Table of Contents

25 25 X (PE) port 1/8 A, B port 2-/4, 3/8 9 1/8 R1, R2 port 2-3/8 P port 1/4, 3/8 Y(PE) port 2 position double : VQ7-6-FG-D double (Reverse pressure): VQ7-6-YZ-D 3 position closed center : VQ7-6-FHG-D exhaust center : VQ7-6-FJG-D pressure center: VQ7-6-FIG-D 155 145 68.5 86.5 76.5 68.5 50 50 50 50 13 (A port) 13 (B port) 13 (A port) 13 (B port) Manual override Manual override A B A B B B

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

B B B B TM SZ 5.4 16.5 VP4 L1 30.5 L2 S0700 38 VQ 1 2 3 4 5 6 7 8 n Stations D side U side VQ4 VQ5 VQC 123.5 SMC SMC SMC SMC SMC VQZ 88.5 B B B B B B B B SQ 47 37.5 A A A A A A A A VFS 2 11.5 9 37.5 28 42 4(A), 2(B) port 2n x Rc 1/8, 1/4 VFR EX123: 2 x G 1/2 EX124: 4 x G 1/2 Use a dripproof plug assembly (AXT100-B04A) for the unused conduit port (G 1/2).

VFS

VFS3320-D/DZ/Y/YZ VFS3420-D/DZ/Y/YZ VFS3520-D/DZ/Y/YZ Lead wire O.D.

V100

Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VT325 VT325V (Vacuum spec. type) VT325 VT325V (Vacuum spec. type) 0.55 kg (For AC) 0.60 kg (For DC) Note) Values for a single valve unit.

VQ7-6/7-8

) 2 position/Double : VQ7-6-FG-D-SC Double (reverse pressure): VQ7-6-YZ-D-SC 3 position/Closed center : VQ7-6-FHG-D-SC Exhaust center : VQ7-6-FJG-D-SC Pressure center : VQ7-6-FIG-D-SC 145 86.5 155 68.5 76.5 50 50 68.5 50 50 Manual override 13 (port A) 13 (port B) Manual override 13 (port A) 13 (port B) B A B A 62 38 50 38 50 62 A B A B Prewired connector (M12) (L approx. 500) R1 R2 P Prewired

Special Applications: 10-AR (Clean Series), Body Size: 50, Reverse Flow: K (Reverse Flow Mechanism), Thread: N (NPT), Port Size: 06 [3/4 (Size 40, 50)], Accessory, Not Attached: G [Round Pressure Gauge w/o Limit Indicator (Size 20 to 60)], Option: YZ (Y+Z)

Special Applications: Clean Series, Body Size: 50, Reverse Flow: Reverse Flow Mechanism, Thread: NPT, Port Size: 06 [3/4 (Size 40, 50)], Accessory, Not Attached: G [Round Pressure Gauge w/o Limit Indicator (Size 20 to 60)], Option: Y+Z

VQ7-6/7-8

25 25 X (PE) port 1/8 A, B port 2-/4, 3/8 9 1/8 R1, R2 port 2-3/8 P port 1/4, 3/8 Y(PE) port 2 position double : VQ7-6-FG-D double (Reverse pressure): VQ7-6-YZ-D 3 position closed center : VQ7-6-FHG-D exhaust center : VQ7-6-FJG-D pressure center: VQ7-6-FIG-D 155 145 68.5 86.5 76.5 68.5 50 50 50 50 13 (A port) 13 (B port) 13 (A port) 13 (B port) Manual override Manual override A B A B B B

VQ7-6/7-8

4, 3/8 25 25 9 Y(PE) port 1/8 R1, R2 port 2-3/8 P port 1/4, 3/8 VFN 2 position double : VQ7-6-FG-D-SC double (Reverse pressure): VQ7-6-YZ-D-SC 3 position closed center : VQ7-6-FHG-D-SC exhaust center : VQ7-6-FJG-D-SC pressure center: VQ7-6-FIG-D-SC 145 155 76.5 68.5 68.5 86.5 50 50 50 50 Manual override Manual override 13 (A port) 13 (B port) 13 (A port) 13 (B port) A B A B 38 50 62 38 50

5 Port Solenoid Valve Series VQZ1000/2000/3000

B B B B B B B B B + IN + + +++A IN A NI NI B B O T U O T U 2 4 To CYL port To CYL port P.930 P.931 P.932 P.941 Connector assembly SY3000-37-80AHousing (1 set: 8 pcs.)

0.

Manual override Caution Nil: Non-locking push type B: Locking type (Tool required) Use standard (DC) specification for continuous duty.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

) 60 11 60 Non plug-in type: VV5FR5-10Station 1Bore size U side 2.3 (Lead wire electrical entry) Manual override (Non-locking) 21 R5.5 B B B B A A A A B B B n A A A B B B B A A A A 3 L2 L1 P = 51 11 11 71.5 (Pitch) P=51 (Pitch) 2 6 [2] 1 71.5 2n x 1/2, 3/4 Stations (A, B port) 24 [23] 20 70 [71.5] 2n x 1/2 28 58 114 91 105.5 176.5 209 9 D side 179 Bottom ported: VV5FR5-10Station 2Port size

VFR

wire electrical entry) P EB EA 31 50 67 81 37 37 43 6-Rc 3/4 61 103 (P , EA, EB port) 72 [ ] = A, B port Rc 3/4 Formula for manifold weight M = 0.911n + 1.621 (kg) n: Station 144 (72) 60 11 60 Non plug-in type: VV5FR5-10Station 1Bore size U side 2.3 (Electrical entry) Manual override (Non-locking) 21 R5.5 B B B B A A A A B B B n A A A B B B B A A A A 3 L2 L1 P = 51 11 11 71.5 (Pitch) P =

VQZ1000/2000/3000

(M) B C A 0.90 1.3 (A) 4 Locking type (Tool required) 1 (P) 5 (R) DIN terminal (Y) DIN terminal (YZ) VQZ2000 N.C.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Rubber seal IP65 Option (Y, YZ only) W Standard IP65 rated Manual override B Non-locking push type (Tool type) Slotted locking type (Tool type) Electrical entry Light and surge voltage suppressor Electrical entry Symbol Grommet (DC specification) Without G L LO M MO Y YO YZ YOS L type plug connector with lead wire L type plug terminal without connector Function Standard type (1.0W) High

Model: AR50, AR50K, AR60, AR60K

VS7-6

A B A B A B A B AXT511 -3 (V) AXT511 -4 (V) 24V DC 12V DC AXT511 -1 (V) AXT511 -2 (V) 100V AC 50/60 Hz 200V AC 50/60 Hz 0.049/0.043 0.024/0.021 0.031/0.020 0.015/0.01 VQ Rated voltage (V) Inrush current (A) Holding current (A) Allowable voltage (V) 0.075 0.15 VQ4 85 to 110% of rated voltage Insulation Class B (130 oC) or equivalent VQ5 A: With 2-M4 X 46 bolts for 2 position valve, B: With

HRX-OM-X084

Piping thread type : When N is selected, NPT thread adapter set will be added. 19: Not included for options Z is selected. 20Not included for options Z,Z1 is selected. 9.1 Specifications HRR Series 9-2 HRX-OM-X084 Chapter 9 Documents 9.1.2 HRR010-W-10/20Table 9-2 Specifications [HRR010-W-10/20-(DMT1)U(YZ)] Model HRR010-W-10-(DMT1)U(YZ) HRR010-W-20-(DMT1)U(YZ) Cooling method Water-Cooled refrigerated

V

L E T U B E OD 6 A P P L I C A B L E T U B E OD 6 Courtesy of Steven Engineering, Inc. !

Body Size: 40, Backflow: K (w/Backflow Function), Thread: N (NPT), Port Size: 06 (3/4), Options: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Y (Upward), Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)