Digital Flow Switch Series PFMB7 2-Color Display ® (200 L type only)

DIN rail is not suitable for port size F02 (G1/4). No lead wire 1

20

VMG11-02-X35 VMG11-03-X35 VMG11-N02-X35 VMG11-N03-X35 VMG11-F02-X35 VMG11-F03-X35 Pipe part no. P5670127-100-X33 P5670127-300-X33 P5670127-600-X33 Part No.

Nozzle Diameter: 13 (ø1.3mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: F01 (Screw-in G1/8), VAC: F02 (Screw-in G1/4), EXH: F02 (Screw-in G1/4)

Nozzle Diameter: 13 (ø1.3mm), Vacuum Pressure: S (-90 kPa), SUP: F01 (Screw-in G1/8), VAC: F02 (Screw-in G1/4), EXH: F02 (Screw-in G1/4)

Digital Pressure Switch ( compatible)

. -93No.PS-OMX0002-A Piping/weight specifications Product No. 02(L) N02(L) F02(L) C01(L) A2(L) B2(L) Port size R1/4 NPT1/4 G1/4 Rc1/8 URJ1/4 TSJ1/4 fluid contact Materials in part Pressure-sensing part Pressure sensor: SUS630, Fitting: SUS304 Body (Rear piping) 51 g 51 g 48 g 47 g 54 g 46 g Weight Body (Bottom piping) 77 g 78 g 74 g 65 g 81 g 72 g Lead wire with connector +39 g Leakage 1

High-precision Digital Pressure Switch ( compatible)

Piping specification: -F02 After hand tightening, tighten the fitting using a spanner on the flat surfaces of the fitting. The tightening torque must be 4 to 5 Nm. When tightening, do not hold the upper part of the product (Display) with a spanner. -15No.PS-OMV0004-H The upper part (display) of the product can be rotated by 336.

Digital Pressure Switch

Piping/weight specifications Product No. 02(L) N02(L) F02(L) C01(L) A2(L) B2(L) Port size R1/4 NPT1/4 G1/4 Rc1/8 URJ1/4 TSJ1/4 fluid contact Materials in part Pressure-sensing part Pressure sensor: SUS630, Fitting: SUS304 Body (Rear piping) 51 g 51 g 48 g 47 g 54 g 46 g Weight Body (Bottom piping) 77 g 78 g 74 g 65 g 81 g 72 g Lead wire with connector +39 g Leakage 1 x 10-5Pa m3/s 1 x 10

High-precision Digital Pressure Switch

Piping specification: -F02 After hand tightening, tighten the fitting using a spanner on the flat surfaces of the fitting. The tightening torque must be 4 to 5 Nm. When tightening, do not hold the upper part of the product (Display) with a spanner. -17No.PS-OMV0009-E The upper part (display) of the product can be rotated by 336.

High-precision Digital Pressure Switch

Piping specification: -F02 After hand tightening, tighten the fitting using a spanner on the flat surfaces of the fitting. The tightening torque must be 4 to 5 Nm. When tightening, do not hold the upper part of the product (Display) with a spanner. -14No.PS-OMW0002-C The upper part (display) of the product can be rotated by 336.

Micro Mechanical Valve Series VM1000

Port size 02 R1/4 N02 NPT1/4 F02 G1/4 Suffix for actuator* S Hard steel roller R Red Color of push button, selector B Black G Green Y Yellow Construction Non-actuated Actuated Force e u w R port 3 port only Port 2 Port 2 Port 1 Port 1 q t y r Component Parts No.

Table of Contents

Foot MGZ-L02 MGZ-L25 MGZ-L03 MGZ-L04 Flange MGZ-F02 MGZ-F25 MGZ-F03 MGZ-F04 Weight (kg) Note) Double clevis MGZ-D02 MGZ-D25 MGZ-D03 MGZ-D04 20 0.48 0.63 0.59 0.58 25 0.70 0.86 0.83 0.83 32 1.09 1.34 1.32 1.32 40 1.91 2.39 2.34 2.19 50 3.03 3.92 3.79 3.47 63 4.83 6.08 5.83 5.62 80 8.85 10.61 9.92 10.66 1.21 Bore size (mm) Basic style Foot style Flange style Bore size (mm) 63 Standard weight

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

All mounting brackets Weight per each 50 mm of stroke 0.18 0.21 0.28 0.39 0.59 0.78 Bore size (mm) 20 32 40 25 Foot MGZ-L02 MGZ-L25 MGZ-L03 MGZ-L04 Flange MGZ-F02 MGZ-F25 MGZ-F03 MGZ-F04 Theoretical Output (N) direction Piston area (mm2) Operating pressure (MPa) Bore size (mm) Model Rod size (mm) Operating Bore size (mm) 50 80 63 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 726 236 1085 378 1621 603

Thread: F (G), Port Size: 03 (3/8)

Thread: N (NPT), Port Size: 02 (1/4)

Thread: N (NPT), Port Size: 03 (3/8)

Thread: Rc, Port Size: 03 (3/8)

Thread: Rc, Port Size: 02 (1/4)

Thread: G, Port Size: 3/8, Knob Material: -

Type: Speed Controller, Body Material: [Aluminum] Aluminum, Control Method: Meter Out / In, Format: [Straight] Straight, Environment, Applications: Standard, Thread Portion Material: [Aluminum] Aluminum, Knob Type: Resin, Lock Nut Option: [Slide Locking Lever] Push Lock Type, Joint Type: Both sides tapped, Connection Dia.: 1/4, Types of Screw: Rc, Handle Material: Plastic

Type: Speed Controller, Body Material: [Aluminum] Aluminum, Control Method: Meter Out / In, Format: [Straight] Straight, Environment, Applications: Standard, Thread Portion Material: [Aluminum] Aluminum, Knob Type: Resin, Lock Nut Option: [Slide Locking Lever] Push Lock Type, Joint Type: Both sides tapped, Connection Dia.: 3/8, Types of Screw: Rc, Handle Material: Plastic