew point 60C (symbol: S) type and IDG30A, 50A, 30HA, 50HA for dehumidifying breathing air. Do not use only outlet air (dry air) in a closed room. 1. Consider the purge air flow rate. Find the purge air flow rate from the charts and calculate the required outlet air flow rate + purge air flow rate.

7

Q 200 VAC 9 50A N.C. S CAC408 50 50A Flange R 230 VAC G N.O.

2/3 Port Valve

Screw-in styles, 6A to 50A, are standardized.

Process Valve Series VNA

Threaded type from 6A to 50A is standardized.