HRX-OM-I051

An excessive amount of the circulating fluid is observed in the tank. 07 Reservoir High Level WRN Continued Drain the circulating fluid. Check the load specification. Replacement of the thermal fuse is required. Call the supplier for service. 08 Temp. Fuse Cutout FLT Stop The circulating fluid tank was raised in temperature.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

As a guideline, when the feed forward gain setting is 100%, set 1s or more as the acceleration/deceleration time constant up to the rated speed. 0 % 0 to 100 PB05 For manufacturer setting Do not change this value by any means. 500 5 13 5. PARAMETERS No.

I

Response Frequency 100Hz (10ms) Operating Temperature Range 0~500C (air should not be frozen) / 32~120F Temperature 25+-10 0C +-0.3% F.S. or less Characteristic* 0-500C /32~120F +-0.5% F.S. or less Repetition Accuracy +-0.2% F.S. or less Noise Resistance 500Vp-p pulse width 1s standing 1ns Withstand Voltage Between whole wires and case 1000VAC 50/60Hz for one minute Insulation Resistance

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 EXH port silencer 63 Silencer is installed in the EXH port. 38 22 13 Silencer P/N Model VQZ100 VQZ200 VQZ300 NAN110-N01 NAN110-N01 NAN200-N02 NAN200-N02 NAN110-N01 24 Q Q Q Technical Reference 35 19.4 Q Q Series VQZ100200300 Q 5 5

ASP

Metric size Inch size 06 08 10 12 3 4 5 6 1/8 standard 1/4 standard 3/8 standard 1/2 standard 07 09 11 13 1/4" 5/16" 3/8" 1/2" 6 8 10 12 Universal Port size Cylinder side R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Pilot port M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 G 1/8 G 1/8 G 1/4 10-32 UNF NPT 1/8 NPT 1/8 NPT 1/4 Symbol 01 02 03 04 F02 F03 F04 N01 N02 N03 N04 With One-touch

30

(inch) H (Width across flat) 12.7 17.46 12.7 17.46 12.7 17.46 22.23 14.29 17.46 22.23 17.46 22.23 23.81 22.23 23.81 Connection thread NPT Note 1) D M Weight (g) L1 L2 Model KQB2F01-N01 KQB2F01-N02 KQB2F03-N01 KQB2F03-N02 KQB2F07-N01 KQB2F07-N02 KQB2F07-N03 KQB2F09-N01 KQB2F09-N02 KQB2F09-N03 KQB2F11-N02 KQB2F11-N03 KQB2F11-N04 KQB2F13-N03 KQB2F13-N04 24.1 29.1 24.6 29.6 25 30 31.2 27.2 32.2

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

-01SD 1/8" 8.4 4 9.3 27.5 20.4 5/32" 9.3 20.4 27.5 12.7 14.3 AS221F-01-06SD AS221F-N01-03SD 6 11.6 13.5 35.6 R 1/8 14.2 7.2 1.2 31.6 12 3/16" 11.4 23.1 30.2 14.3 16.5 AS221F-01-08SD AS221F-N01-05SD NPT 1/8 12.7 14.2 7.2 35.6 1.2 31.6 8 15.2 18.5 32.4 25.3 AS221F-01-10SD AS221F-N01-07SD 1/4" 13.2 23.9 31 18.5 10 18.5 21 40.2 33.1 15 AS221F-02-04SD AS221F-N01-09SD 5/16" 15.2 25.3 32.4 21 15

VR4151/4152

Voltage 2 2 4 4 15 10 250 VAC 1.5 1.5 3 3 15 10 8 VDC 1.5 2.5 3 5 15 15 14 VDC 1.5 2.5 3 5 15 10 30 VDC 1.5 2.5 3 5 6 5 125 VDC 0.3 0.05 0.3 0.05 0.5 0.05 250 VDC 0.2 0.03 0.2 0.03 0.25 125 VAC 15 15 15 15 6 0.5 0.25 0.03 10 10 15 10 5 0.05 0.03 JIS Symbol How to Order 01 VR320 0 01 Port size Precautions Rc 1 8 NPT N01 1 8 Be sure to read before handling.

Compact Manifold Regulator Series ARM5

ARM10-07 (One-touch fittings: IN 6, OUT 4) ARM10F-07-1 ARM10-07-1 (One-touch fittings: IN 6, OUT 4) Condition: Inlet pressure 0.5 MPa Condition: Inlet pressure 0.7 MPa 0.35 0.7 0.6 0.30 Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0.0 0.00 0 50 100 150 0 20 40 60 80 100 Flow rate l/min (ANR) Flow rate l/min (ANR) ARM10F-08 ARM10-08 (One-touch fittings

Dual Speed Controller with One-touch Fitting Series ASD 1

Weight (g) d T H D1 D2 D3 L1 L2 L3 Model AK 1/8" ASD230F-U10/32-01 8.4 12 10-32 UNF 12.9 8 25.5 22.2 28.6 25.8 29.4 11.7 28.3 10 17.5 7.8 9.6 25 5/32" ASD230F-U10/32-03 9.3 13 ASS 20.7 7.8 16.5 15 3/16" ASD230F-U10/32-05 10-32 UNF 8 9.6 10 11.7 28.3 25.5 28.6 25.8 25 22.2 35.2 23.3 11.4 13.5 13 1/4" ASD230F-U10/32-07 32.6 12 ASR 30 16.5 14 3/16" ASD330F-N01-05S 39.5 39.6 23.9 11.6 34.6 17

ASD

AS Weight (g) d T H D1 D2 D3 L1 L2 L3 Model 1/8" ASN ASD230F-U10/32-01 8.4 12 10-32 UNF 12.9 8 25.5 28.6 22.2 25.8 29.4 9.6 10 11.7 7.8 28.3 17.5 25 5/32" ASD230F-U10/32-03 9.3 13 3/16" AQ ASD330F-N01-05S 16.5 11.6 34.6 39.5 14 39.6 23.9 30 1/4" NPT1/8 ASD330F-N01-07S 17 13.2 42.2 25.6 12.7 36.1 27 31.1 14.2 11.8 10.6 32 33.9 38.9 15.8 31 5/16" ASV ASD330F-N01-09S 18.5 15.2 44.8 28.2 1/4"

Serial Network

-00 Fax: 08-603-07-10 Hungary Phone: 01-371-1343 Fax: 01-371-1344 Taiwan Phone: 03-322-3443 Fax: 03-322-3387 Brasil Phone: 11-4051-1177 Fax: 11-4071-6636 Richmond Phone: (804) 527-0500 Fax: (804) 527-2100 Cleveland Phone: (330) 963-2727 Fax: (330) 963-2730 Switzerland Phone: 052-396-3131 Fax: 052-396-3191 Ireland Phone: 01-4039000 Fax: 01-4640500 Thailand Phone: 02-963-7099 Fax: 02-501-2937

Built-in One-touch Fitting: F (One-touch Fitting), Thread: N (NPT), Accessory: None, Tube Size: 07 (Ø1/4 One-touch Fitting)

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Standard, Shape: One-Touch Coupling Type, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Relief, Reverse Flow Function (Relief): No, Supply Side Connection Type: [NPT] NPT, Supply Side, Connection Diameter: 1/8, Flow Direction: [Right] From Left to Right, Control Side Connection

LEC-OM07605CN

PA24 A-4] 3(_ _ _ 1) 0 1 2 0h _ x _ _ 0h x _ _ _ 0h PB03 TFBGN 6rad/s6rad/s 18000 0 [rad/s] 18000 PB04 FFC 100%0 100%1s 0 0 [%] 100 PB06 GD2 [Pr. PA08] 0.00100.00 7.00 [] 0.00 300.00 Pr. PA08 _ _ _ 0(21()) _ _ _ 1(1) _ _ _ 2(2) _ _ _ 3() _ _ _ 4(22) PB07 PG1 [Pr. PA08] 15.0 1.0 [rad/s] 2000.0 Pr.

ZP

T01 P. 72 P. 73 ZP (20, 25, 32) U ZP (20, 25, 32) C ZP (20, 25, 32) B ZP25D ZP2-B25J ZP2-B30J ZP2-25UCL ZP2-32UCL ZPT3-A6, A8 ZPT3-B5, B6, B8 B01, N01 T01 P. 72 P. 73 ZP (40, 50) U ZP (40, 50) C ZP (40, 50) B ZP40D ZPT4-A6, A8 ZPT4-B6, B8 B01, N01 T01 ZP2-40UCL ZP2-50UCL P. 72 P. 73 Adapter Assembly Part No.

HRX-OM-M005

CH1-07 CH2-07 Reservoir High Level WRN Continued Drain the circulating fluid. Check the load specification. Replacement of the thermal fuse is required. Call the supplier for service. CH1-08 CH2-08 Temp. Fuse Cutout FLT Stop The circulating fluid tank was raised in temperature. The temperature of the circulating fluid exceeded the specified value.

44

KFG2H0122-N01 KFG2H0122-N02 KFG2H0325-N01 KFG2H0325-N02 KFG2H0704-N01 KFG2H0704-N02 KFG2H0906-N01 KFG2H0906-N02 KFG2H0906-N03 KFG2H1163-N02 KFG2H1163-N03 KFG2H1163-N04 KFG2H1395-N02 KFG2H1395-N03 KFG2H1395-N04 KQ2 16.2 19.4 16.2 19.4 17.9 21.1 20.1 22.3 23.6 25.3 25.6 27.1 27.1 27.2 28.7 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 12 14 12 14 12 14 19.4 23.8 19.4 23.8 21.1

Vacuum System Peripherals:

Special specifications M 07 07 When creating the special specifications, complete the stations table on the right. Includes number of blanking plate assembly. w Ejector Valve Model Fill in the blanks below with symbols of necessary specifications.

1

Applicable fitting size d (Inch size) Model Applicable fitting size d (Metric size) A L D A L D Model KQ2P-01 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 KQ2P-13 KJP-02 KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-12 d 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 16 16 18 20.5 22 24 31.5 32 35 39 43 46 5 6 8.5 10 11.5 15 2 3.2 4 6 8 10 12 8.2 16 16 18 20.5 22 24 17 31.5 32 35 39 43 45.5 3 5 6 8 10 12 14 D A L Note