Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

48.3 43.3 42.8 37.8 21.3 23 AS321F-02-10 AS321F-02-09 10 5/16" 23 18.5 21 43.3 31.8 37.8 67 18.5 63 29.5 43.3 42.8 15.2 41 21.3 48.3 AS321F-02-12 AS321F-02-11 12 3/8" 20.9 22 31.8 44.3 32.8 69 43.3 21 67 17.9 19 19 AS321F-03-06 AS321F-03-07 6 1/4" 12.8 17 27.8 39.3 27.8 55 39.3 17 55 13.2 AS321F-03-08 AS321F-03-09 8 5/16" 15.2 18.5 29.5 41 23 29.5 57 41 18.5 57 19.8 45.4 40.4 40.2 35.2

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Supplied regenerative resistors or regenerative option is used with the servo amplifier of 11 kW to 22 kW. 01: FR-BU2/FR-RC/FR-CV 02: MR-RB032 03: MR-RB12 04: MR-RB32 05: MR-RB30 06: MR-RB50 (Cooling fan is required) 08: MR-RB31 09: MR-RB51 (Cooling fan is required) 0B: MR-RB3N 0C: MR-RB5N (Cooling fan is required) FA: When the supplied regenerative resistors or the regenerative option is

JXCx-OMT0023

Setting Control modes (Note 1) P S T CP/CL 00 01 For manufacturer setting (Note 2) 02 SON SON SON SON 03 RES RES RES RES 04 PC PC PC 05 (Note4) EM1 EM1 EM1 EM1 06 CR 07 ST1 RS2 ST1 08 ST2 RS1 ST2 09 TL1 TL1 TL1 0A LSP LSP LSP 0B LSN LSN LSN 0C For manufacturer setting (Note 2) 0D SP1 SP1 0E SP2 SP2 0F SP3 SP3 10 LOP LOP LOP 11 CDP CDP CDP 12 to 1F For manufacturer setting (Note 2) 20 MD0

7.5

Flat ribbon cable (PC wiring) S6B: EX510 serial transmission Symbol Stations 02 08 Symbol Stations 02 08 2 stations 8 stations 2 stations 8 stations 1 3 2 D side U side Stations G: Flat ribbon cable (PC wiring, with power supply terminal) Symbol Stations 02 08 2 stations 8 stations SS3J3-V60PD2-06D 1 set (Manifold part no.)

LEC-OM07605CN

0.01 0.02 0.02 1 [J] 5.6 22 64 [J] 56 220 640 (5) [] 2.5 1.2 0.9 (3) [] 20 1 [J] 5.6 22 64 145V TND20V-680KB (135[V]) (78) 370V TND10V-221KB (360[V]) 1.

AC Servo Motor Driver (Network card type ）

PC _ _ ] 03: [Pr. PD _ _ ] 04: [Pr. PE _ _ ] 05: [Pr. PF _ _ ] 06: Parameter for manufacturer setting 07: Parameter for manufacturer setting 08: Parameter for manufacturer setting 09: Parameter for manufacturer setting 0A: Parameter for manufacturer setting 0B: [Pr. PL _ _ ] 0C: [Pr. PT _ _ ] 0E: [Pr.

90

P Single unit Note 4) Vacuum pump system J N.C. None Note 5) Self-holding release valve linked For manifold Q R N.C. Note 7) N None None Silencer exhaust A Note 3) Only non-locking type is available for the manual override for K, J, R. Note 4) When J is selected for vacuum pump system, install a release valve or vacuum breaker.

CLQ

A type mounting bracket B type mounting bracket Joint YA YB YU 56 67 83 100 18 22 28 36 6 8 10 12 55 100 195 340 YA-03 YA-05 YA-08 YA-10 32, 40 50, 63 80 100 Applicable mounting brackets Bore size (mm) Joint A type B type B type mounting brackets 32, 40 YU-03 YA-03 YB-03 50, 63 YU-05 YA-05 YB-05 80 YU-08 YA-08 YB-08 100 YU-10 YA-10 YB-10 Allowable eccentricity (mm) RS 32 40 50 63 80 100 Bore

AC Servo Motor Driver (CC-Link Type ）

Supplied regenerative resistors or regenerative option is used with the servo amplifier of 11k to 22kW. 01: FR-BU2-(H) FR-RC-(H) FR-CV-(H) 02: MR-RB032 03: MR-RB12 04: MR-RB32 05: MR-RB30 06: MR-RB50(Cooling fan is required) 08: MR-RB31 09: MR-RB51(Cooling fan is required) 80: MR-RB1H-4 81: MR-RB3M-4(Cooling fan is required) 82: MR-RB3G-4(Cooling fan is required) 83: MR-RB5G-4(Cooling fan

Compact Cylinder with Lock Series CLQ

CNS YA YB YU Type A mounting bracket YA-03 YA-05 YA-08 YA-10 6 18 56 55 Type B mounting bracket Joint 8 22 67 100 CLS 10 28 83 195 12 36 100 340 CLQ Applicable mounting bracket Bore size (mm) Joint Type A mounting bracket Type B mounting bracket RLQ Type B Mounting Bracket 32, 40 YU-03 YA-03 YB-03 MLU 50, 63 YU-05 YA-05 YB-05 80 YU-08 YA-08 YB-08 MLGP 100 YU-10 YA-10 YB-10 RS ML1C Allowable

Compact Cylinder with Lock Series CLQ

A type mounting bracket B type mounting bracket Joint YA YB YU 56 67 83 100 18 22 28 36 6 8 10 12 55 100 195 340 YA-03 YA-05 YA-08 YA-10 32, 40 50, 63 80 100 Applicable mounting brackets Bore size (mm) Joint A type B type B type mounting brackets 32, 40 YU-03 YA-03 YB-03 50, 63 YU-05 YA-05 YB-05 80 YU-08 YA-08 YB-08 100 YU-10 YA-10 YB-10 Allowable eccentricity (mm) RS 32 40 50 63 80 100 Bore

CLQ

CLS YA YB YU Type A mounting bracket Type B mounting bracket Joint 32, 40 50, 63 80 100 YA-03 YA-05 YA-08 YA-10 56 67 83 100 18 22 28 36 6 8 10 12 55 100 195 340 CLQ MLGP Applicable mounting bracket Bore size (mm) Joint RLQ Type A mounting bracket Type B mounting bracket Type B Mounting Bracket 32, 40 YU-03 YA-03 YB-03 MLU 50, 63 YU-05 YA-05 YB-05 80 YU-08 YA-08 YB-08 ML1C 100 YU-10 YA-10

LEC-OM02704CN

C 1. ##0064 ## 00 01 1 02 2 03 3 62 62 63 63 64 64 2. $$$0255 3. ** 4.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

L ZY O L ZF G H F ZP K J SP ZCUK B C E D I A 2 x 4.5 AMJ AMV AEP HEP Related Equipment A B C D E F G H I J K L Model ZFC050-02 ZFC050-23 ZFC050-04 ZFC051-01 ZFC051-03 58.5 12.75 12.75 2 3.2 4 33 25 10 10.5 10.5 12 8.5 13.75 58 12.5 12.5 1/8" 5/32" ZFC100-04 4 ZFC100-06 6 53.2 9.1 14.1 30 10 18 11.6 19.5 23 20 29 ZFC101-03 5/32" ZFC101-07 1/4" ZFC200-06 6 ZFC200-08 8 67 15.5 17.5 34 14 22

AC Servo Motor Driver (CC-Link Type ）

Supplied regenerative resistors or regenerative option is used with the servo amplifier of 11k to 22kW. 01: FR-BU2-(H) FR-RC-(H) FR-CV-(H) 02: MR-RB032 03: MR-RB12 04: MR-RB32 05: MR-RB30 06: MR-RB50(Cooling fan is required) 08: MR-RB31 09: MR-RB51(Cooling fan is required) 80: MR-RB1H-4 81: MR-RB3M-4(Cooling fan is required) 82: MR-RB3G-4(Cooling fan is required) 83: MR-RB5G-4(Cooling fan

Secondary Batteries

/Cap (Resin part only) RBC C 08 Applicable model 08 10 14 20 27 90-RBC2015 90-RBC2725 90-RBC0805, 0806 90-RBC1006, 1007 90-RBC1411, 1412 Cap Cap cannot be mounted for basic type. Please place an order with cap type from the beginning.

5-Port Solenoid Valve

Applicable fitting size d (Metric size) Model A L D Applicable fitting size d (Inch size) Model A L D Manifold Options d 2 KJP-02 8.2 17 3 3.2 KQ2P-23 16 31.5 5 4 KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 KQ2P-10 22 43 12 12 KQ2P-12 24 45.5 14 1/8" KQ2P-01 16 31.5 5 5/32" KQ2P-03 16 32 6 1/4" KQ2P-07 18 35 8.5 5/16" KQ2P-09 20.5 39 10 3/8" KQ2P-11 22 43 11.5 1/2" KQ2P-13 24

Air Cylinder Series MB

CM2 CG1 Auto switch model Bore size (mm) 32 40 50 63 80 100 125 MB D-A9/A9V D-M9/M9V D-M9W/M9WV D-M9AL/M9AVL BMB5-032 BMB5-032 BA7-040 BA7-040 BA7-063 BA7-063 BA7-080 MB1 D-A3/A44 D-G39/K39 CA2 BMB2-040 BMB1-050 BMB1-063 BMB1-080 BMB1-100 BMB2-032 BS1-125 D-A5/A6 D-A59W D-F5/J5 D-F5W/J59W D-F59F D-F5BAL D-F5NTL CS1 CS2 BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 BT-08 The figure shows the mounting

With Factory Installed

When using seal tape, leave one thread exposed when wrapping fitting or pipe. 0.1 i'--... 01 5 O~ o 0.2 0.3 0.4 0.5 0.6 0.7 08 0.9 1 00 1000 2000 Flow ra te / mi n IANR) Inlet pressure MPa AR3001-03 AR3001-03 0.6 ~ 0.5 ---'" " Jp J 0.25 '" I r~r " ::;; l' 0.2 ~ --P l' a. r< & "" & l' ::> 0.4 ~ ~ ~ 0.3 ~ -... a. ID '$'2 1-?/"(9 . "OS .

NCG/CG1

03 CB CT CH TZ Applicable bore (mm) Applicable pin O.D.