A

11.5 10.3 RCS-02 6 16 34 10-32UNF 20 0~0.002 10 -0.4 ~ -0.2 3/8 25.6 30 14 18 RCD-025 20 8 20 41 1/4-28UNF 25 0~0.002 10 -0.4 ~ -0.2 3/8 30 14 18 RCS-025 8 20 41 1/4-28UNF 25 0~0.002 18 -0.5 ~ -03 3/8 41.6 30 14 12 RCD-03 36 16 22 42 5/16-24UNF 32 0~0.002 18 -0.5 ~ -03 3/8 30 14 12 RCS-03 16 22 42 5/16-24UNF 32 0~0.002 18 -0.5 ~ -03 3/8 41.6 30 14 12 RCD-04 36 16 22 42 3/8-24UNF 40 0~0.002

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

AMH450-06 AMH550-06 AMH550-10 AMH650-14 AMH850-20 AMH850-20 IDG10-03 IDG20-03 IDG30-03 IDG50-03 IDG75-04 IDG100-04 AME150-03 AMF150-03 AME150-03 AMF150-03 AME250-03 AMF250-03 AME250-03 AMF250-03 AME350-04 AMF350-04 AME350-04 AMF350-04 AME450-06 AMF450-06 AME450-06 AMF450-06 AME550-10 AMF550-10 AME550-10 AMF550-10 AME650-14 AMF650-14 AME850-20 AME850-20 AMF850-20 AMF850-20 AMF900-30 AMF900

V100

Example: SS3YJ5-20-03 .1 set (Manifold base) SYJ512-5LZ-M5.2 sets (Valve) SYJ500-10-1A.1 set (Blanking plate assembly) SS3YJ5-41R-03-C6 . 1 set (Manifold base) SYJ514R-5G.2 sets (Valve) SYJ500-10-3A .1 set (Blanking plate assembly) The asterisk denotes the symbol for assembly.

KQ2

(mm) KQ2F04 to 12 Effective area (2) (mm2) Connection thread Rc (1) Mass (g) D1 D2 L1 L2 M Model Nylon Urethane Applicable tubing KQ2F04-01 KQ2F04-02 KQ2F06-01 KQ2F06-02 KQ2F06-03 KQ2F08-01 KQ2F08-02 KQ2F08-03 KQ2F10-02 KQ2F10-03 KQ2F12-02 KQ2F12-03 KQ2F12-04 KQ2F16-03 KQ2F16-04 1 8 1 4 1 8 1 4 3 8 15 23 15 22 25 17 24 24 27 30 36 31 52 59 58 10 27 31 27.5 31 33.5 29 32.5 33.5 34.5 36.5 35

Table of Contents

-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 19 47 57.5 17 10 19 47 57.5 10 24 50 69.3 12 24 50 69.3 12 Rc Rc3 8 Rc1 2 Rc1 2 17 22 22 13-5-

KF

Connection L2 M d A Effective area (mm2) Weight (g) L1 thread R Model 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10 15.5 1.5 1.6 13 23 14 25 36 16 25 37 16 24 36 32 40 65 31 39 64

60

VXK2322-03 VXK2232-03 VXK2332-03 VXK2242-03 VXK2342-03 VXK2110-01 VXK2120-01 VXK2130-01 VXK2110-02 VXK2120-02 VXK2220-02 VXK2320-02 VXK2130-02 VXK2230-02 VXK2330-02 VXK2240-02 VXK2340-02 VXK2250-02 VXK2350-02 VXK2220-03 VXK2320-03 VXK2230-03 VXK2330-03 VXK2240-03 VXK2340-03 VXK2250-03 VXK2350-03 2 3 4.5 2 0.59 1.2 2.3 0.59 0.59 1.2 2.3 0.59 1.5 0.7 0.3 1.5 0.7 1.0 1.6 0.3 0.45 0.8 0.25 0.45

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

Elbow Universal 2 3 Metric size Inch size 3.2 23 01 1/8" 04 06 08 10 12 03 05 07 09 11 13 4 5/32" 6 3/16" Control 8 1/4" Meter-out Meter-in 0 1 10 5/16" 12 3/8" Use 1/8" tube. 1/2" M5 Port size With One-touch fitting M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 01 02 03 04 U10/32 N01 N02 N03 N04 Needle Valve/Flow Characteristics AS1201FG, AS1211FG AS2201FG-

13

-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 19 47 57.5 17 10 19 47 57.5 10 24 50 69.3 12 24 50 69.3 12 Rc Rc3 8 Rc1 2 Rc1 2 17 22 22 13-5-

KP/KPQ/KPG

KPGL12-03 KPGL12-04 KPQL04-M5 KPQL04-01 KPQL04-02 KPQL06-M5 KPQL06-01 KPQL06-02 KPQL08-01 KPQL08-02 KPQL10-02 KPQL10-03 KPQL12-03 KPQL12-04 17 21 25 18.5 23.5 27.5 26 30 33 34.5 37 39.5 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 8 10 14 8 10 14 12 14 4 10 19 6 12 20 13 21 26 36 38 65 4 4 4 18 10.4 20.7 D1 10 L2 A D2 8 H 6 10 10 19.5 12.8 22.8 Connection threads 10 (R) 8 (R

Modular/F.R.L. Units Series AC

AD48 AD47 AD38 AD37 Y300 AKM3000-(01) 02 IS1000M-30 Y310-(01) 02 Float type auto drain Y400 AKM4000-(02) 03 IS1000M-40 Y410-(02) 03 02 VHS40-03 04 02 E400-03 04 06 02 IS1000E-4003 04 06 Y44-02 03 Y500 Y600 Spacer Check valve Note 6) Note 7) Pressure switch Note 7) IS1000M-60 IS1000M-50 Y510-(02) 03 Y610-03 (04) Y610-(03) 04 T-interface Note 6) Note 7) Y110-M5 VHS50-06 10 VHS20-01 02 VHS30

Modular F.R.L. Units

IS10M-30-A Y310-(01)-A 02-A G36-10-01 G36-4-01 G36-10-01-L G36-4-01-L Round type Standard 0.02 to 0.2 MPa setting Standard 0.02 to 0.2 MPa setting Pressure gauge Note 1) Attachment Round type (with color zone) Spacer Spacer with bracket Y400-A Y400T-A AKM4000-(02)-A 03-A IS10M-40-A Y410-(02)-A 03-A 02A VHS40-03A 04A 02-A E400-03-A 04-A 06-A 02-A IS10E-4003-A 04-A 06-A Y44-02-A 03-A Y500-A

KJ

F (inch) Model N L1 L2 H (Width across flats) Port B min. bore Weight (g) L3 L4 L5 L6 P Q1 Q2 M KM12-03-35-10 KM12-03-35-6 6 87 10 40 65 5 32 1 4 29 18 29.5 19.5 10.6 12 16 6 17.46 10 110 6 95 10 121 6 102 10 61.5 72 KM12-07-35-10 KM12-07-35-6 48 82 31.25 10 19.5 31.5 21.5 13.2 13 17 7 17.46 1 4 1 4 73.5 92 KM12-09-36-10 KM12-09-36-6 52.8 97 37.5 12.7 23.7 37.7 25 15.2 15 18.5 9.5 22.22 5

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

-03 ASG521F-03 ASG620F-04 ASG621F-04 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 1000 25 15 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 1500 Effective area (mm2) Effective area (mm2) 20 10, 12 10 08 1000 15 500 10 5 500 5 0 0 0 0 0 5 10 0 5 10 Number of needle rotations (turns) Number of needle rotations (turns) 2 Stainless Steel Speed Controller Series ASG Construction Elbow type

KP/KPQ/KPG

KPGL12-03 KPGL12-04 KPQL04-M5 KPQL04-01 KPQL04-02 KPQL06-M5 KPQL06-01 KPQL06-02 KPQL08-01 KPQL08-02 KPQL10-02 KPQL10-03 KPQL12-03 KPQL12-04 17 21 25 18.5 23.5 27.5 26 30 33 34.5 37 39.5 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 8 10 14 8 10 14 12 14 4 10 19 6 12 20 13 21 26 36 38 65 4 4 4 18 10.4 20.7 D1 10 L2 A D2 8 H 6 10 10 19.5 12.8 22.8 Connection threads 10 (R) 8 (R

5 Port Solenoid Valve Series SV1000/2000/3000/4000

-59-1A SV1000-59-2A 10 Applicable fitting size d A L D Model KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-12 KQ2P-01 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 SV1000 SX3000-77-1A SX3000-77-1A 16 4 16 32 6 SV2000-59-1A SV2000-59-2A 10 6 18 35 8 SV2000 SV2000-59-3A SV2000-59-3A 16 8 20.5 39 10 SV3000 SV4000 SV3000-59-1A SV3000-59-1A 10 10 22 43 12 SY9000-57-1A SY9000-57-1A 10 12 24 44.5 14 1/8" 16 31.5 5 5/32

smcmaintenancepartslist

) 04 T-interface Note 6) Note 7) Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure switch with piping adapter Note 7) Y24-01 02 Y34-01 02 Y54-03 04 Cross spacer Note 7) Y14-M5 Note 1) in part numbers for a round

ASR

(mm) Port size Balancing pressure 6 8 10 12 Pressure valve ASR430F-02 ASR530F-02 ASR530F-03 ASR630F-03 ASR630F-04 Flow valve ASQ430F-02 ASQ530F-02 ASQ530F-03 ASQ630F-03 ASQ630F-04 R1/4 R1/4 R3/8 R3/8 R1/2 Pressure valve Flow valve Speed controller Speed controller 15-16-3 Air Saving Valve Pressure Valve Flow Valve Series ASR/Series ASQ How to Order Pressure valve: Series ASR ASR F20 4 3 0

Direct Operated

Max. system pressure (MPa) Max. operating pressure differential (MPa) Flow characteristics Weight (g) Av x 10-6m2 N.C. 1 0.7 0.3 1 0.7 1.2 1.6 0.3 0.6 1 0.3 0.5 1.2 1.6 0.6 1 0.3 0.5 Cv converted VX311-01 VX312-01 VX313-01 VX311-02 VX312-02 VX322-02 VX332-02 VX313-02 VX323-02 VX333-02 VX324-02 VX334-02 VX322-03 VX332-03 VX323-03 VX333-03 VX324-03 VX334-03 0.08 0.16 0.24 0.08 0.16 1.9 3.8