PSxx-OMR0001CN kPa 90% -ISA3-F ISA3-G ISA3-H 1 m 1 m 1 m [sec] [sec] [sec] [mm] [mm] [mm] 3 m 3 m 3 m [sec] [sec] [sec] [mm] [mm] [mm] 5 m 5 m 5 m [sec] [sec] [sec] [mm] [mm] [mm] -18No.PS-OMR0001CN-J 2 () [()][] 1.5 F42.51 m3 m5 m GH641 m3 m5 m 200 kPa ISA3-F ISA3-G 1 m3 m5 m 1 m3 m5 m [mm] [mm] 9 0 10010 ISA3-H 1 m3 m5 m [mm] 29 0 30030 -19No.PS-OMR0001CN-J 2 ISA3-() ISO1179-1 1 2 3 4 5
kPa 90% -ISA3-F ISA3-G ISA3-H 1 m 1 m 1 m [sec] [sec] [sec] [mm] [mm] [mm] [mm] 3 m 3 m 3 m [sec] [sec] [sec] [mm] [mm] [mm] [mm] 5 m 5 m 5 m [sec] [sec] [sec] [mm] [mm] [mm] [mm] [mm] [mm] -19No.PS-OMT0001CN-E 2 () [()][] 1.5 F42.51 m3 m5 m GH641 m3 m5 m 200 kPa ISA3-F ISA3-G 1 m3 m5 m 1 m3 m5 m [mm] [mm] 9 0 10010 ISA3-H 1 m3 m5 m [mm] 29 0 30030 -20No.PS-OMT0001CN-E 2 ISA3
-(Exanple: A53) 3m .1 (E)mple: A53L) 5n .2 (Example: A534 ' lf loot bckel is required, order 2 pcs. per cylander. " The clevis mounl @mes with clevis pin, llat washer and sPUlpin, $Ecillcalions Model Cyli nder Specif ications For Lock Unit specifications see page 8 217 PSI (1.5 MPa) 14s PSI (1.0 t\.4Pa) 12 PSI (0.08 [,4Pa) -250:'10, 251 -10O0: ia, 1001-1500:i" Basic, Foot.
-(Exanple: A53) 3m .1 (E)mple: A53L) 5n .2 (Example: A534 ' lf loot bckel is required, order 2 pcs. per cylander. " The clevis mounl @mes with clevis pin, llat washer and sPUlpin, $Ecillcalions Model Cyli nder Specif ications For Lock Unit specifications see page 8 217 PSI (1.5 MPa) 14s PSI (1.0 t\.4Pa) 12 PSI (0.08 [,4Pa) -250:'10, 251 -10O0: ia, 1001-1500:i" Basic, Foot.
e: A53L, 5m. .z (Example: A5.JZ) Conooctor K39C K39 SingleClevis CA I.(< CAI-O)5 CA'~ (.A t{XE CAI ': IO Solid State 3wire svsternlNPN 3 wire syslemiPNP F59W GS9W Double C~vls CA l-\)).!
Workpiece: Generic term for the object which is to be adsorbedVacuum Pressure Equivalents Chart Unit Conversion Table -14.7 760 29.9 -101.3 -13.5 700 27.6 -93.3 1 1 _ 6 600 23.6 -80.0 -9.7 500 19.7 -66.7 400 15.8 -53.3 -5.8 300 1 1 . 8 -40.0 -3.9 200 7.9 -26.7 100 3.9 .
Workpiece: Generic term for the object which is to be adsorbedVacuum Pressure Equivalents Chart Unit Conversion Table -14.7 760 29.9 -101.3 -13.5 700 27.6 -93.3 1 1 _ 6 600 23.6 -80.0 -9.7 500 19.7 -66.7 400 15.8 -53.3 -5.8 300 1 1 . 8 -40.0 -3.9 200 7.9 -26.7 100 3.9 .
Series NVM, NVFM, NVZNI Mechanical Valves l .,:lii::rii.r:t,: Series NVM MECHANICAL VALVES CONTENTS/SPECI FICATION S SPECIFICATIONS Contents Faoe NVM Mechanical Valves NVM 100 Cv 0.14 NVM 200 Cv 1.00 NVM 430 Cv 0.38 NVM 830 Limit Valve Cv 0.33 CHARACTERISTICS NVM100 tNVM2oCNVlt430 Port Size (NPT) 1/a 1/a 1/s 1/e Cy 0 . 1 4 1.00 | 0 38 0 3 3 Max.
Series NVM, NVFM, NVZNI Mechanical Valves l .,:lii::rii.r:t,: Series NVM MECHANICAL VALVES CONTENTS/SPECI FICATION S SPECIFICATIONS Contents Faoe NVM Mechanical Valves NVM 100 Cv 0.14 NVM 200 Cv 1.00 NVM 430 Cv 0.38 NVM 830 Limit Valve Cv 0.33 CHARACTERISTICS NVM100 tNVM2oCNVlt430 Port Size (NPT) 1/a 1/a 1/s 1/e Cy 0 . 1 4 1.00 | 0 38 0 3 3 Max.
Magnet: D (Built-in), Series: BA2 (with End Lock), Mounting: T (Center Trunnion), Tube Material: Aluminum Tube, Bore Size: 63mm, Port Thread: Rc, Stroke: 125mm, Rod Boot: w/o Gaiter w/Cushion Both Sides, Cushion: Air Cushion, Lock Position: R (Front Lock), Release Type: N (Non-locking Type)
Magnet: D (Built-in), Series: BA2 (with End Lock), Mounting: T (Center Trunnion), Tube Material: Aluminum Tube, Bore Size: 63mm, Port Thread: Rc, Stroke: 350mm, Rod Boot: w/o Gaiter w/Cushion Both Sides, Cushion: Air Cushion, Lock Position: R (Front Lock), Release Type: N (Non-locking Type)
Magnet: D (Built-in), Series: BA2 (with End Lock), Mounting: T (Center Trunnion), Tube Material: Aluminum Tube, Bore Size: 63mm, Port Thread: Rc, Stroke: 100mm, Rod Boot: w/o Gaiter w/Cushion Both Sides, Cushion: Air Cushion, Lock Position: R (Front Lock), Release Type: N (Non-locking Type)
Magnet: D (Built-in), Series: BA2 (with End Lock), Mounting: T (Center Trunnion), Tube Material: Aluminum Tube, Bore Size: 63mm, Port Thread: Rc, Stroke: 75mm, Rod Boot: w/o Gaiter w/Cushion Both Sides, Cushion: Air Cushion, Lock Position: R (Front Lock), Release Type: N (Non-locking Type)
Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Built-in magnet, Port
Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 125, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Built-in magnet, Port
Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 180, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Built-in magnet, Port
Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Built-in magnet, Port
Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 125, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Built-in magnet, Port
Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 180, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Built-in magnet, Port
Magnet: Built-in, Series: with End Lock, Mounting: Center Trunnion, Tube Material: Aluminum Tube, Bore Size: 63mm, Port Thread: Rc, Stroke: 350mm, Rod Boot: w/o Gaiter w/Cushion Both Sides, Cushion: Air Cushion, Lock Position: Front Lock, Release Type: Non-locking Type, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -