Body Size: 2 (1/8, 1/4 Basis), Control Method: 0 (Meter-out), Thread: F [G(PF)], Port Size: 02 (1/4), Sealant: S (Sealant)

Body Size: 2 (1/8, 1/4 Basis), Control Method: 0 (Meter-out), Thread: F [G(PF)], Port Size: 01 (1/8), Sealant: S (Sealant)

Body Size: 2 (1/8, 1/4 Basis), Control Method: 0 (Meter-out), Thread: R(PT)/Rc(PT)/Meter Thread (M5), Port Size: 02 (1/4), Sealant: S (Sealant)

A

+.002 1.88 2.56 3.50 .75 NCA1-P325 1.25 0 0.75 +.004 .53 .78 .62 -.01 +.002 Courtesy of Steven Engineering, Inc. !

HRX-OM-S004

Terminal resistance 1 1 1 9 5 9 5 9 5 SDSD+ SDSG SD+ SD+ SD+ SG SDSG SDSG Terminal resistance120 Master This product This product This product (first slave) second slave 31st slaves Do not connect any wire to other PIN numbers. Fig. 3-14 Connection of RS-485 [Tips] Both ends of the communication connection (the end nodes) need to be connected to the host computer.

HRX-OM-Q026

Terminal resistance 1 1 1 9 5 9 5 9 5 SDSD+ SDSG SD+ SD+ SD+ SG SDSG SDSG Terminal resistance120 Master This product This product This product (first slave) second slave 31st slaves Do not connect any wire to other PIN numbers. Fig. 3-14 Connection of RS-485 [Tips] Both ends of the communication connection (the end nodes) need to be connected to the host computer.

HRX-OM-W032

Terminal resistance 1 1 1 9 5 9 5 9 5 SDSD+ SDSG SD+ SD+ SD+ SG SDSG SDSG Terminal resistance120 Master This product This product This product (first slave) second slave 31st slaves Fig. 3-12 Connection of RS-485 [Tips] Both ends of the communication connection (the end nodes) need to be connected to the host computer.

VQ5000

Junction cover + + 1 3 2 4 Terminal block Marking A side B side 6 mm Connection M3 screw 5 How to Order Manifold T1 03 SD VV5Q 5 1 Option 08 Symbol Option None Exhaust cleaner for Rc 1: D side exhaust Exhaust cleaner for Rc 1 1/2: D side exhaust Exhaust cleaner for Rc 1: U side exhaust Exhaust cleaner for Rc 1 1/2: U side exhaust Series Nil CD1 CD2 CU1 CU2 SB SD SU 5 VQ5000 Note) Note)

V

) NVR1220-N02 (1/4 NPT) VR1210-01 (1/8 PT) VR1220-02 (1/4 PT) (N)VR1210 (N)VR1220 Courtesy of Steven Engineering, Inc. !

HEC-OM-S008

] :01 06 0050 0 A9 [CR][LF] Stop 0050 Control operation mode 1 :01 06 0050 0001 A8 [CR][LF] :01 06 0050 0001 A8 [CR][LF] Start 0051 Temperature setting 1 :01 06 0051 0BB8 E5 [CR][LF] :01 06 0051 0BB8 E5 [CR][LF] Set at 30.0 deg.C. 0052 Offset setting 1 :01 06 0052 0032 75 [CR][LF] :01 06 0052 0032 75 [CR][LF] Set at 0.50 deg.C.

VS 8-2/VS 8-4

RD SD LRUN PW B RATE 131 8 115 80 x1 x10 STATION NO.

A_HEC-OM-J017

34 Reading alarm status 2 01 32 05 34 36 3B 0D 01 32 02 34 30 38 30 03 30 30 0D Answer ERR11 Answer -1.52 deg.C Reading offset 01 32 05 36 36 3D 0D 01 32 02 36 2D 31 35 32 03 32 3F 0D 2 36 Offset setting (without writing EEPROM) 01 32 02 36 30 31 35 30 03 33 30 0D 2 Set at +1.50 deg.C 06 32 0D 37 Temperature setting (with writing EEPROM) F 01 3F 02 37 32 35 30 30 03 33 3F 0D 06 3F 0D Set

Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

JXCx-OMT0028CN

LEC-CGD LEC-CGD N.C. 1 N.C. 2 1 1 1 1 SD+ 3 2 2 2 2 SD4 3 3 3 3 N.C. 5 4 4 4 4 N.C. 6 N.C. 7 1 2 3 4 1 2 3 4 N.C. 8 LEC CN4 LEC CN4 No. No.

Shock Absorbers and Rate Controls

SQUARE FLANGE (SD Lock / srot a ffi t I l ] T @ -l f.-.' (.iolog l{0.

Profi-E

P For D PV0 Baud rat e ( N ot e) 9. 6k/19. 2k/45. 45k/93. 75k/187. 5k /500k/1. 5M /3M /6M /12M bps Set by m ast er G SD Fi l e SM C_1412.

AC Servo Motor Driver (SSCNET /H Type)

8E.1 USB communication receive error SD 8E.2 USB communication checksum error SD 8E.3 USB communication character error SD 8E USB communication error 8E.4 USB communication command error SD 8E.5 USB communication data number error SD 888 Watchdog 88._ Watchdog DB Note 1.

Plug-in Unit

PW 0 0 0 1 1 1 9 9 9 PW LRUN 2 2 2 8 8 8 3 3 3 7 7 7 4 4 4 6 6 6 SD RD LERR. 5 5 5 L RUN SD RD x10 x1 24V 0V +24V 24G DA DB FG DG L ERR.

VQ5000

(Noise reduction of 35dB or more) Note ) If a large amount of drainage is generated at the air supply, note that drainage will be discharged together with the exhaust air. 71.2 68.2 58.8 107.8 SMC 122 2 B SMC 1 P 69 SD type 12 3 X 5 R1 R2 PE 4 A Note) The drawing shows a VV5Q51--SD SU type 36 Base Mounted Type Series VQ5000 Dimensions (mm) 1in 25.4mm Optional Manifold Parts Manifold mounted