90

size: 4 Inch size: 5/32" 3.5 38.5 A 16.5 1 Suction filter 15 Vacuum (V) port 78.8 A C V port type 06 08 07 09 6 8 1/4" 5/16" 8.25 11.4 10.8 11.4 4 6 4.76 6 1 Refer to page 22 for dimensions with a bracket mounted.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

Metric size Inch size 100 200 205 300 400 M5 standard 3.2 1/8 standard 23 04 06 08 10 12 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 1/4 standard 4 6 8 10 12 3/8 standard 1/2 standard With One-touch fittings Use 1/8" tube.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

Note) Metric size Inch size 23 04 06 08 10 12 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Port size AS-FE 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 KE N AS-FG AS-FG AS-FP Note) For applicable tubing O.D. selection, refer to the Model on page 680. Use 1/8" tube.

reduces flow setting time

Example) AS2201FS-G01-06 Control type Note) 0 Meter-out 1 Meter-in Applicable tubing O.D. Note 1) Metric size 23 3.2 Note 2) 04 4 06 6 08 8 10 10 12 12 16 16 Inch size Note 3) 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" Note) Meter-out and meter-in types can be visually identified by color of the knob.

AS-FG/ASD-FG

Type Applicable tube outside diameter Metric size Inch size 2 3 Elbow Universal 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 03 05 07 09 11 13 3.2 4 6 8 10 12 23 04 06 08 10 12 Control method 0 1 Meter-out Meter-in With One-touch fittings Use a 1/8" tube.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

-01-07 (S) 1/4 11.2 10.2 16.4 29.1 20.2 38.7 15 AS231FSG1-01-09 (S) 5/16 13.2 30.1 21.5 40 14.2 16 AS231FSG1-02-03 (S) 5/32 7.2 9.6 12 1/8 13 (12.7) 24 AS231FSG1-02-07 (S) 1/4 11.2 19 33.8 21.4 43.9 26 AS231FSG1-02-09 (S) 5/16 13.2 34.9 23.5 46 14.2 27 AS231FSG1-02-11 (S) 3/8 15.9 20.9 38.1 24.7 47.3 15.6 28 AS331FSG1-02-07 (S) 1/4 3/8 19 11.2 12.9 16.6 20.2 36 21.4 57.8 63.1 61.7 57.9 56.5

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Note) Metric size Inch size 23 04 06 08 10 12 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Port size AS-FE KE 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AS-FG AS-FG N AS-FP AS-FM Note) For applicable tubing O.D. selection, refer to the Model on page 542. Use 1/8" tube.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Inch Size Holder for speed controller Applicable tubing 01 03 07 09 11 13 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" AS1002FS TMH-01J TMH-03J TMH-07J AS2002FS AS2052FS TMH-07 TMH-09 AS3002FS TMH-10 AS4002FS TMH-13 Tubing size Applicable model Dimensions D2 through Part no.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Note) Metric size Inch size 23 04 06 08 10 12 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Port size AS-FE KE 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AS-FG AS-FG N AS-FP AS-FM Note) For applicable tubing O.D. selection, refer to the Model on page 542. Use 1/8" tube.

Speed Controller with One-touch Fitting

03(S)A 5/32" 8.2 AS221F-02-07(S)A 1/4" 11.2 23.4 32.7 (32.8) 19 (19) AS221F-02-09(S)A 5/16" 13.2 23.9 33.2 (33.3) 14.2 19 (20) AS221F-02-11(S)A 3/8" 15.5 26.4 35.7 (35.8) 15.6 20 (21) AS321F-02-07(S)A 1/4" 1/4 19 11.2 16.6 21.8 32.1 36.4 50 48.4 44.5 42.9 13.3 40 (40) AS321F-02-09(S)A 5/16" 13.2 22.7 33 14.2 41 (41) AS321F-02-11(S)A 3/8" 15.5 26.7 37 35.9 15.6 AS321F-03-07(S)A 1/4" 3/8 19

VM

Lubrication Not required/Turbine oil #1 (ISO VG32) Port size (Nominal size) Rc(PT) (6A) 110g 1 8 Weight (Basic) Model Actuator part No.

F

8 03 5/32 05 3/16 07 1/4 09 5/16 11 3/8 13 1/2 Metric Size: 23 3.2mm 04 4mm 06 6mm 08 8mm 10 10mm 12 12mm 16 16mm Imperial 32 UNF 10-32 33 1/16 34 1/8 35 1/4 36 3/8 37 1/2 03 5/32 Dia Reducer 05 3/16 Dia Reducer 07 1/4 Dia Reducer 09 5/16 Dia Reducer 11 3/8 Dia Reducer 13 1/2 Dia Reducer 00 Same Diameter Tubing 99 Plug-In Type ACCESSORIES G A S K E T S F O R UNI ONE TOUCH FITTINGS Applicable

High Purity Chemical Valve

Symbol Body class 2 3, 4, 5, 6 3, 4, 5, 6 Thread type M5 Rc 1/8 NPT 1/8 Nil Variations N LVC20 LVC30 Model LVC40 LVC50 LVC60 Orifice diameter 4 8 10 16 22 Tubing O.D. Inch sizes Metric 3, 4, 6 6, 8, 10 10, 12 12, 19 19, 25 03 05 07 11 13 19 25 1/8 3/16 1/4 3/8 1/2 3/4 1 Inch Valve type Symbol Type 1/8, 3/16, 1/4 1/4, 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 Basic type N.C. PB PA PA N.O.

VM

thread) 1 8 Rc Roller lever 01 Black One way roller lever 02 Green SA NPT F01 N01 1 8 G 1 8 Straight plunger 05 Y Yellow Roller plunger 06 VA Cross roller plunger 07 Piping direction and the length of push rod 0 Long Side ported Height of rod push Bottom ported Toggle lever 08 1 Short 2 Long 3 Short SA Push button (Mushroom) 30 Actuator 1 0 Short Long Side ported Push button (Extended) 32

4/5 Port Solenoid Valve

0.37 0.28 0.30 0.32 0.24 0.57 0.37 0.45 0.55 0.36 0.50 0.51 0.50 0.38 0.46 2.3 2.0 2.1 2.3 2.1 2.1 2.5 2.2 2.2 2.2 0.26 0.25 0.25 0.26 0.24 0.20 0.23 0.30 0.23 0.26 0.55 0.49 0.51 0.54 0.50 0.50 0.59 0.55 0.52 0.53 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/8 C6 C8 1/8 C6 C8 1/8 1/8 C6 C8 Type SS5YJ7-20 Body ported SYJ72 for internal pilot Type SS5YJ7-21 Type SS5YJ7-40 Base mounted Type SS5YJ7

V

P L U G VQ 1 2 4 0 1 B L O C K VA LV E 23 04 06 08 01 03 07 Courtesy of Steven Engineering, Inc. !

Series KV2 Fittings

(g) Bag/Box Quantity MB D2 D3 D4 D5 D6 L1 L2 L3 5/32** 5/32 5/32 5/32 1/4** 1/4 1/4 1/4 3/8** 3/8** 3/8 3/8 3/8 1/2** 1/2** 1/2** 1/2 1/2 1/2 5/8** 1/4 5/32 5/32 5/32 3/8 1/4 1/4 1/4 1/4 1/4 3/8 3/8 3/8 1/4 3/8 3/8 1/2 1/2 1/2 5/8 1/4-18 1/16-18 1/8-27 1/4-18 1/4-18 1/8-27 1/4-18 3/8-18 1/4-18 3/8-18 1/4-18 3/8-18 1/2-14 1/2-14 3/8-18 1/2-14 1/4-18 3/8-18 1/2-14 1/2-14 KV2Y03-07-35S KV2Y03

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

Note1) Metric size Inch size 02 2 23 3.2 Note 2) 01 1/8" 03 5/32" 07 1/4" 04 4 06 6 Note 1) For selecting applicable tubing O.D., refer to the Model on page 667. The color of the release button is white (metric, inch). Note 2) Use 1/8" tube.

Table of Contents

Symbol Thread type M5 Rc 1/8 NPT 1/8 Body class 2 3, 4, 5, 6 3, 4, 5, 6 LVH Nil N Variations LVD LVC20 LVC30 Model LVC40 LVC50 LVC60 Orifice diameter LVQ Inch sizes 4 8 10 16 22 Tubing O.D. 03 05 07 11 13 19 25 1/8 3/16 1/4 3/8 1/2 3/4 1 Metric 4, 6 6, 8, 10 10, 12 12, 19 19, 25 LQ Inch Valve type 1/8, 3/16, 1/4 1/4, 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 Symbol Type LVN Basic type N.C.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Easily replaced filter element ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 " " " " " 7 7 12 16 19 22 22 30 40 62 20 20 30 75 100 3 16 1 4 1 4 3 8 1 2 Note 1) Flow rate is less than 0.003 MPa of the initial pressure drop. Note 2) Will be manufactured upon receipt of order. Note 3) Avoid use under pressurization.