•

zoo ~ ) 2 ~ i 100 E 12 z ,; 2 ~ E , E :; 100 V ~ " I ~ , , " , f< ' ~ 0 u: , ' l ~ ~ 0 w 0 5 10 ~ V " ~ 0 ] w 0 5 10 Needle revolullOOs (RevolutIOns) Needle revolutions (Revolutions) ASP530F ASP630F 12. 1500 'E 20 E 12 11~14:l~ z ~ ~ ~IOOO 15 . , g j " . 000 14 'E ' , ' h E cr z 12 ,; "'500 . l/ : 4 i 1,(" 0 to, 1~ OS, D9 10 ~ E ~ " , "' g 10 : ; ~.; 0 --:' 500 ~ ~ 5 :J" ~ -r ~ 0 w

Digital Pressure Switch

Voltage resistance Z Zero clear (function) Adjusts the displayed pressure value to "0". -13No.PS-OMH0003-F Mounting and Installation Piping Piping connection Connect the fitting to piping. When piping, tighten to an appropriate torque of 13.6 to 15 Nm for ISE70 series and 25 to 28 Nm for ISE75/75H series.

V

U I T T Y P E 42 M A N I F O L D S) External Pilot Types VG342R (See Valve Section) VP34lR, VP54lR, VP74lR (See Valve Section) VNB Series (See Valve Section) S 40R H O W T O O R D E R VQ B A S E M O U N T E D S E R I E S (P L U GI N) S E R I E S Y SY X SX VQ 0 R O R D E R A S S TA N D A R D T Y P E S I Z E F O R E X T E R N A L P I L O T S I Z E 3 5 7 A S S TA N D A R D 1 2 O R D E R A S

I

E R S E R I E S V Y D I M E N S I O N S S E E N E X T P A G E VY1 O O P T I O N T H R E A D B Bracket F Foot (A and 1 body sizes only) G Gauge (not available on D body) N Silencer P I L O T 0 Internal 1 External (not on VYID00) Nil Rc(PT) T NPTF F G(PF) N NPT) B O D Y S I Z E P O R T S I Z E Mounting Type Symbol Symbol P,A port R port Cv Hysteris Sensitivity Repeatability Notes: 1.

F

E R S E R I E S (N)AS1000-4000 S Y M B O L S NAS 3 000 A R E A C O D E Japan, Asia, Australia, UK N Canada, USA P O R T T H R E A D P A N E L M O U N T V E R S I O N R(PT) N NPT B O D Y S I Z E P O R T S I Z E 1 M3, M5 2 1/8, 1/4 Standard 3 3/8 Standard 4 1/2 Standard M3 M3x0.5 M5 M5x0.8 01 1/8 (10-32Nom) 02 1/4 03 3/8 04 1/2 T E C H N I C A L SPECIFICATIONS D I M E N S I O N S S E R I E

Vacuum System Peripherals:

Ejector mounting position ZZYX3 45T U side D side U D J Mounting position of connector Number of ejectors 1 to 3 stations A, B port size (Valve only) U side D side U D C4 C6 4 One-touch fitting 6 One-touch fitting Mixed M SUP/EXH block assembly mounting position Total number of ejector/valve stations U D side D B U side When creating the mixed specifications, complete the stations table on

Digital Pressure Switch

Withstand voltage Z Zero-clear function This function to adjust the displayed pressure to zero. -15No.PS-OMU0009-D Mounting and Installation Installation Mounting Mount the optional bracket and panel mount adapter to the pressure switch.

ALF400 to 900, ALT-5/-9

l i O l e d o M s t e l t u o l i o f o r e b m u N k r a m e R 4 A V 4 s d n e h t o B 6 A V 6 s d n e h t o B Dimensions/Auto feed tank 0 1 A V 0 1 s d n e h t o B 6 1 A V 6 1 s d n e h t o B 4 B V 4 e d i s e n O 6 B V 6 e d i s e n O 8 B V 8 e d i s e n O s n o i t a c i f i c e p S h c t i w S t a o l F n o i t p i r c s e D 2 ~ 1 0 1 4 S I y t i c a p a C W 5 1 : C D , A V 5 1 : C A

Bracket assembly for mounting series AR10~AR60 & AR20K~AR60K modular style regulators.Mounts series AR10~AR60 & AR20K~AR60K regulators; Includes mounting screws for AR50(K), AR60(K)

ITV

x, c: 4 Metric size For single unit z, x, c: 5/32" Inch size Connection size z, c: 6, x: 4 Metric size Manifold z, c: 1/4", x: 5/32" Inch size (1) Weight 100 g or less (without options) Note 1) Indicates the weight of a single unit.

Digital Pressure Switch ( compatible)

Nil (Rear piping) L (Bottom piping) Bracket A A1 ZS-46-A1 Bracket C A3 ZS-46-E B ZS-46-B Panel mount adapter E ZS-35-B D ZS-46-D Panel mount adapter + Front protective cover F ZS-35-E -9No.PS-OMX0002-A Accessories/Part numbers If an option is required independently, order with the following part numbers. Items Part No.

Table of Contents

-01-D Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.

Tamper Proof and Flat Head Screw

AS231F-N02 NPT1/4 20, 25, 32, 40 AS321F-N02 AS331F-N02 NPT1/4 40, 50, 63 AS321F-N03 AS331F-N03 NPT3/8 40, 50, 63 AS421F-N04 AS431F-N04 NPT1/2 63, 80, 100 Note 1) Elbow type only.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

-D Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

AS1001F-23D-X214 AS AS-FE KE AS-FG AS-FP AS-FM AS-D AS-T AS-D AS-T ASP ASN AQ ASV AK VCHC ASS ASR ASQ 591

Stainless Steel 316 Fittings

16.6 18.5 M L Q A D D O N M M Note 1) D is maximum diameter.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

N02 NPT 1/4 NPT 3/8 Note 2) N03 N04 NPT 3/8 NPT 1/2 NPT 3/8 NPT 1/2 Note 1) AS220-02 Note 2) AS320-02 749 AS20-D Series Construction AS3200-02-D Meter-out M5 type U10/32 type Meter-in M5 type U10/32 type AS3210-02-D Component Parts No.

Dual Speed Controller with One-touch Fitting Series ASD

ASD330F-N01-05ST ASD330F-N01-07ST ASD330F-N01-09ST ASD430F-N02-07ST ASD430F-N02-09ST ASD430F-N02-11ST ASD530F-N02-07ST ASD530F-N02-09ST ASD530F-N02-11ST ASD530F-N03-07ST ASD530F-N03-09ST ASD530F-N03-11ST ASD630F-N04-11ST 8.4 9.3 11.4 12 11.6 13.2 15.2 13.2 15.2 18.5 13.2 15.2 18.5 13.2 15.2 18.5 18.5 12.9 17.5 29.4 10-32 UNF 7.8 27.4 0.7 30.7 31 4.5 11.7 10 9.6 8 16.5 13.5 16.5 17 18.5 17

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

-01-D Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.

44

H2 H1 1/8" (3.18) 0.086" (2.18) KFG2F0122-N02 25 8 1/4 26.7 17.2 5 1.5 1.1 17 d KDM 0.098" (2.5) 5/32" (4) KFG2F0325-N02 23 8 1/4 26.7 17.2 5 1.8 1.6 17 KB 1/4" (6.35) 5/32" (3.95) M L2 L1 KFG2F0704-N02 28 12 1/4 27.5 16.3 6 3.3 6 17 KR 5/16" (8) 0.236" (6) KFG2F0906-N03 32 14 3/8 29.4 17 6.6 5.3 17 19 Applicable tubing KA 3/8" (9.53) 1/4" (6.35) KFG2F1163-N03 38 17 3/8 30.5 16.1 7.6 5.6